FI20205942A1 - Device for determining a distance, surface thickness and optical properties of an object and related method - Google Patents

Device for determining a distance, surface thickness and optical properties of an object and related method Download PDF

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Publication number
FI20205942A1
FI20205942A1 FI20205942A FI20205942A FI20205942A1 FI 20205942 A1 FI20205942 A1 FI 20205942A1 FI 20205942 A FI20205942 A FI 20205942A FI 20205942 A FI20205942 A FI 20205942A FI 20205942 A1 FI20205942 A1 FI 20205942A1
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focus
illuminating
imaging
optics
points
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FI20205942A
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Finnish (fi)
Swedish (sv)
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FI130557B (en
Inventor
Heimo Keränen
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Lmi Tech Oy
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Priority to FI20205942A priority Critical patent/FI130557B/en
Priority to US18/029,076 priority patent/US20230408695A1/en
Priority to KR1020237014736A priority patent/KR20230128262A/en
Priority to CN202180066713.6A priority patent/CN116324331A/en
Priority to CA3193114A priority patent/CA3193114A1/en
Priority to EP21790942.3A priority patent/EP4222447B1/en
Priority to JP2023543469A priority patent/JP2023543951A/en
Priority to PCT/FI2021/050644 priority patent/WO2022069801A1/en
Publication of FI20205942A1 publication Critical patent/FI20205942A1/en
Application granted granted Critical
Publication of FI130557B publication Critical patent/FI130557B/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/46—Indirect determination of position data
    • G01S17/48—Active triangulation systems, i.e. using the transmission and reflection of electromagnetic waves other than radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G01B11/0633—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection using one or more discrete wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
    • G01B11/065—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization using one or more discrete wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/08—Testing mechanical properties
    • G01M11/081—Testing mechanical properties by using a contact-less detection method, i.e. with a camera
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/57—Measuring gloss
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

Described herein is a device for determining the position and/or optical properties of an object (2). The device comprises at least one output element (4.1) for providing light, illuminating optics (11) for directing light from the output element to the object, a light sensor (8) and imaging optics (13) for collecting light from the object to the light sensor. The device is configured to determine the position and/or optical properties of the object (2) from the local maximum of the intensity distribution of the light detected by the light sensor (8), where the local maximum is a result of the light collected from the intersection of the object point (2.1) and one of the coincident focus points or focus areas formed by the illuminating (11) and imaging optics (11). Also described herein is a method for determining the position and/or optical properties of an object (2).

Description

DEVICE FOR DETERMINING A DISTANCE, SURFACE THICKNESS AND
OPTICAL PROPERTIES OF AN OBJECT AND RELATED METHOD Technical Field Generally, the disclosure relates to optical measurements and imaging. More particularly, however not exclusively, the disclosure relates to the determination of a position and optical properties of an object. Background Non-contact optoelectronic measuring devices provide a non-destructive and relative high-speed approach for providing surface profiles and surface characterisation. There exists a variety of different techniques to perceive a depth information for measuring distances and orientations of objects and surfaces such as confocal, structured light or laser triangulation, white light interferometry, fringe projection or depth of focus imaging techniques. Triangulation devices are widely used to add a depth information into different kinds of industrial machine vision systems partly due to their relative simplicity and ease of use. In triangulation-based devices, typically a laser beam or LED, is projected onto the object under measurement and light reflected from the object point is detected by a light sensor at an imaging angle depending on the distance between the light source and the object point. The imaging angle, the baseline between the light source and light sensor and the angle of the light projected from the light source define a triangulation geometry from which the depth information and surface profile can be extracted. It is common to also extract the intensity of the detected light to S provide reflectance of the surface revealing information about important material N optical properties. 3 o 25 One known problem in the present triangulation devices is that the measurement - speed is limited to the frame rate of the light sensor. a a One known problem in the present laser-triangulation devices is an inevitable S speckle noise that is seen as interference patterns on the light sensor due to S coherent illuminating photons, impairing the extraction of the surface position and S 30 surface optical properties.
Yet another known problem in the present laser-triangulation devices arises from the restriction to use only small numerical aperture optics which severely limits the capability to produce surface profiles for glossy, sloped surfaces. Summary The aim of the invention is to at least alleviate one or more problems associated with the existing solutions in the context of determination of a surface position and surface optical properties of an object under measurement. Especially an aim of the invention is to provide a measurement device for determining surface position and surface optical properties that allows to increase measurement speed. Additionally, an aim of the invention is to provide such a measurement device that is also suitable for determining surface position and surface optical properties of glossy, sloped surfaces. Additionally, an aim of the invention is to simplify the arrangement of the measurement device. The following presents a simplified summary to provide a basic understanding of some concepts of the invention in a simplified form as a prelude to a more detailed description of exemplifying and non-limiting embodiments of the invention. The object of the invention can be achieved by the features of independent claims. In accordance with one aspect of the present invention, there is provided a new device for determining a position and/or optical properties of an object. A device according to the invention comprises: — a point-like or line-like output element for providing light; — illuminating optics for directing light from the output element to the object; o — a light sensor for detecting intensity values of light; and S — imaging optics for collecting light from the object to the light sensor. o <Q 25 The illuminating optics is configured to focus light from a location point of the Q output element on a plurality of illuminating focus points or focus areas positioned E at different distances from the illuminating optics along an illuminating coordinate N axis associated with a principal ray of the illuminating optics for the location point S of the output element, wherein the principal ray is the mutual for the plurality of S 30 illuminating focus points or focus areas focused from the location point of the
O N output element, and wherein each of the illuminating focus points or focus areas along the same illuminating coordinate axis differs from each other at least in the dominant wavelength or shape and/or is formed with a different optical aperture of the illuminating optics. The imaging optics is configured to form from each of the location points of the light sensor a plurality of imaging focus points or focus areas positioned at different distances from the imaging optics along an imaging coordinate axis associated with a corresponding principal ray of the imaging optics for the corresponding location point of the light sensor, wherein the corresponding principal ray is the mutual for the plurality of imaging focus points formed from the corresponding location point of the light sensor, and wherein each of the imaging focus points or focus areas along the same imaging coordinate axis differs from each other at least in the dominant wavelength or shape and/or is focused with a different optical aperture of the imaging optics. The illuminating optics and the imaging optics are configured to form a plurality of coincident focus points or focus areas so that each of the various focus points or focus areas from the plurality of illuminating focus points or focus areas along the same illuminating coordinate axis coincides at a coincident focus point or focus area with an imaging focus point or focus area positioned along a different imaging coordinate axis, where the orientation of the illuminating coordinate axis is different from the orientations of the imaging coordinate axes. Furthermore, the illuminating optics and the imaging optics are configured to form the plurality of coincident focus points or focus areas so that each of the coincident focus points or focus areas consists of an illuminating and imaging focus point or focus area associated with the common dominant wavelength or shape and/or is formed with the correlated optical apertures of the illuminating optics and the imaging optics. S 25 The device is configured to determine the position and/or optical properties of an N object point of the object from the local maximum of the intensity distribution of 3 the light detected by the light sensor so that:
O - — the position of the object point is determined from the location of said local & maximum; and/or V 30 — the optical properties of the object point are determined from the intensity or D the wavelength of said local maximum,
N N where said local maximum is a result of the light collected from the intersection of the object point and one of the coincident focus points or focus areas.
In accordance with the present invention, there is provided also a new method for determining a position and/or optical properties of an object.
A method according to the invention comprises: — providing an optical illuminating and optical detecting of the object from different directions so that:
= light is focused from a location point of the output element on a plurality of illuminating focus points or focus areas positioned at different distances from the illuminating optics along an illuminating coordinate axis associated with a principal ray of the of the illuminating optics for the location point of the output element, wherein the principal ray is the mutual for the plurality of illuminating focus points or focus areas focused from the location point of the output element, and wherein each of the illuminating focus points or focus areas along the same illuminating coordinate axis differs from each other at least in the dominant wavelength or shape and/or is formed with a different optical aperture of the illuminating optics, and = a plurality of imaging focus points or focus areas positioned at different distances from the imaging optics along an imaging coordinate axis associated with a corresponding principal ray of the imaging optics for the corresponding location point of the light sensor are formed from each of the location points of the light sensor, wherein the corresponding principal ray is the mutual for the plurality of imaging focus points or focus areas formed from the corresponding location point of the light sensor, and wherein each of the imaging focus points or focus areas along the same imaging o coordinate axis differs from each other at least in the dominant O wavelength or shape and/or is focused with a different optical
& aperture of the imaging optics; o — forming a plurality of coincident focus points so that each of the various - 30 focus points from the plurality of illuminating focus points or focus areas = along the illuminating coordinate axis coincides at a coincident focus point V or focus area with a imaging focus point or focus area positioned along a D different imaging coordinate axis, where the orientation of the illuminating N coordinate axis is different from the orientations of the imaging coordinate N 35 axes and that each of the coincident focus points or focus areas consists of an illuminating and imaging focus point or focus area associated with the common dominant wavelength or shape and/or is formed with the correlated optical apertures of the illuminating optics and the imaging optics; — detecting by the light sensor the intensity values of the light collected from the object by the imaging optics; and 5 — determining the position and/or optical properties of an object point of the object so that the position of the object point is determined from the location of the local maximum of the intensity distribution of the detected light, and/or the optical properties object point are determined from the intensity or the wavelength of the local maximum of the intensity distribution of the detected light, where said local maximum is a result of the light collected from the intersection of the object point and one of the coincident focus points or focus areas.
