JPS54121794A - Hightemperature operation sensor - Google Patents
Hightemperature operation sensorInfo
- Publication number
- JPS54121794A JPS54121794A JP2872778A JP2872778A JPS54121794A JP S54121794 A JPS54121794 A JP S54121794A JP 2872778 A JP2872778 A JP 2872778A JP 2872778 A JP2872778 A JP 2872778A JP S54121794 A JPS54121794 A JP S54121794A
- Authority
- JP
- Japan
- Prior art keywords
- metal plate
- substrate
- pins
- bodies
- thru
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
PURPOSE: To reduce the heat capacity of the high temperature sensor and enable the same to be heat-insulated from supports by insulation-fixing plural pins to a frame body and securing the thin and slender metal plate mounted with the substrate integrated with each sensor body, etc. to one of these.
CONSTITUTION: Plural pins 3 are fixed by means of hermetic sealing glass 2 or the like to a frame body 1 composed of kovar alloy or the like and a thin and slender metal plate 4 of stainles steel or others whose both ends are secured and supported is bridged to a pair of the opposing pair 3A, 3B out of these. Further an insulation type ceramic substrate 5 composed of alumina or the like is secured by means of heat insulating ceramic adhesive agents or the like to the central part of this metal plate 4 and a high temperature operating sensor body 6, heating heater bodies 7 and temperature sensor bodies 8 are integrated on the substrate 5. The sensor body 6 and heater bodies 7 are wire bonded to the corresponded pins 3 by means of metal fine wires 13 thru 16 with the respectively printed and baked thick film conductor electrodes 9 thru 12 as junction electrodes. Thereby, the accuracy of detection may be improved.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2872778A JPS54121794A (en) | 1978-03-15 | 1978-03-15 | Hightemperature operation sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2872778A JPS54121794A (en) | 1978-03-15 | 1978-03-15 | Hightemperature operation sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54121794A true JPS54121794A (en) | 1979-09-21 |
Family
ID=12256455
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2872778A Pending JPS54121794A (en) | 1978-03-15 | 1978-03-15 | Hightemperature operation sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54121794A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11223614A (en) * | 1998-02-06 | 1999-08-17 | Research Institute Of Innovative Technology For The Earth | Contact combustion type inflammable gas sensor |
-
1978
- 1978-03-15 JP JP2872778A patent/JPS54121794A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11223614A (en) * | 1998-02-06 | 1999-08-17 | Research Institute Of Innovative Technology For The Earth | Contact combustion type inflammable gas sensor |
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