WO2005041243A1 - Electron detection system for a scanning electron microscope - Google Patents
Electron detection system for a scanning electron microscope Download PDFInfo
- Publication number
- WO2005041243A1 WO2005041243A1 PCT/PL2004/000079 PL2004000079W WO2005041243A1 WO 2005041243 A1 WO2005041243 A1 WO 2005041243A1 PL 2004000079 W PL2004000079 W PL 2004000079W WO 2005041243 A1 WO2005041243 A1 WO 2005041243A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- detection system
- electron
- micro
- scintillators
- porous plate
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2443—Scintillation detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/24435—Microchannel plates
Definitions
- the subject of the invention is the electron detection system for a scanning electron microscope, destined particularly for the work at pressures of order 100 Pa in the sample chamber.
- nr P329339 entitled “Hig ⁇ h pressure scanning electron microscope”
- nr P359748 entitled “Secondary electron detector system for a scanning electron microscope”
- the stream of secondary electrons irrespectively of their emission directions, is bring in the hole in the lower wall of the intermediate chamber, which is biased with a proper voltage.
- the hole plays simultaneously the role of the lower throttling aperture, whch limits gas flow from the sample chamber to the intermediate chamber.
- Secondary electrons that came into the intermediate chamber impinge the input surface of the microporous plate, which is placed at the electron optical axis.
- the electrons passing across the microporous plate are multiplied, and at the output side they are attracted by the scintillator biased with a high voltage.
- the signal does depend substantially on the directions of the secondary electrons emission that are detected.
- the subject of the invention is the electron detection system for a scanning electron microscope equipped with the lower throttling aperture, the microporous plate with the screen pipe and scintillators connected with light pipes and photo- multipliers.
- the substance of the invention consists in the fact, that at least two scintillators are placed at the output side of the microporous plate. It is advantageous when each scintillator is positively biased against the output of the of the microporous plate with high voltage of the value over 1000 V. It is also advantageous when the screen pipe placed in the hole of the microporous plate is negatively biased against the lower throttling aperture.
- the main advantage of the electron detector system is the possibility of the directional detection of secondary electrons in order to obtain output signals that are dependent on a local azimuth and slope angle of the surface examined.
- the output signals may be processed to obtain three-dimensional reconstruction of the surface.
- the subject of the invention is shown in the Figure, which displays the secondary electron detector unit for a scanning electron microscope in the cross- section.
- the electron detection system for a scanning electron microscope is mounted in the head body (1), made of teflon.
- the lower throttling aperture (2) of the form of the metal plate with a small hole at the axis of the electron beam WE is placed.
- the micro-porous plate (3) is located above the lower throttling aperture (2).
- the micro-porous plate (3) has a hole at the axis of the electron beam WE, in which the screen pipe (4) is fastened by means of the teflon sealing.
- the screen pipe (4) is fastened by means of the teflon sealing.
- four scintillators (5) are disposed symmetrically around the electron beam WE axis. Scintillators (5) are connected with the light pipes (6) that lead to photomultipliers.
- the electron detection system for a scanning electron microscope arranged in the described way works as follow. Secondary electrons EW generated from the sample stage (7) are attracted by the lower throttling aperture (2) biased positively, and pass through the hole in the electrode.
- the stream of the secondary electrons EW encounter an electric retarding field created by the screen pipe (4) negatively biased with respect to the lower throttling aperture (2).
- a diverging electron lens arises and the flow of the secondary electrons EW from the sample stage (7) to the micro-porous plate (3) is laminar.
- the secondary electrons EW impinge the sector of the micro-porous plate (3) adequately to the direction of their emission.
- the secondary electrons EW pass through microscopic channels in the micro-porous plate (3) of the micro sphere kind supplied with a voltage of order lkV, and they are multiplied thanks to secondary emission from its walls.
- the multiplied stream of secondary electrons EW escapes the micro-porous plate (3) at the output side, where four scintillators (5) are disposed symmetrically around the axis of the electron beam WE.