In accordance with the present invention, there is provided also the use of the device for determining a thickness between a first surface and a second surface of the object, wherein the object is at least partially transparent or translucent for the light being directed to the object.
The present invention offers advantages over the prior art, for example, that the invention: — may allow to utilize large illuminating and imaging numerical apertures enabling measuring of glossy, sloped surfaces; — may allow to use high numerical aperture optics in the illuminating and imaging and still maintain a large depth of field and consequently large depth (z-direction) measuring range; — may allow to achieve focused measuring of an object with full measuring space; N — may allow to measure simultaneously several, for example tens, surface N profiles with a single image frame and hence increasing the measurement <Q speed; Q — may allow to provide a noncoherent light illuminating and hence enabling to E 30 collect light onto the light sensor without speckle noise; N — may allow to determine the position of an object point accurately regardless S of the diffuse reflection or glossiness of the object; N — may allow to utilize same kinds of optics for illuminating and imaging.
N Various exemplifying and non-limiting embodiments are described in accompanied dependent claims.
The features recited in depending claims are mutually freely combinable unless otherwise explicitly stated.
In this document, the word “plurality” refers to a quantity of two or more. Furthermore, it is to be understood that the use of “a” or “an”, i.e. a singular form, throughout this document does not exclude a plurality. In this document, the word “axis” means an imaginary line and the word “axes” is the plural form of the word “axis”. The verbs “to comprise” and “to include” are used in this document as open limitations that neither exclude nor require the existence of unrecited features. The novel features which are considered as characteristic of the invention are set forth in particular in the depended claims. The invention itself, however, both as to its construction and its method of operation, together with additional objects and advantages thereof, will be best understood from the following description of specific example embodiments when read in connection with the accompanying drawings. The considerations concerning the various embodiments of the device may be flexibly applied to the embodiments of the method mutatis mutandis, and vice versa, as being appreciated by a skilled person. The embodiments in the following detailed description are given as examples only and someone skilled in the art can carry out the basic idea of the invention also in some other way than what is described in the description. Most embodiments can be actualised in a variety of combinations with other embodiments. Though the description may refer to a certain embodiment or embodiments in several places, this does not imply that the reference is directed towards only one described embodiment or that the described characteristic is usable only in one described embodiment. The individual characteristics of a plurality of embodiments may be N combined and new embodiments of the invention may thus be provided.
N 3 25 Brief Description of the Drawings
O - Next the present invention will be described in greater detail with reference to the = accompanying drawings, in which:
N < 3 Figure 1a illustrates schematically an embodiment of a device for O 30 determining a position and/or optical properties of an object; Figure 1b illustrates an exemplary intensity distribution diagram in accordance with Figure 1a;
Figures 2a, 2b, 2c illustrate schematically different optical aberrations utilized in the embodiments; Figure 3 illustrates schematically an embodiment of a device for determining a position and/or optical properties of an object; Figure 4a, 4b illustrate spectral contents; Figure 5a illustrates schematically an embodiment of a device for determining a position and/or optical properties of an object; Figure 5b1, 5b2 illustrate exemplary intensity distribution diagrams in accordance with Figure 5a; Figure 6a illustrates schematically an embodiment of a device for determining a position and/or optical properties of an object; Figure 6b illustrates an exemplary intensity distribution diagram in accordance with Figure 63a; Figures 7a, 7b, 7c illustrate an example of simultaneously measured surface profiles of the object determined according to the invention; and Figure 8 is a flow diagram disclosing an embodiment of a method for determining a position and/or optical properties of an object.
O QA O
N o <Q
O N
I a a
N < o
LO O QA O N
Detailed Description In the following, some embodiments of the invention are disclosed.
In the described embodiments, illuminating and imaging of the surface of the object are realized biaxially from different directions.
Thus, a virtual measuring space can be created by coinciding the image of the projected illuminating source or illuminating sources of the illuminating and the image of the light sensor of the imaging in such a way that numerous coincident focus points (measuring lines and/or groups of measuring points of coinciding focus points or focus areas) are common for both of said optics.
As the object to be measured intersects the virtual measuring space, one or more coincident focus points or focus areas of the virtual measuring space intersect said object in certain object points.
A strong reflection generated from this intersection of the object point and a coincident focus point or focus area is indicated by a light sensor and converted to a surface position of the object under measurement.
In this document, reflection refers to specular reflection and diffuse reflection in — which reflection may take place from a smooth or rough surface.
In addition, reflection also refers herein to scattering, refracting and reflecting radiation from inside the object to be measured.
In order to intersect the object point, which can be for example a point from the surface of the object to be measured, advantageously the geometric shape of the output element of illuminating which provides light, or at least part of it, is projected via the illuminating optics, and this image is monitored with the imaging wherein light reflected from the object is collected via the imaging optics onto the light sensor.
In the intensity distribution of the light detected by the light sensor, local intensity maxima are resulted in those points that correspond to intersections of the object S 25 point and the images of the location point of projected light source geometry and the N light sensor geometry.
Position of the object point is determined from the place of 2 the local intensity maximum of the light distribution defined by the light sensor and > the optical properties object point are determined from the intensity or the I wavelength of the local intensity maximum. a V 30 In this document the location or place of a local maximum of the intensity distribution 3 is the location on the light sensor 8 where the intensity value of the detected light O reaches a local maximum value.
If the object to be measured (i.e. target) consists of several partly light-permeable and reflecting surfaces, such as, for example, a plastic film or a glass plate, the method creates from these surfaces an individual local intensity maximum, respectively, and the thickness of the film or plate can be defined on basis of the difference between the positions of these intensity maxima when the refractive indexes of the materials involved in the measurement and the measurement geometry are known.
The measurement geometry comprises illuminating angles and imaging angles and the geometry of the object 2 under measurement respect to said angles.
In some cases, it is also possible to determine positions of object points on sub- surfaces of the object, i.e. internal structures of the object depending on optical properties (like transparency and translucency) of the object for the light being directed to the object.
Figure 1a illustrates a device according to an embodiment 100. The device comprises one point-like output element 4.1 (i.e. point formed output element) for providing light, illuminating optics 11 for directing light from the output element 4.1 tothe object 2 being measured, a light sensor 8 for detecting intensity values of light and imaging optics 13 for collecting light from the object 2 to the light sensor 8. Both the optical illuminating means and optical imaging means of the device are configured to form the focus points or focus areas of them both to the virtual measuring space such that the illuminating optics 11 focuses different points from the illuminating, comprising one or more output elements 4.1, and imaging optics 13 focuses different points from the imaging area, comprising the light sensor 8, in a known way on the virtual measuring space to different positions.
Each focus points or focus areas formed by the illuminating optics 11 from a certain location point of the illuminating (i.e. output element) differs from each other at least in the dominant S 25 wavelength or shape and/or is formed with a different optical aperture of the N illuminating optics 11. Correspondingly, each focus points or focus areas formed by 2 the imaging optics 13 from a certain location point of the imaging area (i.e. light > sensor) differs from each other at least in the dominant wavelength or shape and/or I is formed with a different optical aperture of the imaging optics 13. Coincident focus = 30 points or focus areas are formed such that at each coincident focus point or I coincident focus area an illuminating focus point or an illuminating focus area (i.e.
S focus point or focus area formed by the illuminating optics 11) coincides (overlaps) S with an imaging focus point or an imaging focus area (i.e. focus point or focus area formed by the imaging optics 13) with the same common dominant wavelength or shape.
