CN220650523U - Scanning electron microscope detector - Google Patents
Scanning electron microscope detector Download PDFInfo
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- CN220650523U CN220650523U CN202321556005.3U CN202321556005U CN220650523U CN 220650523 U CN220650523 U CN 220650523U CN 202321556005 U CN202321556005 U CN 202321556005U CN 220650523 U CN220650523 U CN 220650523U
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- 238000003199 nucleic acid amplification method Methods 0.000 claims abstract description 5
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- 238000001514 detection method Methods 0.000 claims description 10
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 238000009434 installation Methods 0.000 claims description 4
- 238000013316 zoning Methods 0.000 claims description 3
- 238000005192 partition Methods 0.000 abstract description 2
- 238000003672 processing method Methods 0.000 abstract description 2
- 239000002344 surface layer Substances 0.000 abstract description 2
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- 238000010586 diagram Methods 0.000 description 18
- 239000000835 fiber Substances 0.000 description 16
- 238000010894 electron beam technology Methods 0.000 description 5
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
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- 229910052751 metal Inorganic materials 0.000 description 1
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- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 238000000399 optical microscopy Methods 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
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Abstract
The utility model discloses a scanning electron microscope detector, which comprises: the scintillator with a central hole and the surface layer of the scintillator are plated with conductive films, meanwhile, the other surface of the scintillator is connected with an optical fiber bundle conduction device through optical cement, the optical fiber bundle conduction device comprises a plurality of optical fibers, each optical fiber in the optical fiber bundle conducts optical signals generated by the scintillator at the corresponding position to the optical fiber bundle into a signal collecting and processing system along the optical fibers, and the signal collecting and processing system carries out partition processing, photoelectric conversion, amplification and mathematical operation on the signals. The application of the detector can realize the regional signal collection effect of the surface of the detector, and the information of the reaction sample is richer through different signal processing methods; the detector can be multifunctional without changing hardware.
Description
Technical Field
The utility model belongs to the technical field of electron microscopes, and particularly relates to an electron microscope detector.
Background
Scanning electron microscopy (Scanning Electron Microscope, SEM) is a high resolution imaging instrument that, unlike optical microscopy, images by receiving light reflected or projected on a sample, typically irradiates the sample with an extremely fine electron beam focused to a diameter on the order of nanometers, the irradiated sample being excited to produce a variety of signals, including: secondary electrons, backscattered electrons, characteristic X-rays, cathode fluorescence (CL), etc. Different types of signals need to be received by the corresponding detectors to form different characterization images.
Of these signals, secondary electrons and backscattered electrons are the most commonly used two signals, and electron-receiving detectors typically include semiconductor detectors and scintillator detectors, wherein the semiconductor detectors are inexpensive, small in size, convenient to install, but long in response time and low in sensitivity; compared with the scintillator detector, the scintillator detector has high price, large volume, fast response time and high sensitivity. In practical applications of the detector, in order to detect more abundant signals, some semiconductor detectors are divided into several different detection areas to detect electronic signals respectively, and then the detected signals are processed to reflect more sample information. However, for the scintillator detector, since the prior art uses a light pipe to collect all the light signals generated by the electrons impinging on the scintillator, the electrons cannot be detected separately in several different areas like the semiconductor detector, and more sample information cannot be reflected, so that the use of the scintillator detector is limited, and the present utility model has been proposed to solve the problem.
Disclosure of Invention
A scanning electron microscope detector, comprising: conductive films, scintillators, fiber bundle conduction devices, and signal collection and processing systems.
The scintillator is provided with a central hole, and the surface of the scintillator is plated with a conductive film.
The optical fiber bundle conduction device comprises a plurality of optical fibers, one end of each optical fiber bundle is connected with the scintillator through optical cement, and the other end of each optical fiber bundle is connected with the signal collecting and processing system.
The signal collecting and processing system performs zoning processing, photoelectric conversion, amplification and mathematical operation on signals transmitted by the optical fiber bundle.
