RO99815B1 - Senzor de umiditate si temperatura si procedeu de realizare - Google Patents
Senzor de umiditate si temperatura si procedeu de realizareInfo
- Publication number
- RO99815B1 RO99815B1 RO129982A RO12998287A RO99815B1 RO 99815 B1 RO99815 B1 RO 99815B1 RO 129982 A RO129982 A RO 129982A RO 12998287 A RO12998287 A RO 12998287A RO 99815 B1 RO99815 B1 RO 99815B1
- Authority
- RO
- Romania
- Prior art keywords
- humidity
- temperature
- sensor
- electrodes
- layer
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract 2
- 230000008021 deposition Effects 0.000 abstract 2
- 238000005507 spraying Methods 0.000 abstract 2
- 239000000919 ceramic Substances 0.000 abstract 1
- 238000005260 corrosion Methods 0.000 abstract 1
- 230000007797 corrosion Effects 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 229910052742 iron Inorganic materials 0.000 abstract 1
- 229910052759 nickel Inorganic materials 0.000 abstract 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Inventia se refera la un senzor de umiditate si temperatura si la un procedeu de realizare a unui astfel de senzor. Senzorul, conform inventiei, este constituit dintr-un suport izolator, pe care sunt dispusi doi elelctrozi conductori cu coeficient cunsocut de variatie a rezistentei electrice cu temperatura, constituind o termorezistenta între care este depus stratul ce îsi modifica rezistenta cu umiditatea relativa, unul sau ambii electrozi constituind elementul sensibil la temperatura. Procedeul de realizare a senzorului prevede depunerea prin pulverizare catodica a unui strat conducator, de exemplu nichel, pe un suport ceramic, dupa care, prin fotoracordare, corodare cu fasciculul de electroni sau prin electroeroziune, este creata o retea de doi electrozi, fiecare în parte având o rezistenta initiala si un coeficient de variatie a rezistentei electrice cu temperatura, cunsocut, iar în final, depunerea, tot prin pulverizare catodica, deasupra retelei de electrozi a unui strat de oxid (de exemplu, fier) sensibil la umiditate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RO129982A RO99815B1 (ro) | 1987-10-06 | 1987-10-06 | Senzor de umiditate si temperatura si procedeu de realizare |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RO129982A RO99815B1 (ro) | 1987-10-06 | 1987-10-06 | Senzor de umiditate si temperatura si procedeu de realizare |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| RO99815B1 true RO99815B1 (ro) | 1990-09-28 |
Family
ID=40907872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RO129982A RO99815B1 (ro) | 1987-10-06 | 1987-10-06 | Senzor de umiditate si temperatura si procedeu de realizare |
Country Status (1)
| Country | Link |
|---|---|
| RO (1) | RO99815B1 (ro) |
-
1987
- 1987-10-06 RO RO129982A patent/RO99815B1/ro unknown
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