Additionally, or alternatively, said focus points or focus areas are formed with the correlated optical apertures of the illuminating optics 11 and the imaging optics
13. In other words, each of the coincident focus points or focus areas consists of an illuminating and imaging focus point or focus area associated with the common dominant wavelength or shape and/or is formed with the correlated optical apertures of the illuminating optics 11 and the imaging optics 13. Thereby, there is possible to form a plurality of coincident focus points or focus areas (i.e. common focus points or common focus areas) which each coincident focus point or focus area is associated with the common dominant wavelength of formed focus points or focus areas and/or is formed with the correlated optical apertures of the illuminating optics 11 and the imaging optics 13. When an object point of the surface of the object 2 to be measured coincides one of such formed coincident focus point or coincident focus area of the virtual measuring space, the reflection generated from it is very strong in comparison with the light reflected from other object points of the surface of the object 2. With the imaging optics 13, the light reflected from the surface of the object 2 is directed to the light sensor 8, where the position of the local intensity maximum of the propagated light is detected and the position and intensity data of detected light is formed into an electrical signal. The light sensor 8 can be, for example, a CCD, CMOS matrix, a position sensitive detector (PSD) or the like. The device determines by the processing means (not shown in Fig. 1a) from the electrical signal the maximum reflection representing the surface profile of the object 2, wherein by said means the measured positions of objects points of the object 2 is determined. Alternatively, or additionally, optical properties of the object point can be determined from the intensity value of corresponding signal of maximum reflection corresponding the intensity value of corresponding local intensity maximum or from the wavelength of said local intensity maximum. In various embodiments, the output element 4.1 may generally comprise or consist > of a LED or laser based light source for illuminating and providing light. a In various embodiments, an individual output element may advantageously <Q comprise a separate light source and a separate slit or pinhole through which light Q (i.e. illumination) from the separate light source is provided.
I , 30 The provided light (i.e. optical radiation) from the output element can be I electromagnetic radiation with the wavelength band of which is located from S ultraviolet radiation (wavelength ca. 50 nm) to infrared radiation (wavelength ca. 1 S mm). The provided light can be either white light (i.e. comprising all visible wavelengths) or can comprise either one wavelength or many different wavelengths.
In various embodiments the provided light can be either coherent or noncoherent light. The illuminating optics 11 and imaging optics 13 may comprise lens or lenses, mirrors or other optical components. Furthermore, the illuminating optics 11 and imaging optics 13 may be identical or nonidentical. In the device of the embodiment 100 longitudinal chromatic aberration is utilized in the illuminating optics 11 and the imaging optics 13. Due to the longitudinal chromatic aberration, different illuminating focus points from the location point P1(4.1) of the output element 4.1 in wavelengths M(4.1), A2(4.1), A3(4.1), (4.1), Am(4.1) and different imaging focus points from the different location points between the end points P+(8) and Pq (8) of the light sensor 8 in wavelengths A1(8), A2(8), A3(8), M8), Am(8) are formed at different distances form said optics in direction of the corresponding principal rays, see Fig. 1a. This is illustrated also in Fig. 2a for the illuminating optics 11 in greater scale. Illuminating focus points which are formed from the location point P1(4.1) of the output element 4.1 are along the same illuminating coordinate axis A1(4.1). Principal ray F1(4.1) is the mutual for the illuminating focus points which are formed from the location point P1(4.1) of the output element 4.1 and locate at different distances with different wavelengths from the illuminating optics 11. Accordingly, the imaging focus points formed from the same location point P:(8)—>Pn(8) of the light sensor 8 have similarly the same principal ray F1(8)—>Fn(8) of the imaging optics 13 for the corresponding location point P1(8)—Pn(8) and are along the same imaging coordinate axis A1(8)—An(8). In Fig. 1a, the principal ray Fx(8) and the associated imaging axis Ax(8) for the imaging focus points formed from the location point Px(8) and the principal ray Fy(8) and the associated imaging axis Ay(8) for the imaging focus points formed from the location S point Py(8) of the light sensor 8 are illustrated. 2 In this document a set of different objects is denoted as “the first object*—”the last > object’, such that by P1(8)—Pn(8) is meant a set of different location points between I the extreme location points P1(8) and Pn(8) of the light sensor, wherein n can be any - 30 integer that is greater than 1.
N 3 The point-like output element 4.1 of the device in the embodiment 100 may O advantageously be a LED based light source radiating white light. In the embodiment 100, by adjusting a distance of the output element 4.1 from the illuminating optics 11, a displacement of the output element 4.1 from the optical axis of the illuminating optics 11, a distance of the light sensor 8 from the imaging optics 13 and an inclination of the light sensor 8 from the optical axis of the imaging optics 13, said optics are configured to form coincident focus points from the illuminating focus points of the location point P1(4.1) of the output element 4.1and the imaging focus points of the different location points P1(8)—Pn(8) of the light sensor 8. At each coincident focus point one illuminating focus point of the location point P1(4.1) coincides (i.e. meets) with one imaging focus point of one location point P1(8)—Pn(8) of the light sensor 8 with the same wavelength.
In other words, the coinciding focus point is associated with the common dominant wavelength of the coinciding focus points.
Furthermore, in order to measure different positions of the intersecting object 2, the coincident focus points are formed so that each of the illuminating focus points of the location point P1(4.1) of the output element 4.1, which forms coincident focus point, coincides with such an imaging focus point of the location points P1(8)—Pn(8) of the light sensor 8 that is along different imaging coordinate axis A1(8)—An(8). — Different imaging coordinate axes A1(8)—An(8) and imaging focus points along these axes correspond different location points P+(8)—Pn(8) of the light sensor 8. Therefore, there are advantageously numerous (various) coincident focus points formed from the various illuminating focus points of the location point P1(4.1) of the output element 4.1 which each of the various illuminating focus points are coinciding — with an imaging focus point of the location points P1(8)—Pn(8) of the light sensor 8 positioned along a different imaging coordinate axis A1(8)—An(8). In the embodiment 100, by lens or lenses of the illuminating optics 11 and imaging optics 13 is produced longitudinal (axial), chromatic aberration.
Thereby, in the embodiment 100, the components Am(4.1), Am(8) of the red end of the light are in focus in the virtual measuring space under the surface of the object 2, and, o correspondingly, the components A1(4.1), M(8) of the blue end of the light are in O focus above the object 2. In the embodiment 100, both the blue ends (4.1), M(8) & of the illuminating and imaging are in focus in the upper edge of the virtual o measuring space.
Accordingly, the red ends Am(4.1), Am(8) of the spectra are in focus - 30 in the bottom edge of the measuring space (under the object 2 at height hs in Fig. = 1a). The height of the surface of the object 2 has an effect on which component of V the spectrum of the light directed to the object is reflected from it.
The colour of the D component of the spectrum is not important in this embodiment, since the light signal N reflected from the object 2 is detected advantageously by a black and white line or N 35 matrix light sensor 8 or camera.
However, in certain case this wavelength information of the reflected light is utilized as we see later in this document.
In the example of Fig. 1a two different cases of the surface heights ho and ha of the object 2 are illustrated. These surface layers scatter light. An intersection of the object 2 and coincident focus point is exemplified from the both illustrated heights. When the surface is at the surface height ho the object point 2.1 intersects with the coincident point A1(S)Ay(R) of wavelength Ax This intersection is indicated by the location point of Py(R) of the light sensor 8. Respectively, when the surface is at the surface height h1 the object point 2.2 intersects with the coincident point A1(S)Ax(R) of wavelength AM. This intersection is indicated by the location point of Px(R) of the light sensor 8.
Fig. 1b shows an example of a signal according to the example of Fig. 1a, received from the light sensor 8 of the device. Fig. 1b shows the intensity of the light coming to the light sensor 8 as a function of a position of the location points of the light sensor 8. Local maximum signal ho(2.1) is caused by a reflection from the object point 2.1 (i.e. an intersection of the object point 2.1 and the coincident focus point A1(4.1)Ay(8)) at height ho of the object 2. Another local maximum signal h1(2.2) is a result of a reflection coming from the object point 2.2 (i.e. an intersection of the object point 2.2 and the coincident focus point A1(4.1)Ax(8)) at height h1 of the object
2. Advantageously the position of the received local maximum signal is calibrated to correspond to a position in accordance with the coordinate system 199.
In the device the position of the received local maximum on the light sensor 8 and the location point of the output element from which the light reflected from the intersection of the object point and the coincident focus point, is calibrated, based on triangulation, to correspond a certain position of the object 2.
In the embodiment 100, both the illuminating and imaging are shown in a S 25 symmetrical angle in regard of the surface of the object 2. The invention is however N not restricted to this kind of a symmetrical measuring situation, but the angles of the 2 illuminating and imaging in regard of the object surface can be of different size > without having an effect of the measuring event. Although the angle between I illuminating and imaging changes, nevertheless, coincident focus points defining the = 30 measuring space can be formed such that at each coincident focus points an I individual illuminating focus point coincides with an imaging focus point associated S with a common dominant wavelength.
