RU2004112868A - Установка для электронно-лучевого нанесения покрытий - Google Patents
Установка для электронно-лучевого нанесения покрытий Download PDFInfo
- Publication number
- RU2004112868A RU2004112868A RU2004112868/02A RU2004112868A RU2004112868A RU 2004112868 A RU2004112868 A RU 2004112868A RU 2004112868/02 A RU2004112868/02 A RU 2004112868/02A RU 2004112868 A RU2004112868 A RU 2004112868A RU 2004112868 A RU2004112868 A RU 2004112868A
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- Prior art keywords
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0682—Silicides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
- C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Chemical Or Physical Treatment Of Fibers (AREA)
- Spray Control Apparatus (AREA)
Claims (6)
1. Установка для электронно-лучевого нанесения покрытий, которая состоит из технологической камеры, в которой расположены тигли и электронные пушки, форкамеры для загрузки-разгрузки кассет с изделиями, которые покрываются, отличающаяся тем, что кассета с изделиями, которые покрываются, нижней неподвижной конической шестерней устанавливается на расположенной на нижней крышке технологической камеры вертикальной опоре, в середине которой вращается вал, который входит в зацепления с верхней подвижной конической шестерней кассеты.
2. Установка по п.1, отличающаяся тем, что между подвижной и неподвижной коническими шестернями установлены конические шестерни с закрепленными на них изделиями.
3. Установка по п.1, отличающаяся тем, что при вращении верхней подвижной конической шестерни, конические шестерни с закрепленными на них изделиями катятся по нижней неподвижной конической шестерне, одновременно вращаясь вокруг собственной продольной оси.
4. Установка по п.1, отличающаяся тем, что оснащена переходной камерой, которая предназначена для транспортирования кассет с изделиями из технологической камеры к форкамере, где осуществляется перезагрузка кассет.
5. Установка по п.1, отличающаяся тем, что оснащена манипулятором, который расположен в переходной камере для установки и снятия кассет и транспортирования их к форкамере.
6. Установка по любому из пп.1-5, отличающаяся тем, что манипулятор выполнен в виде тележки, которая передвигается по направляющим, которые установлены в переходной камере, по которой с помощью привода передвигается шток для захвата кассет.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH16232003 | 2003-09-23 | ||
| CH01623/03 | 2003-09-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| RU2004112868A true RU2004112868A (ru) | 2005-10-27 |
| RU2265078C1 RU2265078C1 (ru) | 2005-11-27 |
Family
ID=34280717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2004112868/02A RU2265078C1 (ru) | 2003-09-23 | 2004-04-27 | Установка для электронно-лучевого нанесения покрытий |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6923868B2 (ru) |
| EP (1) | EP1520914B1 (ru) |
| CN (1) | CN1600894A (ru) |
| AT (1) | ATE328135T1 (ru) |
| CA (1) | CA2451682C (ru) |
| DE (1) | DE60305704T2 (ru) |
| RU (1) | RU2265078C1 (ru) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1947210A1 (fr) * | 2007-01-16 | 2008-07-23 | ARCELOR France | Procede de revetement d'un substrat, installation de mise en oeuvre du procede et dispositif d'alimentation en metal d'une telle installation |
| US7997227B2 (en) * | 2007-03-13 | 2011-08-16 | General Electric Company | Vacuum coater device and mechanism for supporting and manipulating workpieces in same |
| CN101619446A (zh) | 2008-06-30 | 2010-01-06 | 鸿富锦精密工业（深圳）有限公司 | 镀膜蒸发载具及使用该镀膜蒸发载具的真空镀膜装置 |
| CN102108486B (zh) * | 2009-12-28 | 2014-04-23 | 鸿富锦精密工业（深圳）有限公司 | 镀膜机 |
| DE102010017895A1 (de) * | 2010-04-21 | 2011-10-27 | Ald Vacuum Technologies Gmbh | Vorrichtung zum Beschichten von Substraten nach dem EB/PVD-Verfahren |
