JPS54121794A - Hightemperature operation sensor - Google Patents

Hightemperature operation sensor

Info

Publication number
JPS54121794A
JPS54121794A JP2872778A JP2872778A JPS54121794A JP S54121794 A JPS54121794 A JP S54121794A JP 2872778 A JP2872778 A JP 2872778A JP 2872778 A JP2872778 A JP 2872778A JP S54121794 A JPS54121794 A JP S54121794A
Authority
JP
Japan
Prior art keywords
metal plate
substrate
pins
bodies
thru
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2872778A
Other languages
Japanese (ja)
Inventor
Kanemasa Sato
Sadayasu Ueno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2872778A priority Critical patent/JPS54121794A/en
Publication of JPS54121794A publication Critical patent/JPS54121794A/en
Pending legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

PURPOSE: To reduce the heat capacity of the high temperature sensor and enable the same to be heat-insulated from supports by insulation-fixing plural pins to a frame body and securing the thin and slender metal plate mounted with the substrate integrated with each sensor body, etc. to one of these.
CONSTITUTION: Plural pins 3 are fixed by means of hermetic sealing glass 2 or the like to a frame body 1 composed of kovar alloy or the like and a thin and slender metal plate 4 of stainles steel or others whose both ends are secured and supported is bridged to a pair of the opposing pair 3A, 3B out of these. Further an insulation type ceramic substrate 5 composed of alumina or the like is secured by means of heat insulating ceramic adhesive agents or the like to the central part of this metal plate 4 and a high temperature operating sensor body 6, heating heater bodies 7 and temperature sensor bodies 8 are integrated on the substrate 5. The sensor body 6 and heater bodies 7 are wire bonded to the corresponded pins 3 by means of metal fine wires 13 thru 16 with the respectively printed and baked thick film conductor electrodes 9 thru 12 as junction electrodes. Thereby, the accuracy of detection may be improved.
COPYRIGHT: (C)1979,JPO&Japio
JP2872778A 1978-03-15 1978-03-15 Hightemperature operation sensor Pending JPS54121794A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2872778A JPS54121794A (en) 1978-03-15 1978-03-15 Hightemperature operation sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2872778A JPS54121794A (en) 1978-03-15 1978-03-15 Hightemperature operation sensor

Publications (1)

Publication Number Publication Date
JPS54121794A true JPS54121794A (en) 1979-09-21

Family

ID=12256455

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2872778A Pending JPS54121794A (en) 1978-03-15 1978-03-15 Hightemperature operation sensor

Country Status (1)

Country Link
JP (1) JPS54121794A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11223614A (en) * 1998-02-06 1999-08-17 Research Institute Of Innovative Technology For The Earth Contact combustion type inflammable gas sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11223614A (en) * 1998-02-06 1999-08-17 Research Institute Of Innovative Technology For The Earth Contact combustion type inflammable gas sensor

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