O N In the embodiment 100, the output element 4.1 is in the optical axis of the illuminating optics 11. The position of illuminating and the output element 4.1 is however not restricted to this position, but the output element 4.1 can be located also otherwise as we see in the further embodiments. In the embodiment 100 the spectrum of the light provided by the output element 4.1 does not need to be continuous, but can comprise, for example sequences of different wavelengths or sequences of differently way discontinuous light. Switching over to second embodiment 200, various features of embodiment 200 are generally considered similar to the one of embodiment 100 and are not repeated here to avoid unnecessary redundancy. However, the embodiment 200 differs from the embodiment 100 in that spherical aberration is provided in the lens or lenses of the illuminating optics 11 and imaging optics 13. In that case said optics refract the light to different illuminating focus points 01(4.1)—06m(4.1) and imaging focus points 61(8)—6m(8) on the grounds that where the light propagates through the illuminating optics 11 or imaging optics 13. Light beams propagating through the optics at the centre have their focus point 91—-m(4.1), 061-m(8) further away than the light beams propagating through the outer edges of the lens. This is illustrated in Fig. 2b for the illuminating optics 11 with two different numerical apertures 61(4.1) and Om(4.1) from the location point P1(4.1) of the output element
4.1. The exemplary lens of the illuminating optics 11 is configured to form from the location point P:(4.1) a plurality of different illuminating focus points positioned at different distances from the illuminating optics 11 along an illuminating coordinate axis A1(4.1) with different numerical apertures of the lens or lenses of the illuminating optics 11. Accordingly, the imaging optics 13 comprises the same property. In case o of imaging, when spherical aberration is provided, the imaging optics 13 is O 25 configured to form from each of the location points P1(8)—Pn(8) of the light sensor & (8) a plurality of different imaging focus points positioned at different distances from > the imaging optics 13 along an imaging coordinate axis A1(8)—=An(8) with different _ numerical apertures of the lens or lenses of the imaging optics 13. In this = embodiment, the measuring can be realized either with one wavelength, various Q 30 wavelengths or white light. o S In the embodiment 200, the measuring is based on the spherical aberration of the N lens or lenses, or generally, the spherical aberration of the optical components, of the illuminating optics 11 and imaging optics 13. The coinciding focus points can be arranged in the same way as illustrated in the example of Fig. 1a for the embodiment
100. Thereby, the components 6m(4.1), Om(8) which are formed with the smallest angular apertures of the lens or lenses of said optics are in focus in the virtual measuring space under the surface of the object 2, and, correspondingly, the components 64(4.1), 61 (8) which are formed with the largest angular apertures of the lens or lenses of said optics are in focus above the object 2. Now, when spherical aberration is utilized, at each coincident focus point, one illuminating focus point of the location point P1(4.1) of the output element 4.1 coincides (i.e. meets) with one imaging focus point of one location point P1(8)—Pn(8) of the light sensor 8 so that these coinciding focus points 91—-m(4.1) and 91—m(8) are formed with the correlated (equal) optical apertures of the illuminating optics (11) and the imaging optics (13) producing a local maximum on the light sensor 8 when this coinciding focus point is intersected with the object 2. A third embodiment 300 differs from the embodiment 200 in that astigmatism is provided in the lens or lenses of the illuminating optics 11 and imaging optics 13. In that case said optics refract the light to different focus areas P1(4.1)—>pm(4.1) and 01(8)—>Pm(8) so that a focus from a certain location point is appearing as in between a line or ellipse shape instead of a point shape at different distances from said optics. Due to astigmatism light beams lying in the tangential and sagittal planes are refracted in said optics differently and both sets of beams intersect the corresponding principal ray for corresponding location point at different focus areas on the grounds where the light propagates through the illuminating optics 11 or imaging optics 13. These light beams of tangential and sagittal planes fail to produce a focused image point, but rather produce a series of elongated focus areas ranging from linear to elliptical, depending upon the distance from said optics. This is shown in Fig. 2c for the illuminating optics 11 where three different N illuminating focus areas P1(4.1), Pn(4.1) and Pm(4.1) with different shapes formed N from the location point P1(4.1) of the output element 4.1 by different optical apertures <Q of the illuminating optics 11 are illustrated. Accordingly, the imaging optics 13 Q comprises the same property.
I , 30 In the embodiment 300, the measuring is based on the astigmatism of the lens or I lenses of the illuminating optics 11 and imaging optics 13. The coinciding focus S points can be arranged in the same way as illustrated in the example of Fig. 1a for S the embodiment 100. Thereby, the illuminating and imaging focus areas Ym(4.1), Pm(8) which are most of elliptical form of the focus areas formed from a certain location point of the illuminating and imaging are locating in the virtual measuring space under the surface of the object 2, and, correspondingly, the components
Om(4.1), Pm(8) which are most of line form of the focus areas are in focus above the object 2. Now, when astigmatism is utilized, at each coincident focus area, one illuminating focus area P1,m(4.1) of the location point P1(4.1) of the output element
4.1 coincides with (i.e. meets) one imaging focus area @1_.m(8) of one location point P41(8)—>Pn(8) of the light sensor 8 associated with the same shape and are formed with the correlated optical apertures of the illuminating optics 11 and the imaging optics 13. In this embodiment, the measuring can be realized either with one wavelength, various wavelengths or white light. Fig. 3 shows measuring arrangement according to the embodiment 400. This embodiment differs from the previous embodiments in that the device comprises two line-like (linear) output elements, denoted with references 4.1 and 4.2, and a matrix light sensor, denoted with reference 8b. With the matrix light sensor 8b it is possible to measure the intensity of the reflected light from the object 2 in two different directions of the location points K1(80)>Kn(8b) and P+(8b)—Pn(8b), and hence, a rectangular coordinate system (i.e. an orthogonal coordinate system) is formed from said location points of the light sensor 8b. The illuminating optics 11 and imaging optics 13 may comprise any aforementioned optical aberration in the way as stated above. Therefore, different components of the light from the location points P1(4.1)—Pn(4.1) of the output element 4.1 and from the location points P1(4.2)—Pn(4.2) of the output element 4.2 are focused at different distances from the illuminating optics 11. Accordingly, the imaging optics 13 is configured to form focus points or areas from the location points K1(8b)—Ka(8b) and P1(8b)—Pn(8b) at different distances from the imaging optics 11. The illuminating optics 11 and the imaging optics 13 are arranged to form coincident focus points or coincident focus areas in the manner as described above. Now, N when the output elements 4.1 and 4.2 both have line like geometric shape it is N possible to arrange coincident focus points or focus areas by illuminating optics 11 <Q and imaging optics 13 into lines at different depths which lines are formed from Q different location points of both said output elements and different location points of E 30 the light sensor 8b.
I when longitudinal chromatic aberration is utilized in the illuminating optics 11 and S imaging optics 13 there are lines of coincident focus points with common dominant S wavelengths of coinciding illuminating focus points and imaging focus points at different depths in the virtual measuring space. Correspondingly, if spherical aberration is utilized there are lines of coincident focus points at different depths, which each corresponding line of coincident focus points consists of coinciding illuminating focus points and imaging focus points which are formed with the corresponding correlated (equal) optical apertures of the illuminating optics 11 and the imaging optics 13. Correspondingly, if astigmatism is utilized in illuminating optics 11 and the imaging optics 13 there are lines of coincident focus areas at different depths, which each corresponding line of coincident focus areas consists of coinciding illuminating focus areas and imaging focus areas associated with the same shape and which coinciding illuminating focus areas and imaging focus areas are formed with the corresponding correlated (equal) optical apertures of the illuminating optics 11 and the imaging optics 13. In Fig. 3, when longitudinal chromatic aberration is utilized in the illuminating optics 11 and imaging optics 13, there are illustrated intersections of the surface of the object 2 and lines of coincident focus points, denoted as L1a and L1b. L1a is a line of reflections resulted from the intersections of certain object points of the surface and coincident focus points locating in a line form which are formed from the illuminating focus points of location points P4(4.1)—Pn(4.1) of the output element
4.1 and the imaging focus points of location points P1(80)—>Pn(8b),K1(80)>Kn(8b) of the light sensor 8b. Respectively, L2b is a line of reflections resulted from the intersections of certain object points of the surface and coincident focus points locating in a line form which are formed from the illuminating focus points of location points P1(4.2)—Pn(4.2) of the output element 4.2 and the imaging focus points of location points P1(8b)—Pn(8b),K1(8b)—Ka(8b) of the light sensor 8b. In Fig. 3, there are illustrated one individual intersection from each L1a and L2b from which one intersection takes place at the coincident focus point Az(4.1)Axy(8) and the other intersection takes place at the coincident focus point Az(4.2)Axy(8). The coincident focus point Az(4.1)Axy(8) is formed from one of the illuminating focus points along o the illuminating coordinate axis Az(4.1) associated with the principal ray Fz(4.1) for O the location point P,(4.1) of the output element 4.1 and one of the imaging focus & points along the imaging coordinate axis Axy(8b) associated with the principal ray o Fxy(8b) for the location point Px(8b)Ky(8b) of the light sensor 8b. Respectively, the - 30 coincident focus point A;(4.2)Ax(8) is formed from one of the illuminating focus = points along the illuminating coordinate axis A,(4.2) associated with the principal ray V Fz(4.2) for the location point P,(4.2) of the output element 4.2 and one of the imaging 3 focus points along the imaging coordinate axis Axx(8b) associated with the principal N ray Fxx(8b) for the location point Px(8b)Kx(8b) of the light sensor 8b. Like any other N 35 coincident focus points according to the present disclosure also each of numerous coincident focus points of the embodiment 300 are each associated with the same wavelength of the certain coinciding illuminating focus point and imaging focus point.