One feature is that: the N optical fiber bundles in the optical fiber bundle conduction device can be equally divided into X parts (X is an integer larger than or equal to 2) according to the space position, a typical X value is X=4, the optical fiber bundle is divided into four areas A, B, C and D, each area consists of N/4 optical fibers, N/4 optical fiber signals of each area are added at a signal collecting and processing system to form an integral signal, and four areas form four signals S A ，S B ，S C And S is D 。
Another feature is that: x=2, the optical fiber bundle is divided into a, B left and right or upper and lower areas, each area is composed of N/2 optical fibers, N/2 optical fiber signals of each area are added at the signal collecting and processing system to form an integral signal, and two areas form two signals S A ，S B 。
One feature is that: x=2, the optical fiber bundle is divided into two areas of outer ring O and inner ring I, wherein the outer ring consists of M optical fibers, the inner ring consists of N-M optical fibers, the optical fiber signals of each area are respectively added at the signal collecting and processing system to form an integral signal, and the two areas form two signals S O ，S I 。
The N optical fibers are equally divided into X parts in space positions, the spatial structure is rotated by an angle theta through changing the combination of the optical fibers, and the range of the angle theta is as follows: theta is more than 0 DEG and less than or equal to 360 DEG/X.
The detector is coaxially installed with the electron optical lens cone, wherein one typical installation position is as follows: the detector is positioned above the sample and below the objective lens, the lower surface of the detector is higher than the lower surface of the pole shoe of the objective lens, and the typical range of the distance d is as follows: d is more than or equal to 0 and less than or equal to 5mm.
The detector is coaxially installed with the electron optical lens cone, and another typical installation position is as follows: the detector is positioned above the objective lens and below the converging lens; the detector detects electrons moving upwards after the signal electrons pass through the central hole of the detector below.
Drawings
FIG. 1 is a schematic diagram of a detector according to the present utility model;
FIG. 2 is a schematic cross-sectional view of a fiber optic bundle conducting device according to the present utility model;
FIG. 3 is a schematic diagram of the detector of the present utility model for receiving, converting and conducting signal electrons;
FIG. 4 is a schematic diagram showing that the optical signals of the present utility model are independent in N optical fibers to form N independent signals;
FIG. 5 is a schematic diagram of the detector of the present utility model receiving signal electrons generated from a surface irregularities;
FIG. 6 is a schematic diagram of the 4-zone detection of a fiber bundle by the detector of the present utility model;
FIG. 7 is a schematic diagram of the 2-zone detection of an optical fiber bundle by the detector of the present utility model;
FIG. 8 is a schematic diagram showing the spatial position rotated by an angle when the detector of the present utility model performs 4-zone detection on the optical fiber bundle;
FIG. 9 is a schematic diagram showing the spatial position rotated by an angle when the detector of the present utility model detects the optical fiber bundle in 2 partitions;
FIG. 10 is a schematic diagram of the outer and inner ring 2 zone detection of an optical fiber by the detector of the present utility model;
FIG. 11 is a schematic view showing the mounting of the detector of the present utility model in an electron optical column;
fig. 12 shows a detection method of the scanning electron microscope detector provided by the utility model.
It should be noted that these drawings and the written description are not intended to limit the scope of the inventive concept in any way, but to illustrate the inventive concept to those skilled in the art by referring to the specific embodiments.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present utility model more apparent, the technical solutions in the present utility model will be clearly and completely described below with reference to the accompanying drawings, which are used to illustrate the present utility model, but are not intended to limit the scope of the present utility model.
Referring to fig. 1, a schematic diagram of a scanning electron microscope detector according to the present utility model is shown, wherein 101 is a conductive film on a scintillator surface, and a material of the conductive film may be metal, for example, aluminum, and a material of the conductive film may be non-metal, for example, a carbon film; the scanning electron microscope detector further comprises 102 a scintillator, the scintillator 102 being a scintillator having a central aperture, the central aperture being coincident with the aperture 106 in the upper part of the detector, the central apertures 105 and 106 allowing the passage of the main electron beam; the scanning electron microscope detector further comprises an optical fiber bundle conduction device 103, wherein the optical fiber bundle conduction device 103 is composed of a cluster of very fine optical fibers, one end of all the optical fibers in the optical fiber bundle conduction device is connected with the upper surface of the scintillator 102 through optical cement, and the other end of all the optical fibers in the optical fiber bundle conduction device is connected with the signal collecting and processing system 104. FIG. 2 is a schematic cross-sectional view of the fiber optic bundle conducting device; the scanning electron microscope detector further comprises a signal collecting and processing system 104, the signal collecting and processing system 104 collects and processes the optical signals transmitted by the optical fiber bundle conducting device, and the collecting and processing of the signals can comprise processing methods such as partitioning, photoelectric conversion, amplification, mathematical operation and the like of the optical signals.
