SU1652839A1 - Capacitive pressure sensor and method of manufacturing the same - Google Patents

Description

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Claims (3)

Claim 1. A capacitive pressure sensor comprising a housing, a pressure receiving elastic element, on which electrodes and contact pads connected to electrodes are made, a plate on which an electrodes and contact pads connected to them, lead conductors are made, connected to the contact pads and the corresponding pressure seal, characterized in that, in order to expand the operating temperature range and improve manufacturability, it has an elastic element and an additional plate made isolated pads, further wherein the isolated contact pads are arranged at respective kontaktnmi pads connected to the electrodes, and • have a thickness equal to the thickness of the electrodes, the thickness GOVERNMENTAL output conductors equal to the thickness of the interelectrode gap. 2. A method of manufacturing a capacitive 5th pressure sensor, which consists in the formation of thin-film metal electrodes on the elastic element and the plate with contact areas> 0, placement of lead wires, fixing the plate on the elastic element, evacuation and sealing of the sensor cavity, characterized in that, for the purpose of 15 expansion operating temperature range of the sensor and improve manufacturability, simultaneously with. By forming the electrodes, additional insulated contact pads are formed on the elastic element and the plate, the lead conductors are placed between the contact pads and the additional insulated contact pads, the plate is pressed to the 25 elastic element by the force applied to the center of the plate, the value determined from the relation F = 3-S>C> _T where S is the contact area of the output conductor and the contact plate, (J _T is the yield strength of the material of the contact pad at the maximum operating temperature of the sensor, and then, after rigidly fixing the plate on the elastic element, the force ceases, while evacuating the sensor cavity, the sensor is heated to the maximum working temperature, held for at least 5 minutes and the sensor cavity is sealed under these conditions. Fig! Aa Figure 2 Bb tucked up FIG. 3