PL4222447T3 - Urządzenie do określania odległości, grubości powierzchni i właściwości optycznych obiektu oraz powiązany sposób - Google Patents

Urządzenie do określania odległości, grubości powierzchni i właściwości optycznych obiektu oraz powiązany sposób

Info

Publication number
PL4222447T3
PL4222447T3 PL21790942.3T PL21790942T PL4222447T3 PL 4222447 T3 PL4222447 T3 PL 4222447T3 PL 21790942 T PL21790942 T PL 21790942T PL 4222447 T3 PL4222447 T3 PL 4222447T3
Authority
PL
Poland
Prior art keywords
determining
distance
optical properties
related method
surface thickness
Prior art date
Application number
PL21790942.3T
Other languages
English (en)
Inventor
Heimo KERÄNEN
Original Assignee
Lmi Technologies Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lmi Technologies Inc. filed Critical Lmi Technologies Inc.
Publication of PL4222447T3 publication Critical patent/PL4222447T3/pl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/46—Indirect determination of position data
    • G01S17/48—Active triangulation systems, i.e. using the transmission and reflection of electromagnetic waves other than radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G01B11/0633—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection using one or more discrete wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
    • G01B11/065—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization using one or more discrete wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/08—Testing mechanical properties
    • G01M11/081—Testing mechanical properties by using a contact-less detection method, i.e. with a camera
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/57—Measuring gloss
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Electromagnetism (AREA)
  • Remote Sensing (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
PL21790942.3T 2020-09-29 2021-09-29 Urządzenie do określania odległości, grubości powierzchni i właściwości optycznych obiektu oraz powiązany sposób PL4222447T3 (pl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20205942A FI130557B (en) 2020-09-29 2020-09-29 Device for determining a distance, surface thickness and optical properties of an object and related method
PCT/FI2021/050644 WO2022069801A1 (en) 2020-09-29 2021-09-29 Device for determining a distance, surface thickness and optical properties of an object and related method

Publications (1)

Publication Number Publication Date
PL4222447T3 true PL4222447T3 (pl) 2025-01-07

Family

ID=78135008

Family Applications (1)

Application Number Title Priority Date Filing Date
PL21790942.3T PL4222447T3 (pl) 2020-09-29 2021-09-29 Urządzenie do określania odległości, grubości powierzchni i właściwości optycznych obiektu oraz powiązany sposób

Country Status (10)

Country Link
US (1) US20230408695A1 (pl)
EP (1) EP4222447B1 (pl)
JP (1) JP7641391B2 (pl)
KR (1) KR20230128262A (pl)
CN (1) CN116324331A (pl)
CA (1) CA3193114A1 (pl)
ES (1) ES2989064T3 (pl)
FI (1) FI130557B (pl)
PL (1) PL4222447T3 (pl)
WO (1) WO2022069801A1 (pl)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4198899B1 (en) * 2021-12-15 2024-01-31 Sick IVP AB Method and arrangements for determining information regarding an intensity peak position in a space-time volume of image frames

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4674577B2 (ja) * 2006-09-05 2011-04-20 ソニー株式会社 膜厚判定装置、膜厚判定方法
FI119259B (fi) * 2006-10-18 2008-09-15 Valtion Teknillinen Pinnan ja paksuuden määrittäminen
US7723657B2 (en) * 2007-11-16 2010-05-25 Mitutoyo Corporation Focus detection apparatus having extended detection range
FI124299B (fi) * 2009-10-08 2014-06-13 Focalspec Oy Mittalaite ja menetelmä kohteen ja kohteen pinnan ominaisuuksien mittaamiseksi
FI125408B (fi) * 2012-09-17 2015-09-30 Focalspec Oy Menetelmä ja mittalaite pinnan etäisyyden, kohteen paksuuden ja optisten ominaisuuksien mittaamiseksi
JP6075644B2 (ja) * 2014-01-14 2017-02-08 ソニー株式会社 情報処理装置および方法
WO2016000764A1 (de) * 2014-07-01 2016-01-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Chromatisch konfokale sensoranordnung
EP3222964B1 (en) * 2016-03-25 2020-01-15 Fogale Nanotech Chromatic confocal device and method for 2d/3d inspection of an object such as a wafer
JP6788476B2 (ja) * 2016-10-21 2020-11-25 株式会社ミツトヨ クロマティック共焦点センサ及び測定方法
DE102018130901A1 (de) * 2018-12-04 2020-06-04 Precitec Optronik Gmbh Optische Messeinrichtung
CN111220090B (zh) * 2020-03-25 2025-03-07 宁波五维检测科技有限公司 一种线聚焦差动彩色共焦三维表面形貌测量系统及方法
CN111879239B (zh) * 2020-06-11 2022-09-02 东莞市神州视觉科技有限公司 光谱共焦测量装置及测量方法

Also Published As

Publication number Publication date
US20230408695A1 (en) 2023-12-21
JP7641391B2 (ja) 2025-03-06
FI130557B (en) 2023-11-17
EP4222447A1 (en) 2023-08-09
EP4222447C0 (en) 2024-09-18
ES2989064T3 (es) 2024-11-25
CN116324331A (zh) 2023-06-23
EP4222447B1 (en) 2024-09-18
CA3193114A1 (en) 2022-04-07
KR20230128262A (ko) 2023-09-04
FI20205942A1 (en) 2022-03-30
JP2023543951A (ja) 2023-10-18
WO2022069801A1 (en) 2022-04-07

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