JPS5247530A - Vaporisation apparatus - Google Patents

Vaporisation apparatus

Info

Publication number
JPS5247530A
JPS5247530A JP12346275A JP12346275A JPS5247530A JP S5247530 A JPS5247530 A JP S5247530A JP 12346275 A JP12346275 A JP 12346275A JP 12346275 A JP12346275 A JP 12346275A JP S5247530 A JPS5247530 A JP S5247530A
Authority
JP
Japan
Prior art keywords
vaporisation apparatus
vaporisation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12346275A
Other languages
Japanese (ja)
Other versions
JPS5418989B2 (en
Inventor
Tamotsu Hotsuta
Masami Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pioneer Corp
Original Assignee
Pioneer Electronic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Electronic Corp filed Critical Pioneer Electronic Corp
Priority to JP12346275A priority Critical patent/JPS5247530A/en
Publication of JPS5247530A publication Critical patent/JPS5247530A/en
Publication of JPS5418989B2 publication Critical patent/JPS5418989B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12346275A 1975-10-14 1975-10-14 Vaporisation apparatus Granted JPS5247530A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12346275A JPS5247530A (en) 1975-10-14 1975-10-14 Vaporisation apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12346275A JPS5247530A (en) 1975-10-14 1975-10-14 Vaporisation apparatus

Publications (2)

Publication Number Publication Date
JPS5247530A true JPS5247530A (en) 1977-04-15
JPS5418989B2 JPS5418989B2 (en) 1979-07-11

Family

ID=14861218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12346275A Granted JPS5247530A (en) 1975-10-14 1975-10-14 Vaporisation apparatus

Country Status (1)

Country Link
JP (1) JPS5247530A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1520914A1 (en) * 2003-09-23 2005-04-06 Gba S.A. Installation for coating work pieces using electron beam
EP1413643A3 (en) * 2002-10-07 2006-05-17 United Technologies Corporation Multiple axis tumbler coating apparatus
US7182814B1 (en) * 2005-08-12 2007-02-27 Hong-Cing Lin Sample holder for physical vapor deposition equipment

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1413643A3 (en) * 2002-10-07 2006-05-17 United Technologies Corporation Multiple axis tumbler coating apparatus
US7311783B2 (en) 2002-10-07 2007-12-25 United Technologies Corporation Multiple axis tumbler coating apparatus
US7754016B2 (en) 2002-10-07 2010-07-13 United Technologies Corporation Multiple axis tumbler coating apparatus
EP1520914A1 (en) * 2003-09-23 2005-04-06 Gba S.A. Installation for coating work pieces using electron beam
US7182814B1 (en) * 2005-08-12 2007-02-27 Hong-Cing Lin Sample holder for physical vapor deposition equipment

Also Published As

Publication number Publication date
JPS5418989B2 (en) 1979-07-11

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