GB2579832B - A system and method for inspecting an optical surface - Google Patents

A system and method for inspecting an optical surface Download PDF

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Publication number
GB2579832B
GB2579832B GB1820515.3A GB201820515A GB2579832B GB 2579832 B GB2579832 B GB 2579832B GB 201820515 A GB201820515 A GB 201820515A GB 2579832 B GB2579832 B GB 2579832B
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GB
United Kingdom
Prior art keywords
inspecting
optical surface
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB1820515.3A
Other versions
GB2579832A (en
GB201820515D0 (en
Inventor
Mitchell John
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Compass Optics Ltd
Original Assignee
Compass Optics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Compass Optics Ltd filed Critical Compass Optics Ltd
Priority to GB1820515.3A priority Critical patent/GB2579832B/en
Publication of GB201820515D0 publication Critical patent/GB201820515D0/en
Priority to PCT/GB2019/053395 priority patent/WO2020128423A1/en
Priority to EP19823930.3A priority patent/EP3899420A1/en
Publication of GB2579832A publication Critical patent/GB2579832A/en
Application granted granted Critical
Publication of GB2579832B publication Critical patent/GB2579832B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
    • G01B11/162—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means by speckle- or shearing interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
    • G01B9/02038—Shaping the wavefront, e.g. generating a spherical wavefront
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/005—Testing of reflective surfaces, e.g. mirrors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9511—Optical elements other than lenses, e.g. mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Geometry (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
GB1820515.3A 2018-12-17 2018-12-17 A system and method for inspecting an optical surface Active GB2579832B (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB1820515.3A GB2579832B (en) 2018-12-17 2018-12-17 A system and method for inspecting an optical surface
PCT/GB2019/053395 WO2020128423A1 (en) 2018-12-17 2019-11-29 Full-field heterodyne interferometer for inspecting an optical surface
EP19823930.3A EP3899420A1 (en) 2018-12-17 2019-11-29 Full-field heterodyne interferometer for inspecting an optical surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1820515.3A GB2579832B (en) 2018-12-17 2018-12-17 A system and method for inspecting an optical surface

Publications (3)

Publication Number Publication Date
GB201820515D0 GB201820515D0 (en) 2019-01-30
GB2579832A GB2579832A (en) 2020-07-08
GB2579832B true GB2579832B (en) 2022-03-09

Family

ID=65147304

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1820515.3A Active GB2579832B (en) 2018-12-17 2018-12-17 A system and method for inspecting an optical surface

Country Status (3)

Country Link
EP (1) EP3899420A1 (en)
GB (1) GB2579832B (en)
WO (1) WO2020128423A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021202820B3 (en) * 2021-03-23 2022-03-03 Carl Zeiss Smt Gmbh Interferometric measurement method and interferometric measurement arrangement
CN112985306B (en) * 2021-05-17 2021-07-27 中国人民解放军国防科技大学 Anti-diffraction mixed self-adaptive compensation interference detection method and device and computer equipment
DE102022120283A1 (en) * 2022-08-11 2024-02-22 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Device for interferometric testing of optical surfaces
WO2024175282A1 (en) * 2023-02-23 2024-08-29 Asml Netherlands B.V. Interferometer system, wavefront analysis system, projection system, lithographic apparatus and method to analyze a wavefront of a light beam of an heterodyne interferometer system

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4912530A (en) * 1988-02-13 1990-03-27 Brother Kogyo Kabushiki Kaisha Optical heterodyne measuring apparatus
EP0467343A2 (en) * 1990-07-18 1992-01-22 Canon Kabushiki Kaisha Optical heterodyne interferometer
JPH05288523A (en) * 1992-04-07 1993-11-02 Citizen Watch Co Ltd Optical surface shape measuring device
US20050259265A1 (en) * 2004-05-18 2005-11-24 De Lega Xavier Colonna Methods and systems for determining optical properties using low-coherence interference signals
US20060098206A1 (en) * 2004-11-10 2006-05-11 Kim Seung W Apparatus and method for measuring thickness and profile of transparent thin film using white-light interferometer
WO2017163233A1 (en) * 2016-03-22 2017-09-28 B. G. Negev Technologies And Applications Ltd., At Ben-Gurion University Frequency modulated multiple wavelength parallel phase shift interferometry

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7483145B2 (en) 2002-11-27 2009-01-27 Trology, Llc Simultaneous phase shifting module for use in interferometry
US7230717B2 (en) 2003-08-28 2007-06-12 4D Technology Corporation Pixelated phase-mask interferometer

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4912530A (en) * 1988-02-13 1990-03-27 Brother Kogyo Kabushiki Kaisha Optical heterodyne measuring apparatus
EP0467343A2 (en) * 1990-07-18 1992-01-22 Canon Kabushiki Kaisha Optical heterodyne interferometer
JPH05288523A (en) * 1992-04-07 1993-11-02 Citizen Watch Co Ltd Optical surface shape measuring device
US20050259265A1 (en) * 2004-05-18 2005-11-24 De Lega Xavier Colonna Methods and systems for determining optical properties using low-coherence interference signals
US20060098206A1 (en) * 2004-11-10 2006-05-11 Kim Seung W Apparatus and method for measuring thickness and profile of transparent thin film using white-light interferometer
WO2017163233A1 (en) * 2016-03-22 2017-09-28 B. G. Negev Technologies And Applications Ltd., At Ben-Gurion University Frequency modulated multiple wavelength parallel phase shift interferometry

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
RIKESH PATEL et al, Ultrastable heterodyne interferometer system using a CMOS modulated light camera, published 2012, Optics express *
RIKESH PATEL et al, Widefield heterodyne interferometry using a custom CMOS modulated light camera, published 2011, Optics express *

Also Published As

Publication number Publication date
EP3899420A1 (en) 2021-10-27
WO2020128423A1 (en) 2020-06-25
GB2579832A (en) 2020-07-08
GB201820515D0 (en) 2019-01-30

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