GB201915726D0 - Method and device for measuring a layer thickness of an object - Google Patents

Method and device for measuring a layer thickness of an object

Info

Publication number
GB201915726D0
GB201915726D0 GB201915726A GB201915726A GB201915726D0 GB 201915726 D0 GB201915726 D0 GB 201915726D0 GB 201915726 A GB201915726 A GB 201915726A GB 201915726 A GB201915726 A GB 201915726A GB 201915726 D0 GB201915726 D0 GB 201915726D0
Authority
GB
United Kingdom
Prior art keywords
measuring
layer thickness
thickness
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB201915726A
Other versions
GB2576838A (en
GB2576838B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Skz Kfe Ggmbh
Original Assignee
Skz Kfe Ggmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Skz Kfe Ggmbh filed Critical Skz Kfe Ggmbh
Publication of GB201915726D0 publication Critical patent/GB201915726D0/en
Publication of GB2576838A publication Critical patent/GB2576838A/en
Application granted granted Critical
Publication of GB2576838B publication Critical patent/GB2576838B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S13/00—Systems using the reflection or reradiation of radio waves, e.g. radar systems; Analogous systems using reflection or reradiation of waves whose nature or wavelength is irrelevant or unspecified
    • G01S13/02—Systems using reflection of radio waves, e.g. primary radar systems; Analogous systems
    • G01S13/06—Systems determining position data of a target
    • G01S13/08—Systems for measuring distance only
    • G01S13/32—Systems for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S13/325—Systems for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of coded signals, e.g. P.S.K. signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S13/00—Systems using the reflection or reradiation of radio waves, e.g. radar systems; Analogous systems using reflection or reradiation of waves whose nature or wavelength is irrelevant or unspecified
    • G01S13/02—Systems using reflection of radio waves, e.g. primary radar systems; Analogous systems
    • G01S13/06—Systems determining position data of a target
    • G01S13/08—Systems for measuring distance only
    • G01S13/32—Systems for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S13/34—Systems for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
    • G01S13/343—Systems for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal using sawtooth modulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S13/00—Systems using the reflection or reradiation of radio waves, e.g. radar systems; Analogous systems using reflection or reradiation of waves whose nature or wavelength is irrelevant or unspecified
    • G01S13/88—Radar or analogous systems specially adapted for specific applications

Landscapes

  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Electromagnetism (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Length Measuring Devices By Optical Means (AREA)
GB1915726.2A 2017-05-05 2018-05-02 Method and device for measuring a layer thickness of an object Active GB2576838B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102017207648.8A DE102017207648B4 (en) 2017-05-05 2017-05-05 Method and device for measuring a layer thickness of an object
PCT/EP2018/061182 WO2018202696A1 (en) 2017-05-05 2018-05-02 Method and device for measuring a layer thickness of an object

Publications (3)

Publication Number Publication Date
GB201915726D0 true GB201915726D0 (en) 2019-12-11
GB2576838A GB2576838A (en) 2020-03-04
GB2576838B GB2576838B (en) 2022-04-27

Family

ID=62116415

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1915726.2A Active GB2576838B (en) 2017-05-05 2018-05-02 Method and device for measuring a layer thickness of an object

Country Status (7)

Country Link
US (1) US11408733B2 (en)
JP (1) JP7058321B2 (en)
CN (1) CN110914635B (en)
CA (1) CA3062502C (en)
DE (1) DE102017207648B4 (en)
GB (1) GB2576838B (en)
WO (1) WO2018202696A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018128962A1 (en) * 2018-11-19 2020-05-20 Rheinmetall Waffe Munition Gmbh Method for determining the position of an object, device for determining the position of an object and system
DE102018131370A1 (en) * 2018-12-07 2020-06-10 INOEX GmbH Innovationen und Ausrüstungen für die Extrusionstechnik Measuring system and method for measuring a measurement object, in particular a plastic profile
EP4170387A4 (en) * 2020-06-30 2023-07-05 Huawei Technologies Co., Ltd. Radar detection method and related device
DE102020127387A1 (en) * 2020-10-16 2022-04-21 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Method and device for processing data associated with a model characterizing a propagation of terahertz radiation
DE102021125196A1 (en) 2021-09-29 2023-03-30 CiTEX Holding GmbH THz measuring device and method for measuring a measurement object
DE102022105479B3 (en) 2022-03-09 2023-08-03 Sikora Aktiengesellschaft Device and method for determining dimensional data of an object

