WO2010008307A3 - Electron detection unit and a scanning electron microscope - Google Patents

Electron detection unit and a scanning electron microscope Download PDF

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Publication number
WO2010008307A3
WO2010008307A3 PCT/PL2009/000073 PL2009000073W WO2010008307A3 WO 2010008307 A3 WO2010008307 A3 WO 2010008307A3 PL 2009000073 W PL2009000073 W PL 2009000073W WO 2010008307 A3 WO2010008307 A3 WO 2010008307A3
Authority
WO
WIPO (PCT)
Prior art keywords
aperture
intermediate chamber
electron microscope
scanning electron
electron
Prior art date
Application number
PCT/PL2009/000073
Other languages
French (fr)
Other versions
WO2010008307A2 (en
Inventor
Witold Slowko
Original Assignee
Politechnika Wroclawska
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Politechnika Wroclawska filed Critical Politechnika Wroclawska
Publication of WO2010008307A2 publication Critical patent/WO2010008307A2/en
Publication of WO2010008307A3 publication Critical patent/WO2010008307A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/18—Vacuum control means
    • H01J2237/188—Differential pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2602—Details
    • H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)

Abstract

The subject of the invention is a electron detector unit and a scanning electron microscope equipped with this unit, destined particularly for detection of low energy secondary electrons at the pressures range from values lower than 0.1 Pa to values exceeding 1000 Pa in the sample chamber. Electron detector unit, destined particularly for a scanning electron microscope with variable gas pressure P1 in the sample chamber contains the intermediate chamber (13 ) of a differential vacuum system where the differential pressure P2 is maintained. The intermediate chamber (13 ) is arranged under the objective lens ( 9 ) of the scanning electron microscope and sealed with a gasket ( 30 ). In a hole made in a side part of the intermediate chamber (13 ), a main light guide ( 11 ) in the form of a bar made of poly methyl methacrylate (PMMA) is fastened hermetically. Inside the intermediate chamber (13 ), a screening sleeve ( 4 ) in a shape of a cut cone is secured with use of insulating insertions. In the neighborhood of the lower hole of the screening tube ( 4 ), an anode ( 5 ) in the form of a metal ring covered with a thin layer of scintillator ( 5 ) a is arranged and electrically separated. In the lower part of the intermediate chamber ( 13 ) is a hole screened by a lower throttling aperture ( 5 ) of small diameter being sealed with an insulating interlay ( 29 ). The screening tube ( 4 ) and anode ( 5 ) and the lower throttling aperture (15 ) are placed coaxially with the electron optical axis EOA along which the electron beam EB passes. On the lower throttling aperture ( 15 ), a repelling aperture ( 31 ) made of metal foil well reflecting light is fastened with use of an insulating interlay ( 29 ). Diameter of the opening of the repelling aperture ( 31 ) is larger than that of the lower throttling aperture (15 ) and its symmetry axis is shifted aside the electron optical axis EOA toward the main light guide (11 ).
PCT/PL2009/000073 2008-07-14 2009-07-13 Electron detection unit and a scanning electron microscope WO2010008307A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PL385656 2008-07-14
PL385656A PL217173B1 (en) 2008-07-14 2008-07-14 System for detection of electrones and scanning electrone microscope

Publications (2)

Publication Number Publication Date
WO2010008307A2 WO2010008307A2 (en) 2010-01-21
WO2010008307A3 true WO2010008307A3 (en) 2010-08-19

Family

ID=41479164

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/PL2009/000073 WO2010008307A2 (en) 2008-07-14 2009-07-13 Electron detection unit and a scanning electron microscope

Country Status (2)

Country Link
PL (1) PL217173B1 (en)
WO (1) WO2010008307A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CZ307557B6 (en) 2010-10-07 2018-12-05 Tescan Orsay Holding, A.S. A scintillation detection unit for detecting backscattered electrons for electron or ion microscopes
JP7495939B2 (en) 2019-01-08 2024-06-05 アプライド マテリアルズ イスラエル リミテッド Scanning Electron Microscopy and Overlay Monitoring Methods
CN109884094B (en) * 2019-04-09 2024-08-20 广东太微加速器有限公司 Neutron nondestructive testing device
CN116285985B (en) * 2023-03-21 2024-04-19 浙江祺跃科技有限公司 Scintillator of secondary electron detector, preparation method and application thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4992662A (en) * 1986-08-01 1991-02-12 Electroscan Corporation Multipurpose gaseous detector device for electron microscope
WO1998040906A1 (en) * 1997-03-13 1998-09-17 Preciosa A.S. Scanning electron microscope detection system
US6590210B1 (en) * 1998-03-10 2003-07-08 Erik Essers Scanning electron microscope
WO2005041243A1 (en) * 2003-10-27 2005-05-06 Politechnika Wroclawska Electron detection system for a scanning electron microscope
US20050173644A1 (en) * 2000-07-07 2005-08-11 Peter Gnauck Detector for variable pressure areas and an electron microscope comprising a corresponding detector

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4992662A (en) * 1986-08-01 1991-02-12 Electroscan Corporation Multipurpose gaseous detector device for electron microscope
WO1998040906A1 (en) * 1997-03-13 1998-09-17 Preciosa A.S. Scanning electron microscope detection system
US6590210B1 (en) * 1998-03-10 2003-07-08 Erik Essers Scanning electron microscope
US20050173644A1 (en) * 2000-07-07 2005-08-11 Peter Gnauck Detector for variable pressure areas and an electron microscope comprising a corresponding detector
WO2005041243A1 (en) * 2003-10-27 2005-05-06 Politechnika Wroclawska Electron detection system for a scanning electron microscope

Also Published As

Publication number Publication date
PL217173B1 (en) 2014-06-30
PL385656A1 (en) 2010-01-18
WO2010008307A2 (en) 2010-01-21

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