The intersection of the surface of the object 2 at the location of the coincident focus point A;(4.1)A(8) generates a reflection of the light originated from the output element location P,(4.1) from which part of the reflected light is collected onto the location point Px(8b)Ky(8b) of the light sensor 8b, generating a local maximum to the formed reflection data. Respectively, the intersection of the surface of the object 2 at the location of the coincident focus point A;(4.2)Ax(8) generates a reflection of the light originated from the output element location P,(4.2) from which part of the reflected light is collected onto the location point Px(8b)Kx(8b) of the light sensor 8b, generating a local maximum to the formed reflection data. In the same manner, a local maximum is formed from the other intersections of L1a and L1b as illustrated corresponding lines on the light sensor 8b. In various embodiments, the device comprises a plurality of line-like or point-like output elements 4.1—4.n or combinations thereof. In embodiments which comprises various output elements, the illuminating optics 11 is configured to focus light from each of the location points P1—Pn for each of the output elements 4.1—4.n on a plurality of illuminating focus points or focus areas positioned at different distances from the illuminating optics 11 along the corresponding illuminating coordinate axis A(—An. Each of these axes is associated with the corresponding principal ray F1—Fn of the illuminating optics 11 for the corresponding location point P1—P, of the corresponding output element 4.1—4.n. The corresponding principal ray F1—Fn is the mutual for the plurality of illuminating focus points or focus areas focused from the corresponding location point P1—Pn of the corresponding output element 4.1—4.n. Each of the illuminating focus points or focus areas along the same corresponding illuminating coordinate axis A1—An for the corresponding location point P1+—Py of the corresponding output element N 4.1—4.n differs from each other at least in the dominant wavelength or shape and/or N is formed with a different optical aperture of the illuminating optics 11.
O > Furthermore, the illuminating optics 11 and imaging optics 13 are configured to form I a plurality of coincident focus points or focus areas so that each of the various focus = 30 points or focus areas from the plurality of illuminating focus points or focus areas I along the same corresponding illuminating coordinate axis A1—An for each of the S output elements 4.1—4.n coincides at a coincident focus point or focus area with an S imaging focus point or focus area positioned along a different imaging coordinate axis A1(8)—An(8), where the orientations of the illuminating coordinate axes A1—An for each of the output elements 4.1—4.n are different from the orientations of the imaging coordinate axes A1(8)—An(8).
In various embodiments longitudinal chromatic aberration is utilized in the illumination optics 11 to focus light from each of the location points P1—P, for each of the output elements 4.1—4.n on a plurality of illuminating focus points positioned at different distances from the illuminating optics 11 along the corresponding illuminating coordinate axis A1—An are associated with the corresponding principal ray F1—F, of the illuminating optics 11 for the corresponding location point P1—Pn of the corresponding output element 4.1—4.n so that each of the illuminating focus points along the same illuminating coordinate axis A1—An differs in the dominant wavelength. Correspondingly, longitudinal chromatic aberration is provided in the imaging optics 13 to form from each of the location points P1(8)—Pn(8) of the light sensor 8 a plurality of imaging focus points positioned at different distances from the imaging optics 13 along the corresponding imaging coordinate axis A1(8)—An(8) associated with the corresponding principal ray F1(8)—>Fn(8) of the imaging optics 13 for the corresponding location point P1(8)>Pn(8) of the light sensor 8 so that each of the focus points along the same imaging coordinate axis A1(8)—An(8) differs in the dominant wavelength.
In those embodiments where a matrix light sensor is used, each imaging coordinate axis, principal ray and location point may be associated with the coordinate system of location points of the light sensor 8b like described for the embodiment 400.
When longitudinal chromatic aberration is provided in the illumination optics 11 and the imaging optics 13, each of the coincident focus points consists of an illuminating focus point and an imaging focus point associated with the common dominant wavelength.
In various embodiments spherical aberration is provided in the illuminating optics 11 S 25 —tofocus light from each of the location points P1—Pn for each of the output elements N 4.1—4.n on a plurality of imaging focus points positioned at different distances from 2 the illuminating optics 11 along the corresponding illuminating coordinate axis > A1—An associated with the corresponding principal ray F1—Fn of the illuminating I optics 11 for the corresponding location point P1—P, of the corresponding output = 30 element 4.1—4.n so that each of the illuminating focus points along the same I illuminating coordinate axis A1—An is formed with a different optical aperture of the S illuminating optics 11. Correspondingly, spherical aberration is provided in the S imaging optics 13 to form from each of the location points P1(8)—>Pn(8) of the light sensor 8 a plurality of imaging focus points positioned at different distances from the imaging optics 13 along the corresponding imaging coordinate axis A1(8)—An(8) associated with the corresponding principal ray F1(8)—>Fn(8) of the imaging optics
13 for the corresponding location point P1(8)>Pn(8) of the light sensor 8 so that each of the focus points along the same imaging coordinate axis A1(8)—An(8) is formed with a different optical aperture of the imaging optics 13. When spherical aberration is provided in the illumination optics 11 and the imaging optics 13, each of the coincident focus point is formed with the correlated optical apertures of the illuminating optics 11 and the imaging optics 13. In various embodiments astigmatism is provided in the illuminating optics 11 to focus light from each of the location points P1—Pn for each of the output elements 4.1 —4.n on a plurality of illuminating focus areas with different shapes positioned at different distances from the illuminating optics 11 along the corresponding illuminating coordinate axis A1—An associated with the corresponding principal ray F1—Fn of the illuminating optics 11 for the corresponding location point P1—P, of the corresponding output element 4.1—4.n so that each of the illuminating focus areas along the same illuminating coordinate axis A1—An is formed with the different optical apertures of the illuminating optics 11. Correspondingly, astigmatism is provided in the imaging optics 13 to form from each of the location points P1(8)—Pn(8) of the light sensor 8 a plurality of imaging focus areas with different shapes positioned at different distances from the imaging optics 13 along the corresponding imaging coordinate axis A1(8) >An(8) associated with the corresponding principal ray F:(8)—>Fn(8) of the imaging optics 13 for the corresponding location point P1(8)—Pn(8) of the light sensor 8 so that each of the focus areas along the same imaging coordinate axis A1(8)—An(8) is formed with the different optical apertures of the imaging optics 13. When astigmatism is provided in the illumination optics 11 and the imaging optics S 25 13, each of the coincident focus area consists of an illuminating and imaging focus N area associated with the common shape and is formed with the correlated optical 3 apertures of the illuminating optics 11 and the imaging optics 13.
O - Figs. 4a and 4b show examples of spectral content of collected light, showing = intensity (I) of collected light as a function of wavelength (A) in such a case where V 30 longitudinal chromatic aberration is utilized in the illuminating optics 11 and imaging 3 optics 13. In Fig. 4b is an example spectrum from the location point of the light N sensor 8 onto which is collected light from the reflection generated in the intersection N of the object 2 and one of the coincident focus point. There is a very clear maximum with one certain wavelength Ap in the spectrum of Fig. 4b, which indicates that it is a particular wavelength of light that reflects from the intersection of the object 2 and the coincident focus point, revealing information about optical properties of the object 2. Whereas the intensity of that wavelength Ap from which the light measured of the intersection mainly consists of is strongly attenuated in a spectrum of light collected from a location point of the light sensor 8 when said location point is close to the location point on the light sensor 8 where light from the intersection is collected. The spectrum of light collected from such a location point is shown in Fig. 4a where the spectrum of the collected light has a very clear attenuation in the place of the wavelength A, that is mainly concentrated in the maximum of the spectrum of light reflected from the intersection.
In the measurement of optical properties intensity of the local maximum is determined in certain object point of the object under measurement. The intensity of the local maximum is proportional to the reflectivity of the object point from which the local maximum is determined. Furthermore, in the cases where the object point is on the surface of the object, by determining the intensity of the local maxima it is obtained information about reflectivity of the surface.
When longitudinal chromatic aberration is utilized in the illuminating optics 11 and imaging optics 13, it is possible to calibrate the location of the coincident focus point in the measuring space and the wavelength of the associated local maximum whereby by measuring the position of the object, like the surface height, it is obtained information about reflectivity of the object from that position in specific, known wavelength. Furthermore, when the device comprises various output elements there are various measuring geometries whereby by said various measuring geometries it is possible to measure simultaneously the object by using diversity of wavelengths.