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3113025A1 (en) * 1981-04-01 1982-10-21 Battelle-Institut E.V., 6000 Frankfurt "METHOD AND DEVICE FOR THE THICKNESS CONTROL AND MEASUREMENT OF MATERIAL LAYERS"
US5289266A (en) * 1989-08-14 1994-02-22 Hughes Aircraft Company Noncontact, on-line determination of phosphate layer thickness and composition of a phosphate coated surface
JP3606257B2 (en) * 2001-12-25 2005-01-05 三菱電機株式会社 Doppler radar device
US7339682B2 (en) * 2005-02-25 2008-03-04 Verity Instruments, Inc. Heterodyne reflectometer for film thickness monitoring and method for implementing
GB0506209D0 (en) * 2005-03-29 2005-05-04 Qinetiq Ltd Coherent frequency modulated continuous wave radar
JP2007040763A (en) * 2005-08-01 2007-02-15 Toyota Motor Corp Correction device of acceleration sensor
CN101334269A (en) * 2008-08-06 2008-12-31 北京航空航天大学 Multilayered medium material multi-parameter measurement method and system
US8144334B2 (en) * 2009-09-29 2012-03-27 The United States Of America As Represented By The Secretary Of The Army Fiber-optic, digital system for laser Doppler vibrometers (LDVs)
WO2012009617A2 (en) * 2010-07-16 2012-01-19 Luminex Corporation Methods, storage mediums, and systems for analyzing particle quantity and distribution within an imaging region of an assay analysis system and for evaluating the performance of a focusing routing performed on an assay analysis system
EP2620741A1 (en) * 2012-01-24 2013-07-31 Johann Hinken Device for measuring coating thickness
JP5062921B1 (en) * 2012-05-01 2012-10-31 株式会社ウオールナット Cavity thickness estimation method and apparatus
WO2014153263A1 (en) * 2013-03-14 2014-09-25 Robert Ernest Troxler Systems and methods for asphalt density and soil moisture measurements using ground penetrating radar
DE102013223945A1 (en) * 2013-11-22 2015-05-28 Inoex Gmbh Measuring device and method for measuring test objects
CN103940354B (en) * 2014-05-15 2017-01-04 黑龙江大学 Linear frequency modulation multi-beam laser heterodyne measures the device and method of thickness of glass
CN104180762A (en) * 2014-09-09 2014-12-03 东莞理工学院 Thickness detection method based on terahertz time-domain spectrum technology

Also Published As

Publication number Publication date
GB2576838A (en) 2020-03-04
JP7058321B2 (en) 2022-04-21
CN110914635B (en) 2022-01-28
CN110914635A (en) 2020-03-24
US11408733B2 (en) 2022-08-09
DE102017207648B4 (en) 2019-08-22
GB2576838B (en) 2022-04-27
WO2018202696A1 (en) 2018-11-08
CA3062502A1 (en) 2018-11-08
JP2020518838A (en) 2020-06-25
DE102017207648A1 (en) 2018-11-08
CA3062502C (en) 2023-04-25
US20210156683A1 (en) 2021-05-27

Similar Documents

Publication Publication Date Title
IL275640A (en) A metrology apparatus for and a method of determining a characteristic of interest of a structure on a substrate
GB2576838B (en) Method and device for measuring a layer thickness of an object
GB2559164B (en) Method and system for measuring coating thicknesses
IL261902A (en) A device and method for measuring viewing distances
IL304744A (en) Metrology apparatus and a method of determining a characteristic of interest
KR102350650B9 (en) Thickness measuring device thickness measuring method and thickness measuring program
PL3108205T3 (en) Photo-acoustic device and method for non-contact measurement of thin layers
EP3246659A4 (en) Method and device for measuring size of object
EP3647806A4 (en) Method and device for performing location measurement on basis of pdoa
SG11201608133PA (en) Film-forming device, method for measuring film thickness of organic film, and film thickness sensor for organic film
EP3452913A4 (en) Method for determining role of electronic device and electronic device thereof
KR102075356B9 (en) Specimen thickness measuring device and Specimen Thickness Measuring Method
GB2552935B (en) Device and method of analysing an object for 3D printing
GB2554057B (en) A method of measuring the wall thickness of an article and an apparatus for making such measurements
EP3232220C0 (en) Method and device for estimating accuracy of a position determination
EP3577488C0 (en) Method for detecting object and electronic device thereof
IL252374A0 (en) Emcw layer thickness measurement apparatus and method
GB201616415D0 (en) A method and apparatus for measuring an object
PT3111191T (en) Method and device for determining a barrier effect of a coating on a substrate
EP2956743A4 (en) A method and apparatus for quantitative measurement of surface accuracy of an area
FI20175176A (en) A method and apparatus for determining the condition of an electronic device
GB2568976B (en) Apparatus and method for determining a dimension of an object attached to a vehicle
EP3654283A4 (en) Electronic device and object sensing method of electronic device
GB2593651B (en) Method and system for measuring coating thicknesses
SG10201913327YA (en) Method and device for determining position of a target

Legal Events

Date Code Title Description
789A Request for publication of translation (sect. 89(a)/1977)

Ref document number: 2018202696

Country of ref document: WO

732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

Free format text: REGISTERED BETWEEN 20200618 AND 20200624