PL385656A1 - Układ detekcyjny elektronów i skaningowy mikroskop elektronowy - Google Patents

Układ detekcyjny elektronów i skaningowy mikroskop elektronowy

Info

Publication number
PL385656A1
PL385656A1 PL385656A PL38565608A PL385656A1 PL 385656 A1 PL385656 A1 PL 385656A1 PL 385656 A PL385656 A PL 385656A PL 38565608 A PL38565608 A PL 38565608A PL 385656 A1 PL385656 A1 PL 385656A1
Authority
PL
Poland
Prior art keywords
electrones
detection
microscope
scanning
scanning electrone
Prior art date
Application number
PL385656A
Other languages
English (en)
Other versions
PL217173B1 (pl
Inventor
Witold Słówko
Original Assignee
Politechnika Wrocławska
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Politechnika Wrocławska filed Critical Politechnika Wrocławska
Priority to PL385656A priority Critical patent/PL217173B1/pl
Priority to PCT/PL2009/000073 priority patent/WO2010008307A2/en
Publication of PL385656A1 publication Critical patent/PL385656A1/pl
Publication of PL217173B1 publication Critical patent/PL217173B1/pl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/18—Vacuum control means
    • H01J2237/188—Differential pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2602—Details
    • H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
PL385656A 2008-07-14 2008-07-14 Układ detekcyjny elektronów i skaningowy mikroskop elektronowy PL217173B1 (pl)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PL385656A PL217173B1 (pl) 2008-07-14 2008-07-14 Układ detekcyjny elektronów i skaningowy mikroskop elektronowy
PCT/PL2009/000073 WO2010008307A2 (en) 2008-07-14 2009-07-13 Electron detection unit and a scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL385656A PL217173B1 (pl) 2008-07-14 2008-07-14 Układ detekcyjny elektronów i skaningowy mikroskop elektronowy

Publications (2)

Publication Number Publication Date
PL385656A1 true PL385656A1 (pl) 2010-01-18
PL217173B1 PL217173B1 (pl) 2014-06-30

Family

ID=41479164

Family Applications (1)

Application Number Title Priority Date Filing Date
PL385656A PL217173B1 (pl) 2008-07-14 2008-07-14 Układ detekcyjny elektronów i skaningowy mikroskop elektronowy

Country Status (2)

Country Link
PL (1) PL217173B1 (pl)
WO (1) WO2010008307A2 (pl)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CZ307557B6 (cs) * 2010-10-07 2018-12-05 Tescan Orsay Holding, A.S. Scintilační detekční jednotka pro detekci zpětně odražených elektronů pro elektronové nebo iontové mikroskopy
KR102800266B1 (ko) 2019-01-08 2025-04-28 어플라이드 머티리얼즈 이스라엘 리미티드 주사 전자 현미경 및 오버레이 모니터링을 위한 방법
CN109884094B (zh) * 2019-04-09 2024-08-20 广东太微加速器有限公司 一种中子无损检测装置
CN116285985B (zh) * 2023-03-21 2024-04-19 浙江祺跃科技有限公司 一种二次电子探测器闪烁体及其制备方法和应用

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0275306B1 (en) * 1986-08-01 1990-10-24 Electro-Scan Corporation Multipurpose gaseous detector device for electron microscopes
CZ284288B6 (cs) * 1997-03-13 1998-10-14 Preciosa, A. S. Detekční systém rastrovacího elektronového mikroskopu
EP1068630B1 (de) * 1998-03-10 2005-07-20 Erik Essers Rasterelektronenmikroskop
US7462839B2 (en) * 2000-07-07 2008-12-09 Carl Zeiss Nts Gmbh Detector for variable pressure areas and an electron microscope comprising a corresponding detector
PL208151B1 (pl) * 2003-10-27 2011-03-31 Politechnika Wroclawska Układ do detekcji elektronów w skaningowym mikroskopie elektronowym

Also Published As

Publication number Publication date
WO2010008307A2 (en) 2010-01-21
WO2010008307A3 (en) 2010-08-19
PL217173B1 (pl) 2014-06-30

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