S 25 Fig. 5a is shown an embodiment 500 that comprises two point-like output elements, N denoted with references 4.1 and 42. The embodiment 500 further utilizes 2 longitudinal chromatic aberration in the illuminating optics 11 and imaging optics 13, > whereby numerous coincident focus points are formed at different heights and each I of coincident focus points consists of an illuminating and imaging focus point = 30 associated with the common dominant wavelength as described above. In Fig. 5a I there are illustrated illuminating focus points formed from two location points P1(4.1) S and P4(4.2) of the output elements and imaging focus points formed from two S location points Pw(8) and Pq(8) of the light sensor 8 with five different wavelengths M-As at different depths in z-direction. Furthermore, there are illustrated four different coincident focus points which are consisted of some of these illuminating and imaging focus points, i.e., A1(4.2)Aq(8) with A, A1(4.1)Ag(8) with Ao, A1(4.2)Aw(8) with
No and A1(4.1)Aw(8) with Aa.
In Fig. 5a is further shown two different possible surface heights ha and ho for the object 2 to be measured.
When the object 2 has the surface height at height ha there occurs two intersections.
One intersecting coincident focus point at ha is A1(4.1)Aq(8) that is consisted of one of the illuminating focus points formed from the location point P1(4.1) of the output element 4.1 and one of the illuminating focus point formed from the location point Pw(8) of the light sensor 8. Another intersecting coincident focus point at ha is A1(4.2)Aw(8) that is consisted of one of the illuminating focus point formed from the location point P1(4.2) of the output element 4.2 and one of the imaging focus point formed from the location point Pw(8) of the light sensor 8. Both of these intersections produce a local maximum to the intensity distribution which is shown in Fig. 5b1. The local maximum ha(2.2a) that corresponds to the location point Pw(8) on the sensor 8 is aresult of the intersection of the object point 2.1a and the coincident focus point A1(4.1)Aq(8). Correspondingly, the local maximum ha(2.1a) that corresponds to the location point P4(8) on the sensor 8 is a result of the intersection of the object point 2.2a and the coincident focus point A1(4.2)Aw(8). When the object 2 has the surface height at hp there occurs an intersection of the surface and the virtual measuring space at the position of object point 2.1b and coincident focus point A1(4.1)Aw(8). This intersection generates a local maximum, shown in Fig. 5b2, at the same location point Pw(8) of the light sensor 8 as the intersection of the coincident focus point A1(4.2)Aw(8) described above.
In order to determine the position of the intersection and further the position of the object point the device of the embodiment 500 is configured to resolve from which location point of the output elements, either 4.1 or 4.2 in this example, the light collected from the N reflection of the intersection is originated.
Since the local maximum of the light N reflected from the intersection of the object 2 and one of the coincident focus point <Q consists mainly of one dominant wavelength, the device can by determining the Q wavelength of the local maximum to determine from which output element, either E 30 4.1 or4.2 in this example, the light of the local maximum is originated.
This can be N done such that for each positions of the coincident focus points associated with S different location points P1—P, of the output elements 4.1—4.n is calibrated to S correspond unambiguously a certain wavelength A1—m.
Hence, in the example of N Fig.5a, the local maximum corresponding the location point Pw(8) of the light sensor 8 with the wavelength Ao unambiguously corresponds to the location point P+(4.2) of the output element 4.2. Correspondingly, the local maximum corresponding the location point Pw(8) of the light sensor 8 with the wavelength M unambiguously corresponds to the location point P1(4.1) of the output element 4.1. In one embodiment, the wavelength of the local maximum can be determined such that the light sensor 8 is an RGB camera.
An embodiment which comprises more than one output elements 4.1—4.n and utilizes longitudinal chromatic aberration in the illuminating optics 11 and imaging optics 13, the device is configured to determine the wavelength of the local maximum of the intensity distribution of the light detected by the light sensor 8 to distinguish from which output element 4.1—4.n the light of the local maximum is provided to determine the position of the intersected object point 2.1. The light sensor 8 may be an RGB camera that is configured to determine the wavelength of the local maximum.
In various embodiments the light sensor 8 may be a CCD or CMOS sensor or the like.
The device can be called also as a measuring device, an imaging device, a triangulating device or an optical device.
The output element of the device can be called also as an illuminating element or light source element. The distribution of the coincident focus points defines a measuring space for determining the position of an object point 2.1 of the object 2 being measured.
In an embodiment the position of an object point of the object (2) being measured is determined for at least one of the x, y or z coordinates of the xyz coordinate N system associated with the distribution of the coincident focus points.
N 2 Fig. 6a shows an embodiment 600 of measuring of the thickness of an object 2d ER 25 that is at least partially transparent or translucent for the light being directed to the I object (2). The object 2d comprises two surfaces of which between each other is the + thickness D of the object at a certain position. In the example of Fig. 6a, a first I surface is denoted with 2f and a second surface is denoted with 2s. The embodiment S 600 can be utilized with any optical aberrations in the illuminating optics 11 and S 30 imaging optics 13 and the position of the intersecting object points of the object 2d are measured in the manner as described above.
Fig. 6b shows an example of a signal according to the example of Fig. 6a, received from the light sensor 8 of the device.
One local maximum signal h2r(2.1s) is caused by a reflection from the object point 2.1f of the upper surface 2f (i.e. an intersection of the object point 2.1f and the coincident focus point A1(4.1)A+(8)). Another local maximum signal hos(2.1f) is a result of a reflection coming from the object point 2.1s of the lower surface (i.e. an intersection of the object point 2.1s and the coincident focus point A1(4.1)Aa(8)). The thickness D of the object at location of these object points 2.1f and 2.1s can be determined from the distance D' of said local maxima when the refraction index of the object being measured and the measurement geometry are known.
In one embodiment, a thickness between a first surface (2f) and a second surface (28) of the object (2) that is at least partially transparent or translucent for the light being directed to the object (2) is determined from the position difference between the local maximum of the intensity distribution of the detected light on the light — sensor 8 that is a result from the first surface (2f) and the local maximum of the intensity distribution of the detected light on the light sensor 8 that is a result from the second surface (2s). Figure /a shows an example of an intensity distribution on the matrix camera type of sensor 8 when a surface of the object 2c measured according to the invention.
Theareasthat have higher illumination intensity are shown as lighter areas.
In fig.7a each of these horizontal areas which are lighter than the background in the single image frame are results of simultaneous intersections of the surface and different lines comprising different coincident focus points measured in the manner as described above.
This exemplary measurement consisted of illuminating of 27 line- like output elements.
In Fig 7a the discontinuities of the lines come from the changes N in the surface profile according to the measured object 2c.
Each of the 27 lines have N measured simultaneously from different surface parts of 2c.
In Fig. 7b the imaged <Q area of 2c is illustrated with dashed lines.
Fig. /c shows a schematic sideview of the Q object 2c exemplifying the measured surface profile.
E 30 Figure 8 shows a flowchart of a method according to an exemplifying and nonlimiting N embodiment 800. The method comprises the following steps: 2 — step 802: provide an optical illuminating and optical detecting of the object < from different directions, — step 804: detect light reflected from the object, — step 806: determine the positions of the object points, and — step 808: determine the optical properties.
At 802, light is focused from each of the location points for each of the output elements on illuminating focus points or focus areas positioned at different distances from the illuminating optics along the corresponding illuminating coordinate axis associated with the corresponding principal ray of the illuminating optics for the corresponding location point of the corresponding output element. The corresponding principal ray is the mutual for the plurality of illuminating focus points or focus areas focused from the corresponding location point of the corresponding output element. Each of the illuminating focus points or focus areas along the same corresponding illuminating coordinate axis for the corresponding location point of the corresponding output element differs from each other at least in the dominant wavelength or shape and/or is formed with a different optical aperture of the illuminating optics. Further at 802, a plurality of different imaging focus points or focus areas are formed from each of the location points of the light sensor at different distances from the imaging optics along an imaging coordinate axis associated with a corresponding principal ray of the imaging optics for the corresponding location point of the light sensor. The corresponding principal ray is the mutual for the plurality of imaging focus points formed from the corresponding location point of the light sensor. Each of the imaging focus points or focus areas along the same imaging coordinate axis differs from each other at least in the dominant wavelength or shape and/or is focused with a different optical aperture of the imaging optics. Further at 802, a plurality of coincident focus points or focus areas are formed so that each of the various focus points or focus areas from the plurality of illuminating focus points or focus areas along the same corresponding illuminating coordinate axis for each of the output elements coincides at a coincident focus point or focus N area with an imaging focus point positioned along a different imaging coordinate N axis. The orientations of the illuminating coordinate axes for each of the output <Q elements are configured to be different from the orientations of the imaging Q coordinate axes. Each of the coincident focus points or focus areas consists of an E 30 illuminating and imaging focus point or focus area associated with the common N dominant wavelength or shape and/or is formed with the correlated optical apertures S of the illuminating optics and the imaging optics.