Fig. 3 is a schematic diagram of a scanning electron microscope detector according to the present utility model for receiving, converting and transmitting signal electrons emitted from a sample. The principle of the detector provided by the utility model for detecting signal electrons impinging on different positions of the detector is explained in detail by tracking signal electrons having two different trajectories 203a and 203b, as the main electron beam 20 passes through the hole 106 above the detector and then passes through the detector and then impinges on the sample 202 while exciting signal electrons. As shown in fig. 3, the signal electrons moving along different paths 203a and 203b bombard the lower surface of the scintillator detector at different positions, one being located at the edge of the detector and the other being located near the center of the detector, and after passing through the conductive film 101 under the scintillator, the signal electrons interact with the scintillator 102 to excite light signals, and the excited light signals enter the optical fibers 103a and 103b closest to the excitation position, respectively, and are conducted to the signal collecting and processing system 104 along the optical fibers 103a and 103b, respectively. Other signal electrons will also move along different trajectories to irradiate different positions of the scintillator, and the optical signals formed at the different positions are then conducted by the optical fibers at the positions into the signal collecting and processing system 104, as shown in fig. 4, assuming that the optical fiber bundle conducting device of the electron microscope detector of the present utility model has N optical fibers: optical fibers 1,2,3, … …, N, then each optical fiber receives an optical signal, and there are N signals: signals 1,2,3, … …, N. The N signals are respectively conducted into the signal collecting and processing system by the N optical fibers.
As shown in fig. 5, the detector provided by the present utility model is used to detect a surface irregular sample 202, and the detector is equally divided into four parts by using a dotted line, 501, 502, 503 and 504, and because the surface of the sample is irregular, signal electrons generated by the sample cannot uniformly irradiate the detector, and the non-uniformity of the distribution of the electrons can be displayed by the signal intensity in the N optical fibers, whereas in the prior art, optical signals generated at different positions of the scintillator are transmitted together by a light pipe to a detection device (such as a photomultiplier) to form an added total signal, and the signal intensity received at different positions of the detector cannot be reflected, so that the sample morphology information associated with the signal intensity cannot be reflected.
In order to implement the zonal analysis of the four zone signals shown in fig. 5, as shown in fig. 6, in this embodiment, the signal collecting and processing system equally divides the N fibers in the fiber bundle conducting device into four groups according to spatial positions, and each group of N/4 fibers is respectively referred to as a zone 601 (fiber numbers 1 to N/4), B zone 602 (fiber numbers N/4+1 to N/2), C zone 603 (fiber numbers N/2+1 to 3N/4) and D zone 604 (fiber numbers 3N/4+1 to N); n/4 optical fiber signals in the same area are added at the signal collecting and processing system end to form a total signal, and four areas respectively form four signals S A ，S B ，S C And S is D 。
Referring to fig. 7, in another characteristic embodiment of the present utility model, the signal collecting and processing system equally divides the N fibers in the optical fiber bundle conducting device into two groups, each group of N/2 fibers is referred to as 701A area (fiber number 1 to N/2), 702B area (fiber number N/2+1 to N); n/2 optical fiber signals in the same area are added at the signal collecting and processing system end to form a total signal, and two areas respectively form two signals S A ，S B 。
A more general feature embodiment of the utility model can be described as: the N optical fiber bundles in the optical fiber bundle conduction device can be equally divided into X parts (X is an integer larger than or equal to 2) according to the space positions, at the moment, the optical fiber bundles are divided into X areas, each area consists of N/X optical fibers, N/X optical fiber signals of each area are summed at a signal collecting and processing system to form an integral signal, and the X areas form X signals.
As shown in fig. 8, another characteristic embodiment of the present utility model is shown, and based on the embodiment shown in fig. 6, the rotation function of four regions in space position is realized by changing the combination mode of the optical fibers, 801 is a schematic diagram of the combination mode of the optical fibers before rotation, 802 is a schematic diagram of changing the combination mode of the optical fibers to complete the pattern rotation θ,803 is a schematic diagram of changing the combination mode of the optical fibers to complete the pattern rotation 45 °.
As shown in fig. 9, another characteristic embodiment of the present utility model is shown, and based on the embodiment shown in fig. 7, the rotation function of two regions in space position is realized by changing the combination mode of the optical fibers, 801 is a schematic diagram of the combination mode of the optical fibers before rotation, 802 is a schematic diagram of changing the combination mode of the optical fibers to complete the pattern rotation θ,803 is a schematic diagram of changing the combination mode of the optical fibers to complete the pattern rotation 90 °.
