PL3985349T3 - Urządzenie i sposób pomiaru grubości warstw dielektrycznych na metalowej powierzchni - Google Patents

Urządzenie i sposób pomiaru grubości warstw dielektrycznych na metalowej powierzchni

Info

Publication number
PL3985349T3
PL3985349T3 PL20461571.0T PL20461571T PL3985349T3 PL 3985349 T3 PL3985349 T3 PL 3985349T3 PL 20461571 T PL20461571 T PL 20461571T PL 3985349 T3 PL3985349 T3 PL 3985349T3
Authority
PL
Poland
Prior art keywords
dielectric layer
metal surface
measuring thickness
measuring
thickness
Prior art date
Application number
PL20461571.0T
Other languages
English (en)
Inventor
Valeri MIKHNEV
Wojciech Knap
Tomasz Skotnicki
Original Assignee
Instytut Wysokich Ciśnień Polskiej Akademii Nauk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Instytut Wysokich Ciśnień Polskiej Akademii Nauk filed Critical Instytut Wysokich Ciśnień Polskiej Akademii Nauk
Publication of PL3985349T3 publication Critical patent/PL3985349T3/pl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
PL20461571.0T 2020-10-15 2020-10-15 Urządzenie i sposób pomiaru grubości warstw dielektrycznych na metalowej powierzchni PL3985349T3 (pl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP20461571.0A EP3985349B1 (en) 2020-10-15 2020-10-15 Device and method for measuring thickness of a dielectric layer on a metal surface

Publications (1)

Publication Number Publication Date
PL3985349T3 true PL3985349T3 (pl) 2023-08-21

Family

ID=73005542

Family Applications (1)

Application Number Title Priority Date Filing Date
PL20461571.0T PL3985349T3 (pl) 2020-10-15 2020-10-15 Urządzenie i sposób pomiaru grubości warstw dielektrycznych na metalowej powierzchni

Country Status (3)

Country Link
EP (1) EP3985349B1 (pl)
PL (1) PL3985349T3 (pl)
WO (1) WO2022079669A1 (pl)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113092571B (zh) * 2021-04-26 2024-11-15 兰州大学 用于测量磁介电材料全特性的微波传感器及电子设备
CN117490615B (zh) * 2023-11-07 2024-11-08 南京航空航天大学 微波同轴谐振腔在纤维增强复材表面涂层厚度测量的应用

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6989675B2 (en) * 2003-03-13 2006-01-24 Multimetrixs Llc Method and apparatus for precision measurement of film thickness
US7135869B2 (en) * 2004-01-20 2006-11-14 The Boeing Company Thickness measuring systems and methods using a cavity resonator
EP2570766B1 (en) * 2011-09-16 2014-03-19 Meggitt SA Device and method for monitoring rotor blades of a turbine
EP2620741A1 (en) * 2012-01-24 2013-07-31 Johann Hinken Device for measuring coating thickness

Also Published As

Publication number Publication date
EP3985349C0 (en) 2023-06-07
EP3985349A1 (en) 2022-04-20
EP3985349B1 (en) 2023-06-07
WO2022079669A1 (en) 2022-04-21

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