O O At 804, the intensity values of the light collected from the object by the imaging optics is detected.
At 806, the positions of the object points are determined from the locations of the local maxima of the intensity distribution of the detected light.
At 808, the optical properties of the object points are determined from the intensities or the wavelengths of the of the local maxima of the intensity distribution of the detected light.
Steps 806 and 808 are optional steps from which either 806 or 808, or alternatively both 806 and 806 can be accomplished.
It is obvious for someone skilled in the art that the measuring process can be returned back to step 802 whereby a continuous measuring process is produced.
Inamethod according an embodiment, the method comprises a step of determining a thickness between a first surface and a second surface of the object that is at least partially transparent or translucent for the light being directed to the object from the position difference between an object point on the first surface of the object and an object point on the second surface of the object.
The invention has been explained above with reference to the above embodiments, and several advantages of the invention have been demonstrated. The disclosure is not limited to the embodiments described above, but the inventive idea can be applied in numerous ways within the scope of the claims.
The features recited in dependent claims are mutually freely combinable unless otherwise explicitly stated.
O QA O
N o <Q
O N
I a a
N < o
LO O QA O N

Claims (20)

Claims
1. A device for determining a position and/or optical properties of an object (2), comprising: — a point-like or line-like output element (4.1) for providing light; — illuminating optics (11) for directing light from the output element (4.1) to the object (2); — a light sensor (8) for detecting intensity values of light; and — imaging optics (13) for collecting light from the object (2) to the light sensor (8), characterised in that the illuminating optics (11) is configured to focus light from a location point (P1(4.1)) of the output element (4.1) on a plurality of illuminating focus points or focus areas positioned at different distances from the illuminating optics (11) along an illuminating coordinate axis (A1(4.1)) associated with a principal ray (F1(4.1)) of the illuminating optics (11) for the location point P1(4.1) of the output element (4.1), wherein the principal ray (F1(4.1)) is the mutual for the plurality of illuminating focus points or focus areas focused from the location point (P1(4.1)) of the output element (4.1), and wherein each of the illuminating focus points or focus areas along the same illuminating coordinate axis (A1(4.1)) differs from each other at least in the dominant wavelength or shape and/or is formed with a different optical aperture of the illuminating optics (11), in that the imaging optics (13) is configured to form from each of the location points (P1(8)->Pn(8)) of the light sensor (8) a plurality of imaging focus points or focus areas positioned at different distances from the imaging optics (13) along an imaging coordinate axis (A1(8)->An(8)) associated with a corresponding N 25 principal ray (F1(8)->Fn(8)) of the imaging optics (13) for the corresponding N location point (P1(8)->Pn(8)) of the light sensor (8), wherein the corresponding <Q principal ray (F1(8)->Fn(8)) is the mutual for the plurality of imaging focus points Q formed from the corresponding location point (P1(8)->Pn(8)) of the light sensor E (8), and wherein each of the imaging focus points or focus areas along the same N 30 imaging coordinate axis (A1(8)->An(8)) differs from each other at least in the S dominant wavelength or shape and/or is focused with a different optical aperture N of the imaging optics (13),
N in that the illuminating optics (11) and the imaging optics (13) are configured to form a plurality of coincident focus points or focus areas so that each of the various focus points or focus areas from the plurality of illuminating focus points or focus areas along the same illuminating coordinate axis (A1(4.1)) coincides at a coincident focus point or focus area with an imaging focus point or focus area positioned along a different imaging coordinate axis (A1(8)->An(8)), where the orientation of the illuminating coordinate axis (A1(4.1)) is different from the orientations of the imaging coordinate axes (A1(8)->An(8)) and that each of the coincident focus points or focus areas consists of an illuminating and imaging focus point or focus area associated with the common dominant wavelength or shape and/or is formed with the correlated optical apertures of the illuminating optics (11) and the imaging optics (13), and in that the device is configured to determine the position and/or optical properties of an object point (2.1) of the object (2) from the local maximum of the intensity distribution of the light detected by the light sensor (8) so that: — the position of the object point (2.1) is determined from the location of said local maximum; and/or — the optical properties of the object point (2.1) are determined from the intensity or the wavelength of said local maximum, where said local maximum is a result of the light collected from the intersection of the object point (2.1) and one of the coincident focus points or focus areas.
2. The device according to claim 1, characterised in that the device comprises a plurality of line-like or point-like output elements (4.1->4.n) or combinations thereof.
3. The device according to any of the preceding claims, characterised in that the illuminating optics (11) is configured to focus light from each of the location points (P1->Pn) for each of the output elements (4.1->4.n) on a plurality of S 25 illuminating focus points or focus areas positioned at different distances from the N illuminating optics (11) along the corresponding illuminating coordinate axis (A1- 2 >An) associated with the corresponding principal ray (F1->Fn) of the illuminating > optics (11) for the corresponding location point (P1->Pn) of the corresponding I output element (4.1->4.n), wherein the corresponding principal ray (F1->Fn) is = 30 the mutual for the plurality of illuminating focus points or focus areas focused from I the corresponding location point (P1->Pn) of the corresponding output element S (4.1->4.n), and wherein each of the illuminating focus points or focus areas along S the same corresponding illuminating coordinate axis (A1->An) for the corresponding location point (P1->Pn) of the corresponding output element (4.1- >4.n) differs from each other at least in the dominant wavelength or shape and/or is formed with a different optical aperture of the illuminating optics (11).
4. The device according to any of the preceding claims, characterised in that the illuminating optics (11) and imaging optics (13) are configured to form a plurality of coincident focus points or focus areas so that each of the various focus points or focus areas from the plurality of illuminating focus points or focus areas along the same corresponding illuminating coordinate axis (A1->An) for each of the output elements (4.1->4.n) coincides at a coincident focus point or focus area with an imaging focus point or focus area positioned along a different imaging coordinate axis (A1(8)->An(8)), where the orientations of the illuminating coordinate axes (A1->An) for each of the output elements (4.1->4.n) are different from the orientations of the imaging coordinate axes (A1(8)->An(8)).
5. The device according to any of the preceding claims, characterised in that longitudinal chromatic aberration is provided in the illuminating optics (11) to focus light from each of the location points (P1->Pn) for each of the output elements (4.1->4.n) on a plurality of illuminating focus points positioned at different distances from the illuminating optics (11) along the corresponding illuminating coordinate axis (A1->An) associated with the corresponding principal ray (F1->Fn) of the illuminating optics (11) for the corresponding location point (P1->Pn) of the corresponding output element (4.1->4.n) so that each of the illuminating focus points along the same illuminating coordinate axis (A1->An) differs in the dominant wavelength, and in that longitudinal chromatic aberration is provided in the imaging optics (13) to form from each of the location points (P1(8)->Pn(8)) of the light sensor (8) a plurality of imaging focus points positioned at different distances from the imaging optics (13) along the corresponding imaging coordinate axis (A1(8)->An(8)) associated with the corresponding principal ray (F1(8)->Fn(8)) of o the imaging optics (13) for the corresponding location point (P1(8)->Pn(8)) of the O light sensor (8) so that each of the focus points along the same imaging 2 coordinate axis (A1(8)->An(8)) differs in the dominant wavelength. Q
6. The device according to any of the preceding claims, characterised in that E 30 spherical aberration is provided in the illuminating optics (11) to focus light from N each of the location points (P1->Pn) for each of the output elements (4.1->4.n) S on a plurality of imaging focus points positioned at different distances from the S illuminating optics (11) along the corresponding illuminating coordinate axis (A1- N >An) associated with the corresponding principal ray (F1->Fn) of the illuminating optics (11) for the corresponding location point (P1->Pn) of the corresponding output element (4.1->4.n) so that each of the illuminating focus points along the same illuminating coordinate axis (A1->An) is formed with a different optical aperture of the illuminating optics (11), and in that spherical aberration is provided in the imaging optics (13) to form from each of the location points (P1(8)->Pn(8)) of the light sensor (8) a plurality of imaging focus points positioned at different distances from the imaging optics (13) along the corresponding imaging coordinate axis (A1(8)->An(8)) associated with the corresponding principal ray (F1(8)->Fn(8)) of the imaging optics (13) for the corresponding location point (P1(8)->Pn(8)) of the light sensor (8) so that each of the focus points along the same imaging coordinate axis (A1(8)->An(8)) is formed with a different optical aperture of the imaging optics (13).