More generally, N optical fibers are equally divided into X parts at spatial positions, and the spatial structure is rotated by an angle θ by changing the combination of the optical fibers, where the range of the angle θ is: theta is more than 0 DEG and less than or equal to 360 DEG/X.
It should be noted that the semiconductor detector in the prior art may be spatially divided into different regions, but such a region is fixed, and cannot be rotated by an angle.
As shown in fig. 10, in another characteristic embodiment of the present utility model, the signal collecting and processing system equally divides the N optical fibers in the optical fiber bundle conducting device into two groups: one group is an outer ring optical fiber 1001, and M groups are all; the other group is an inner ring fiber 1002, N-M in total. The M optical fiber signals of the outer ring are added at the signal collecting and processing system end to form a total signal S O The N-M optical fiber signals of the inner ring are added at the signal collecting and processing system end to form a total signal S I 。
As shown in fig. 11, which is a schematic SEM diagram of an electron microscope detector according to the present utility model, two proposed detectors according to the present utility model are shown, wherein the central axes of the detectors are coincident with the central axis of the electron optical column, and the first detector 1105 is located above the sample 202 and below the objective lens 1104 as shown in fig. 11, wherein one typical feature is that: the detector lower surface 30 is higher than the objective pole piece lower surface 31, a typical range of distances d, d being: d is more than or equal to 0 and less than or equal to 5mm. The second detector 1106 is located above the objective lens 1104 and below the converging lens 1103. As shown in fig. 11, 1101 is an optical barrel of an electron microscope, a main electron beam 20 is emitted from a gun tip 1102, is primarily converged by a converging lens 1103, passes through a central hole of a first detector 1106, is then converged by an objective lens 1104, and passes through the central hole of the first detector 1105 to irradiate a sample. The signal electrons generated by the excitation of the sample by the electron beam are divided into two parts 21 and 22, the signal electrons 21 cannot pass through the central hole of the first detector 1105 and are detected by the first detector, and the signal electrons 22 can pass through the central hole of the first detector and continue to move upwards and are detected by the second detector.
The utility model also provides a detection method of the scanning electron microscope detector, as shown in fig. 12, the method comprises the following steps:
step S1: the signal electrons are emitted from the sample and reach different positions of the detector along different tracks;
step S2: electrons pass through the conductive film on the surface layer of the scintillator to interact with the scintillator to generate light emission;
step S3: the radiated light enters the optical fiber of the optical fiber conduction device at the corresponding position;
step S4: light entering the optical fiber of the optical fiber conduction device is conducted along the optical fiber and finally collected by the signal collection and processing system;
step S5: the signal collecting and processing system performs zoning, photoelectric conversion, amplification and arithmetic operation processing on the signals in the optical fiber;
in step S5, the signals in the optical fiber are partitioned, and one feature is that: the N optical fiber bundles in the optical fiber bundle conduction device can be equally divided into X parts (X is an integer larger than or equal to 2) according to the space position, and the optional X=4, wherein the optical fiber bundles are divided into four areas A, B, C and D, each area consists of N/4 optical fibers, N/4 optical fiber signals of each area are added at a signal collecting and processing system to form an integral signal, and the four areas form four signals S A ，S B ，S C And S is D 。
In step S5, the signals in the optical fiber are partitioned, and one feature is that: the N optical fiber bundles in the optical fiber bundle conduction device can be equally divided into X parts (X is an integer larger than or equal to 2) according to the space position, and the optional X=2, wherein the optical fiber bundles are divided into a left area, a right area, an upper area and a lower area, each area is composed of N/2 optical fibers, N/2 optical fiber signals of each area are added at a signal collecting and processing system to form an integral signal, and the two areas form two signals S A ，S B 。
The signal in the optical fiber is partitioned, and one of the characteristics is that: the N optical fiber bundles in the optical fiber bundle conduction device can be equally divided into X parts (X is an integer larger than or equal to 2) according to the space position, and the optional X=2, at the moment, the optical fiber bundles are divided into an outer ring O and an inner ring I, wherein the outer ring consists of M optical fibers, the inner ring consists of N-M optical fibers, and optical fiber signals of each area are respectively collected and transmitted in the signalThe processing system sums to form an integral signal, and the two areas form two signals S O ，S I 。
In step S5, the signals in the optical fiber are partitioned, and one feature is that: n optical fiber bundles in the optical fiber bundle conduction device can be equally divided into X parts (X is an integer larger than or equal to 2) according to the space positions, the space structure is rotated by an angle theta through changing the combination of optical fibers, and the range of the angle theta is as follows: theta is more than 0 DEG and less than or equal to 360 DEG/X.