| SG10201601693VA (en) * | 2011-03-17 | 2016-04-28 | Sulzer Metco Ag | Component manipulator for the dynamic positioning of a substrate, coating method, as well as use of a component manipulator |
| RU2543023C2 (ru) * | 2012-10-01 | 2015-02-27 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Владимирский государственный университет имени Александра Григорьевича и Николая Григорьевича Столетовых" (ВлГУ) | Роторный подложкодержатель |
| CN104511390A (zh) * | 2013-10-04 | 2015-04-15 | 宁夏中远天晟科技有限公司 | 一种铁路车钩配件的油漆喷涂设备 |
| KR101642188B1 (ko) * | 2014-08-19 | 2016-07-22 | 재단법인 하이브리드 인터페이스기반 미래소재 연구단 | 구조물의 균일 증착을 위하여 비틀림각을 연출하는 지그시스템 |
| RU172351U1 (ru) * | 2017-04-17 | 2017-07-05 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Томский государственный университет систем управления и радиоэлектроники" | Устройство для электронно-лучевого осаждения оксидных покрытий |
| CN107130213B (zh) * | 2017-05-03 | 2019-04-09 | 成都真锐科技涂层技术有限公司 | 多元合金复合薄膜制备设备和制备方法 |
| RU2669953C1 (ru) * | 2017-08-29 | 2018-10-17 | Публичное акционерное общество "Региональный инжиниринговый центр промышленных лазерных технологий "КАИ - Лазер" | Устройство для гибридного лазерно-акустического создания функционально-градиентного материала |
| RU2680115C1 (ru) * | 2017-11-13 | 2019-02-15 | Публичное акционерное общество "Уфимское моторостроительное производственное объединение" (ПАО "ОДК-УМПО") | Способ нанесения покрытия на лопатки газотурбинного двигателя |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3656454A (en) * | 1970-11-23 | 1972-04-18 | Air Reduction | Vacuum coating apparatus |
| US3812486A (en) | 1972-04-18 | 1974-05-21 | Antolelic Ind Ltd | Display having a photoconductor gas discharge control |
| FR2183603B1 (ru) | 1972-05-12 | 1974-08-30 | Cit Alcatel | |
| CH580990A5 (ru) * | 1974-03-04 | 1976-10-29 | Ebauches Sa | |
| JPS5247530A (en) * | 1975-10-14 | 1977-04-15 | Pioneer Electronic Corp | Vaporisation apparatus |
| US4108107A (en) * | 1976-04-01 | 1978-08-22 | Airco, Inc. | Rotatable substrate holder for use in vacuum |
| DE2813180C2 (de) | 1978-03-25 | 1985-12-19 | Leybold-Heraeus GmbH, 5000 Köln | Vakuumbeschichtungsanlage zum allseitigen Beschichten von Substraten durch Rotation der Substrate im Materialstrom |
| FR2644180B1 (fr) * | 1989-03-08 | 1991-05-10 | Commissariat Energie Atomique | Dispositif pour recouvrir une surface plane d'une couche d'epaisseur uniforme |
| US6083322A (en) * | 1997-03-06 | 2000-07-04 | United Technologies Corporation | Modular coating fixture |
| FR2827307B1 (fr) * | 2001-07-12 | 2004-07-16 | Snecma Moteurs | Procede de reparation locale de pieces revetues d'une barriere thermique en ceramique |
| US7754016B2 (en) * | 2002-10-07 | 2010-07-13 | United Technologies Corporation | Multiple axis tumbler coating apparatus |
-
2003
- 2003-12-23 US US10/744,396 patent/US6923868B2/en not_active Expired - Fee Related
- 2003-12-29 EP EP03293346A patent/EP1520914B1/fr not_active Expired - Lifetime
- 2003-12-29 DE DE60305704T patent/DE60305704T2/de not_active Expired - Fee Related
- 2003-12-29 AT AT03293346T patent/ATE328135T1/de not_active IP Right Cessation
- 2003-12-31 CA CA002451682A patent/CA2451682C/fr not_active Expired - Fee Related
-
2004
- 2004-04-27 RU RU2004112868/02A patent/RU2265078C1/ru not_active IP Right Cessation
- 2004-08-24 CN CNA200410064200XA patent/CN1600894A/zh active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| RU2265078C1 (ru) | 2005-11-27 |
| CA2451682A1 (fr) | 2005-03-23 |
| EP1520914B1 (fr) | 2006-05-31 |
| CN1600894A (zh) | 2005-03-30 |
| DE60305704T2 (de) | 2007-03-29 |
| US6923868B2 (en) | 2005-08-02 |
| ATE328135T1 (de) | 2006-06-15 |
| US20050061250A1 (en) | 2005-03-24 |
| CA2451682C (fr) | 2007-03-20 |
| EP1520914A1 (fr) | 2005-04-06 |
| DE60305704D1 (de) | 2006-07-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | The patent is invalid due to non-payment of fees |
Effective date: 20070428 |