7. The device according to any of the preceding claims, characterised in that astigmatism is provided in the illuminating optics (11) to focus light from each of the location points (P1->Pn) for each of the output elements (4.1->4.n) on a plurality of illuminating focus areas with different shapes positioned at different distances from the illuminating optics (11) along the corresponding illuminating coordinate axis (A1->An) associated with the corresponding principal ray (F1- >Fn) of the illuminating optics (11) for the corresponding location point (P1->Pn) of the corresponding output element (4.1->4.n) so that each of the illuminating focus areas along the same illuminating coordinate axis (A1->An) is formed with the different optical apertures of the illuminating optics (11), and in that astigmatism is provided in the imaging optics (13) to form from each of the location points (P1(8)->Pn(8)) of the light sensor (8) a plurality of imaging focus areas with different shapes positioned at different distances from the imaging optics (13) along the corresponding imaging coordinate axis (A1(8)->An(8)) associated with the corresponding principal ray (F1(8)->Fn(8)) of o the imaging optics (13) for the corresponding location point (P1(8)->Pn(8)) of the O light sensor (8) so that each of the focus areas along the same imaging & coordinate axis (A1(8)->An(8)) is formed with the different optical apertures of the o imaging optics (13).
N E 30
8. The device according to claim 5, characterised in that when longitudinal N chromatic aberration is provided in the illuminating optics (11) and the imaging S optics (13), each of the coincident focus points consists of an illuminating and N imaging focus point associated with the common dominant wavelength.
N
9. The device according to claim 6, characterised in that when spherical aberration is provided in the illuminating optics (11) and the imaging optics (13),
each of the coincident focus point is formed with the correlated optical apertures of the illuminating optics (11) and the imaging optics (13).
10. The device according to claim 7, characterised in that when astigmatism is provided in the illuminating optics (11) and the imaging optics (13), each of the coincident focus area consists of an illuminating and imaging focus area associated with the common shape and is formed with the correlated optical apertures of the illuminating optics (11) and the imaging optics (13).
11. The device according to claim 5, characterised in that when the device comprises more than one output elements (4.1->4.n), the device is configured to determine the wavelength of the local maximum of the intensity distribution of the light detected by the light sensor (8) to distinguish from which output element (4.1->4.n) the light of the local maximum is provided to determine the position of the intersected object point (2.1).
12. The device according to any of the preceding claims, characterised in that the light sensor (8) is a line scan camera, a matrix camera, an RGB camera or a position sensitive detector (PSD).
13. The device according to claim 11, characterised in that the light sensor (8) is an RGB camera that is configured to determine the wavelength of the local maximum.
14. The device according to any of the preceding claims, characterised in that the determination of the position of a point (2.1) is based on triangulation.
15. The device according to any of the preceding claims, characterised in that S the distribution of the coincident focus points defines a measuring space for N determining the position of an object point (2.1) of the object (2) being measured. o = 25
16. The device according to any of the preceding claims, characterised in that - when measuring an object (2) that is at least partially transparent or translucent = for the light being directed to the object (2), the device is configured to determine V a thickness between a first surface (2f) and a second surface (2s) of the object D (2) that is at least partially transparent or translucent for the light being directed N 30 to the object (2) from the position difference between the local maximum of the N intensity distribution of the detected light on the light sensor 8 that is a result from the first surface (2f) and the local maximum of the intensity distribution of the detected light on the light sensor 8 that is a result from the second surface (25).
17. A method for determining a position and/or optical properties of an object (2), characterised in that the method comprises: — providing an optical illuminating and optical detecting of the object (2) from different directions so that: = light is focused from a location point (P1(4.1) of the output element (4.1) on a plurality of illuminating focus points or focus areas positioned at different distances from the illuminating optics (11) along an illuminating coordinate axis (A1(4.1)) associated with a principal ray (F1(4.1)) of the of the illuminating optics (11) for the location point (P1(4.1) of the output element (4.1), wherein the principal ray (F1(4.1)) is the mutual for the plurality of illuminating focus points or focus areas focused from the location point (P1(4.1)) of the output element (4.1), and wherein each of the illuminating focus points or focus areas along the same illuminating coordinate axis (A1(4.1)) differs from each other at least in the dominant wavelength or shape and/or is formed with a different optical aperture of the illuminating optics (11), and = a plurality of imaging focus points or focus areas positioned at different distances from the imaging optics (13) along an imaging coordinate axis (A1(8)->An(8)) associated with a corresponding principal ray (F1(8)->Fn(8)) of the imaging optics (13) for the corresponding location point (P1(8)->Pn(8)) of the light sensor (8) are formed from each of the location points (P1(8)->Pn(8)) of the light sensor (8), wherein the corresponding principal ray (F1(8)->Fn(8)) is the mutual for the plurality of imaging focus points or focus areas o formed from the corresponding location point (P1(8)->Pn(8)) of the O light sensor (8), and wherein each of the imaging focus points or & focus areas along the same imaging coordinate axis (A1(8)->An(8)) o differs from each other at least in the dominant wavelength or shape - 30 and/or is focused with a different optical aperture of the imaging = optics (13); V — forming a plurality of coincident focus points so that each of the various 3 focus points from the plurality of illuminating focus points or focus areas N along the illuminating coordinate axis (A1(4.1)) coincides at a coincident N 35 focus point or focus area with a imaging focus point or focus area positioned along a different imaging coordinate axis (A1(8)->An(8)), where the orientation of the illuminating coordinate axis (A1(4.1)) is different from the orientations of the imaging coordinate axes (A1(8)->An(8)) and that each of the coincident focus points or focus areas consists of an illuminating and imaging focus point or focus area associated with the common dominant wavelength or shape and/or is formed with the correlated optical apertures of the illuminating optics (11) and the imaging optics (13); — detecting by the light sensor (8) the intensity values of the light collected from the object (2) by the imaging optics (13); and — determining the position and/or optical properties of an object point (2.1) of the object (2) so that the position of the object point (2.1) is determined from the location, and/or the optical properties object point (2.1) are determined from the intensity or the wavelength of the local maximum of the intensity distribution of the detected light, where said local maximum is a result of the light collected from the intersection of the object point (2.1) and one of the coincident focus points or focus areas.
18. The method according to claim 16, characterised in that the method further comprises: — focusing light from each of the location points (P1->Pn) for each of the output elements (4.1->4.n) on illuminating focus points or focus areas positioned at different distances from the illuminating optics (11) along the corresponding illuminating coordinate axis (A1->An) associated with the corresponding principal ray (F1->Fn) of the illuminating optics (11) for the corresponding location point (P1->Pn) of the corresponding output element (4.1->4.n), where the corresponding principal ray (F1->Fn) is the mutual for the plurality of illuminating focus points or focus areas focused from the corresponding location point (P1->Pn) of the corresponding output element (4.1->4.n), and o wherein each of the illuminating focus points or focus areas along the same O corresponding illuminating coordinate axis (A1->An) for the corresponding & location point (P1->Pn) of the corresponding output element (4.1->4.n) differs o from each other at least in the dominant wavelength or shape and/or is formed - 30 with a different optical aperture of the illuminating optics (11); and = — forming a plurality of coincident focus points or focus areas so that each of V the various focus points or focus areas from the plurality of illuminating focus D points or focus areas along the same corresponding illuminating coordinate N axis (A1->An) for each of the output elements (4.1->4.n) coincides at a N 35 coincident focus point or focus area with a imaging focus point or focus area positioned along a different imaging coordinate axis (A1(8)->An(8)), where the orientations of the illuminating coordinate axes (A1->An) for each of the output elements (4.1->4.n) are different from the orientations of the imaging coordinate axes (A1(8)->An(8)).
19. The method according to claim 16 or 18, characterised in that the method further comprises: — determining a thickness between a first surface (2f) and a second surface (2s) of the object (2) that is at least partially transparent or translucent for the light being directed to the object (2) from the position difference between the local maximum of the intensity distribution of the detected light on the light sensor 8 that is a result from the first surface (2f) and the local maximum of the intensity distribution of the detected light on the light sensor 8 that is a result from the second surface (2s).
20. The use of the device according to any of claims 1-16 for determining a thickness between a first surface (2f) and a second surface (2s) of the object (2), wherein the object (2) is at least partially transparent or translucent for the light being directed to the object (2).
O
QA
O
N o <Q
O
N
I a a
N < o
LO
O
QA
O
N
FI20205942A 2020-09-29 2020-09-29 Device for determining a distance, surface thickness and optical properties of an object and related method FI130557B (en)

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KR1020237014736A KR20230128262A (en) 2020-09-29 2021-09-29 Device and related method for determining distance, surface thickness and optical properties of an object
CN202180066713.6A CN116324331A (en) 2020-09-29 2021-09-29 Apparatus for determining distance, surface thickness and optical properties of an object and related methods
CA3193114A CA3193114A1 (en) 2020-09-29 2021-09-29 Device for determining a distance, surface thickness and optical properties of an object and related method
EP21790942.3A EP4222447B1 (en) 2020-09-29 2021-09-29 Device for determining a distance, surface thickness and optical properties of an object and related method
JP2023543469A JP2023543951A (en) 2020-09-29 2021-09-29 Apparatus and related methods for determining distances, surface thicknesses, and optical properties of objects
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