The foregoing description is only illustrative of the preferred embodiments of the present utility model, and the present utility model has been described in detail with reference to the preferred embodiments, but is not limited to the same, and any modifications, equivalent changes and variations can be made by those skilled in the art without departing from the scope of the present utility model, as long as they do not depart from the scope of the present utility model.
Claims (10)
1. A scanning electron microscope detector, comprising: the device comprises a conductive film, a scintillator, an optical fiber bundle conduction device and a signal collection and processing system;
the conductive film, the scintillator, the optical fiber bundle conduction device and the signal collection and processing system are sequentially arranged according to the propagation path of the detection signal, after the signal electrons generated on the observed sample of the electron microscope pass through the conductive film, the light signals are excited on the scintillator, the light signals excited at different positions on the scintillator enter different optical fiber bundles, and then the light signals are transmitted to the signal collection and processing system along the optical fiber bundle conduction device, so that the detection signal is finally formed.
2. The scanning electron microscope detector of claim 1 wherein: the surface of the scintillator is plated with a conductive film, and the scintillator and the conductive film are provided with a central hole.
3. The scanning electron microscope detector of claim 1 wherein: the optical fiber bundle conduction device comprises a plurality of optical fiber bundles, one end of each optical fiber bundle is connected with the scintillator through optical cement, and the other end of each optical fiber bundle is connected with the signal collecting and processing system.
4. The scanning electron microscope detector of claim 1 wherein: the signal collecting and processing system performs zoning processing, photoelectric conversion, amplification and mathematical operation on signals transmitted by the optical fiber bundle.
5. The scanning electron microscope detector of claim 4 wherein: the N optical fiber bundles in the optical fiber bundle conduction device can be equally divided into X parts according to the space position, X is an integer greater than or equal to 2, a typical X value is X=4, the optical fiber bundle is divided into four areas A, B, C and D, each area consists of N/4 optical fibers, N/4 optical fiber signals of each area are added at a signal collecting and processing system to form an integral signal, and four areas form four signals S A ，S B ，S C And S is D 。
6. The scanning electron microscope detector of claim 5 wherein: x=2, the optical fiber bundle is divided into a, B left and right or upper and lower areas, each area is composed of N/2 optical fibers, N/2 optical fiber signals of each area are added at the signal collecting and processing system to form an integral signal, and two areas form two signals S A ，S B 。
7. The scanning electron microscope detector of claim 5 wherein: x=2, the optical fiber bundle is divided into two areas of outer ring O and inner ring I, wherein the outer ring consists of M optical fibers, the inner ring consists of N-M optical fibers, the optical fiber signals of each area are respectively added at the signal collecting and processing system to form an integral signal, and the two areas form two signals S O ，S I 。
8. The scanning electron microscope detector of claim 5 wherein: the N optical fibers are equally divided into X parts in space positions, the spatial structure is rotated by an angle theta through changing the combination of the optical fibers, and the range of the angle theta is as follows: theta is more than 0 DEG and less than or equal to 360 DEG/X.
9. The scanning electron microscope detector of claim 1 wherein: the detector is coaxially installed with the electron optical lens cone, wherein one typical installation position is as follows: the detector is positioned above the sample and below the objective lens, the lower surface of the detector is higher than the lower surface of the pole shoe of the objective lens, and the typical range of the distance d is as follows: d is more than or equal to 0 and less than or equal to 5mm.
10. The scanning electron microscope detector of claim 1 wherein: the detector is coaxially installed with the electron optical lens cone, and another typical installation position is as follows: the detector is positioned above the objective lens and below the converging lens; the detector detects electrons moving upwards after the signal electrons pass through the central hole of the detector below.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321556005.3U CN220650523U (en) | 2023-06-19 | 2023-06-19 | Scanning electron microscope detector |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321556005.3U CN220650523U (en) | 2023-06-19 | 2023-06-19 | Scanning electron microscope detector |
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| CN220650523U true CN220650523U (en) | 2024-03-22 |
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| CN202321556005.3U Active CN220650523U (en) | 2023-06-19 | 2023-06-19 | Scanning electron microscope detector |
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