- the scintillators (5) are positively biased with respect to the micro-porous plate (3) with a voltage about 12kV, thus they are trapping secondary electrons EW that escape adjacent sectors of the microporous plate (3) respectively.
- the electron signals is converted into light signals transmitted through the light pipes (6) to corresponding photo-multipliers where they are converted into output signals finally.
- Amplitudes of the signals in each of the four channels depend of the number of secondary electrons EW emitted toward the sector corresponding to a particular scintillator (5), then the detection system has directional properties. The properties may be disturbed by a scattering of the secondary electrons EW are scattered in collision with gas molecules that fill the sample chamber to a relatively high pressure Pi
- the gas pressure P 2 in the space between the micro-porous plate (3) and the lower throttling aperture (2) that constitutes the intermediate chamber is two orders of magnitude less and does not cause serious scattering of the secondary electrons EW.
- a distance of the sample stage (7) from the lower throttling aperture (2) should be comparable to a diameter of the lower ImOttling aperture (2).
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP04775185A EP1678734A1 (en) | 2003-10-27 | 2004-10-06 | Electron detection system for a scanning electron microscope |
US11/410,208 US7531812B2 (en) | 2003-10-27 | 2006-04-25 | Method and system for the directional detection of electrons in a scanning electron microscope |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PLP-363131 | 2003-10-27 | ||
PL363131A PL208151B1 (en) | 2003-10-27 | 2003-10-27 | System designed to detect electrons in scanning electron microscope |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/PL2004/000080 Continuation-In-Part WO2005071710A1 (en) | 2003-10-27 | 2004-10-06 | Method and system for the directional detection of electrons in a scanning electron microscope |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/410,208 Continuation-In-Part US7531812B2 (en) | 2003-10-27 | 2006-04-25 | Method and system for the directional detection of electrons in a scanning electron microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2005041243A1 true WO2005041243A1 (en) | 2005-05-06 |
Family
ID=34511363
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/PL2004/000079 WO2005041243A1 (en) | 2003-10-27 | 2004-10-06 | Electron detection system for a scanning electron microscope |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP1678734A1 (en) |
PL (1) | PL208151B1 (en) |
WO (1) | WO2005041243A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010008307A2 (en) * | 2008-07-14 | 2010-01-21 | Politechnika Wroclawska | Electron detection unit and a scanning electron microscope |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999046797A1 (en) * | 1998-03-10 | 1999-09-16 | Erik Essers | Scanning electron microscope |
US5990483A (en) * | 1997-10-06 | 1999-11-23 | El-Mul Technologies Ltd. | Particle detection and particle detector devices |
US20020125428A1 (en) * | 2000-12-22 | 2002-09-12 | Krans Jan Martijn | SEM provided with a secondary electron detector having a central electrode |
-
2003
- 2003-10-27 PL PL363131A patent/PL208151B1/en unknown
-
2004
- 2004-10-06 EP EP04775185A patent/EP1678734A1/en not_active Withdrawn
- 2004-10-06 WO PCT/PL2004/000079 patent/WO2005041243A1/en active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5990483A (en) * | 1997-10-06 | 1999-11-23 | El-Mul Technologies Ltd. | Particle detection and particle detector devices |
WO1999046797A1 (en) * | 1998-03-10 | 1999-09-16 | Erik Essers | Scanning electron microscope |
US20020125428A1 (en) * | 2000-12-22 | 2002-09-12 | Krans Jan Martijn | SEM provided with a secondary electron detector having a central electrode |
Non-Patent Citations (1)
Title |
---|
See also references of EP1678734A1 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010008307A2 (en) * | 2008-07-14 | 2010-01-21 | Politechnika Wroclawska | Electron detection unit and a scanning electron microscope |
WO2010008307A3 (en) * | 2008-07-14 | 2010-08-19 | Politechnika Wroclawska | Electron detection unit and a scanning electron microscope |
Also Published As
Publication number | Publication date |
---|---|
EP1678734A1 (en) | 2006-07-12 |
PL208151B1 (en) | 2011-03-31 |
PL363131A1 (en) | 2005-05-02 |
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