GB1105412A - Improvements in or relating to the making of thin film circuit devices - Google Patents
Improvements in or relating to the making of thin film circuit devicesInfo
- Publication number
- GB1105412A GB1105412A GB36580/64A GB3658064A GB1105412A GB 1105412 A GB1105412 A GB 1105412A GB 36580/64 A GB36580/64 A GB 36580/64A GB 3658064 A GB3658064 A GB 3658064A GB 1105412 A GB1105412 A GB 1105412A
- Authority
- GB
- United Kingdom
- Prior art keywords
- spark erosion
- layer
- thin film
- sept
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 title abstract 2
- 238000009760 electrical discharge machining Methods 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- 229910045601 alloy Inorganic materials 0.000 abstract 1
- 239000000956 alloy Substances 0.000 abstract 1
- 239000004411 aluminium Substances 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 239000010949 copper Substances 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 239000010931 gold Substances 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229910001120 nichrome Inorganic materials 0.000 abstract 1
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
- B23H9/06—Marking or engraving
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Mechanical Engineering (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
1,105,412. Resistors; printed circuit. STANDARD TELEPHONES & CABLES Ltd. 3 Sept., 1965 [7 Sept., 1964], No. 36580/64. Headings H1R and H1S. [Also in Division B3] A thin film electric circuit is made by forming a conducting layer (130), Fig. 4 (not shown), on an insulating substrate and then dividing the layer by spark erosion into at least two circuit elements. The spark erosion is performed by a vibrating wire electrode as described in Specification 1,105,411. On a glass substrate (120), there is provided by a vapour deposition a film of " Nichrome " alloy (Registered Trade Mark) (130), upper and lower layers (134), (136) of aluminium separated by a dielectric layer of silicon oxide and connecting tracks (132), (133) of gold or copper. The resistance area 130, the capacitive area (131) and the tracks (132), (133) are then subdivided by spark erosion into individual components (139)-(143), Fig. 5 (not shown), some of which may be interconnected. A continuous metal layer is also provided on the opposite face of the substrate and formed by spark erosion into an interconnection pattern which also includes inductors and terminal areas for transistors, and is connected to the upper face by welded tape connections (151).
Priority Applications (13)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB36579/64A GB1104881A (en) | 1964-09-07 | 1964-09-07 | Improvements in or relating to methods of making thin film electric circuit elements |
| GB36578/64A GB1105411A (en) | 1964-09-07 | 1964-09-07 | Improvements in or relating to apparatus for working conductive materials by electric spark discharges |
| GB36580/64A GB1105412A (en) | 1964-09-07 | 1964-09-07 | Improvements in or relating to the making of thin film circuit devices |
| BR172888/65A BR6572888D0 (en) | 1964-09-07 | 1965-06-06 | APPLIANCE AND METHOD FOR WORKING CONDUCTIVE MATERIALS THROUGH ELECTRIC SPARK |
| SE11489/65A SE336082B (en) | 1964-09-07 | 1965-09-03 | |
| CH1235065A CH445679A (en) | 1964-09-07 | 1965-09-03 | Process for engraving conductive material using electrical spark discharges |
| NL6511616A NL6511616A (en) | 1964-09-07 | 1965-09-06 | |
| BE669273D BE669273A (en) | 1964-09-07 | 1965-09-07 | |
| FR30685A FR1458418A (en) | 1964-09-07 | 1965-09-07 | Method and device for the machining of conductive materials by electrical disruptive discharges |
| GB5164065A GB1107941A (en) | 1964-09-07 | 1965-12-06 | Improvements in or relating to an apparatus and a method for working conductive material by electric spark discharge |
| CH1733366A CH467646A (en) | 1964-09-07 | 1966-12-05 | Device for engraving conductive material by means of electrical spark discharges |
| NL6617159A NL6617159A (en) | 1964-09-07 | 1966-12-06 | |
| FR86295A FR93462E (en) | 1964-09-07 | 1966-12-06 | Method and device for the machining of conductive materials by electrical disruptive discharges. |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB36579/64A GB1104881A (en) | 1964-09-07 | 1964-09-07 | Improvements in or relating to methods of making thin film electric circuit elements |
| GB36580/64A GB1105412A (en) | 1964-09-07 | 1964-09-07 | Improvements in or relating to the making of thin film circuit devices |
| GB36578/64A GB1105411A (en) | 1964-09-07 | 1964-09-07 | Improvements in or relating to apparatus for working conductive materials by electric spark discharges |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1105412A true GB1105412A (en) | 1968-03-06 |
Family
ID=27259378
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB36578/64A Expired GB1105411A (en) | 1964-09-07 | 1964-09-07 | Improvements in or relating to apparatus for working conductive materials by electric spark discharges |
| GB36580/64A Expired GB1105412A (en) | 1964-09-07 | 1964-09-07 | Improvements in or relating to the making of thin film circuit devices |
| GB36579/64A Expired GB1104881A (en) | 1964-09-07 | 1964-09-07 | Improvements in or relating to methods of making thin film electric circuit elements |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB36578/64A Expired GB1105411A (en) | 1964-09-07 | 1964-09-07 | Improvements in or relating to apparatus for working conductive materials by electric spark discharges |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB36579/64A Expired GB1104881A (en) | 1964-09-07 | 1964-09-07 | Improvements in or relating to methods of making thin film electric circuit elements |
Country Status (7)
| Country | Link |
|---|---|
| BE (1) | BE669273A (en) |
| BR (1) | BR6572888D0 (en) |
| CH (1) | CH445679A (en) |
| FR (1) | FR1458418A (en) |
| GB (3) | GB1105411A (en) |
| NL (1) | NL6511616A (en) |
| SE (1) | SE336082B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8319277B2 (en) | 2006-12-20 | 2012-11-27 | Fujitsu Limited | Semiconductor device, method of manufacturing same, and apparatus for designing same |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE9409413U1 (en) * | 1994-06-13 | 1994-09-29 | Oblf, Gesellschaft für Elektronik und Feinwerktechnik mbH, 58454 Witten | Device for marking metallic samples |
| CN113579377B (en) * | 2021-06-11 | 2022-05-17 | 淮阴工学院 | Stepped blade double-loop nesting electrochemical machining device and method |
-
1964
- 1964-09-07 GB GB36578/64A patent/GB1105411A/en not_active Expired
- 1964-09-07 GB GB36580/64A patent/GB1105412A/en not_active Expired
- 1964-09-07 GB GB36579/64A patent/GB1104881A/en not_active Expired
-
1965
- 1965-06-06 BR BR172888/65A patent/BR6572888D0/en unknown
- 1965-09-03 CH CH1235065A patent/CH445679A/en unknown
- 1965-09-03 SE SE11489/65A patent/SE336082B/xx unknown
- 1965-09-06 NL NL6511616A patent/NL6511616A/xx unknown
- 1965-09-07 FR FR30685A patent/FR1458418A/en not_active Expired
- 1965-09-07 BE BE669273D patent/BE669273A/xx unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8319277B2 (en) | 2006-12-20 | 2012-11-27 | Fujitsu Limited | Semiconductor device, method of manufacturing same, and apparatus for designing same |
Also Published As
| Publication number | Publication date |
|---|---|
| NL6511616A (en) | 1966-03-08 |
| BR6572888D0 (en) | 1973-09-18 |
| BE669273A (en) | 1966-03-07 |
| SE336082B (en) | 1971-06-21 |
| FR1458418A (en) | 1966-11-10 |
| GB1104881A (en) | 1968-03-06 |
| GB1105411A (en) | 1968-03-06 |
| CH445679A (en) | 1967-10-31 |
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