PL375436A1 - Układ kontroli przepływu - Google Patents

Układ kontroli przepływu

Info

Publication number
PL375436A1
PL375436A1 PL37543603A PL37543603A PL375436A1 PL 375436 A1 PL375436 A1 PL 375436A1 PL 37543603 A PL37543603 A PL 37543603A PL 37543603 A PL37543603 A PL 37543603A PL 375436 A1 PL375436 A1 PL 375436A1
Authority
PL
Poland
Prior art keywords
control system
flow control
flow
control
Prior art date
Application number
PL37543603A
Other languages
English (en)
Other versions
PL206360B1 (pl
Inventor
Matthew G. Wheeler
Original Assignee
Emerson Electric Co.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Emerson Electric Co. filed Critical Emerson Electric Co.
Publication of PL375436A1 publication Critical patent/PL375436A1/pl
Publication of PL206360B1 publication Critical patent/PL206360B1/pl

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0676—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on flow sources
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
    • Y10T137/218—Means to regulate or vary operation of device

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Reciprocating Pumps (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Flow Control (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Catching Or Destruction (AREA)
PL375436A 2002-09-30 2003-09-10 Układ kontroli przepływu PL206360B1 (pl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/065,275 US7204679B2 (en) 2002-09-30 2002-09-30 Flow control system

Publications (2)

Publication Number Publication Date
PL375436A1 true PL375436A1 (pl) 2005-11-28
PL206360B1 PL206360B1 (pl) 2010-07-30

Family

ID=32028515

Family Applications (3)

Application Number Title Priority Date Filing Date
PL388178A PL206362B1 (pl) 2002-09-30 2003-09-10 Układ kontroli przepływu
PL388177A PL206361B1 (pl) 2002-09-30 2003-09-10 Sposób kontrolowania przepływu płynu, zwłaszcza zawiesiny proszka ściernego
PL375436A PL206360B1 (pl) 2002-09-30 2003-09-10 Układ kontroli przepływu

Family Applications Before (2)

Application Number Title Priority Date Filing Date
PL388178A PL206362B1 (pl) 2002-09-30 2003-09-10 Układ kontroli przepływu
PL388177A PL206361B1 (pl) 2002-09-30 2003-09-10 Sposób kontrolowania przepływu płynu, zwłaszcza zawiesiny proszka ściernego

Country Status (17)

Country Link
US (1) US7204679B2 (pl)
EP (4) EP1545835B1 (pl)
JP (1) JP4372010B2 (pl)
KR (1) KR100649468B1 (pl)
CN (2) CN100528485C (pl)
AR (2) AR041382A1 (pl)
AT (1) ATE485919T1 (pl)
AU (1) AU2003266022B2 (pl)
BR (1) BR0314955A (pl)
CA (1) CA2500543C (pl)
DE (1) DE60334712D1 (pl)
DK (2) DK1545835T3 (pl)
MX (1) MXPA05003444A (pl)
MY (1) MY135346A (pl)
PL (3) PL206362B1 (pl)
RU (1) RU2313004C2 (pl)
WO (1) WO2004030860A2 (pl)

Families Citing this family (21)

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AU2005325631A1 (en) * 2005-01-18 2006-07-27 Zhengcai Zhou Blasting device for premixed abrasive slurry
US7735563B2 (en) * 2005-03-10 2010-06-15 Hydril Usa Manufacturing Llc Pressure driven pumping system
JP2008539146A (ja) * 2005-04-25 2008-11-13 アドバンスド テクノロジー マテリアルズ，インコーポレイテッド 化学試薬及び組成を保存・分配する装置及びプロセス
KR100806841B1 (ko) * 2006-09-11 2008-02-22 세메스 주식회사 슬러리 공급장치에서의 버블 댐퍼
TW200916183A (en) * 2007-05-09 2009-04-16 Advanced Tech Materials Systems and methods for material blending and distribution
KR20100113074A (ko) * 2007-12-06 2010-10-20 포어사이트 프로세싱 엘엘씨 유체 함유 공정 재료 화합물의 전달 방법 및 시스템
US20100243087A1 (en) * 2009-03-03 2010-09-30 Millipore Corporation System and pump apparatus for processing fluid samples
KR20120036953A (ko) * 2009-06-10 2012-04-18 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 유체 가공 시스템 및 방법
US8308854B2 (en) * 2009-12-15 2012-11-13 Thermo Finnigan Llc Helium reclamation systems and methods for a gas chromatograph
RU2459978C1 (ru) * 2011-07-26 2012-08-27 Общество с ограниченной ответственностью "Купер" Насосная установка регулируемая, диафрагменная
KR20130090209A (ko) * 2012-02-03 2013-08-13 삼성전자주식회사 기판처리장치 및 기판처리방법
AU2014236334B2 (en) * 2013-03-14 2018-04-05 Bio-Rad Laboratories, Inc. Bottle pressurization delivery system
US9770804B2 (en) 2013-03-18 2017-09-26 Versum Materials Us, Llc Slurry supply and/or chemical blend supply apparatuses, processes, methods of use and methods of manufacture
US9695674B2 (en) * 2014-04-04 2017-07-04 Onesubsea Ip Uk Limited Subsea dosing pump
WO2015172081A1 (en) * 2014-05-08 2015-11-12 Baker Hughes Incorporated Oil injection unit
JP6622578B2 (ja) * 2015-12-08 2019-12-18 不二越機械工業株式会社 ワーク加工装置およびこれに用いる薬液収納バッグ
CN107096901A (zh) * 2017-05-02 2017-08-29 重庆天运汽车配件有限公司 一种离心浇铸均匀进液装置
US11251047B2 (en) 2017-11-13 2022-02-15 Applied Materials, Inc. Clog detection in a multi-port fluid delivery system
JP7194996B2 (ja) * 2019-03-13 2022-12-23 株式会社松井製作所 流体研磨装置
JP7407439B2 (ja) * 2019-10-24 2024-01-04 兵神装備株式会社 流体圧送装置
TWI742924B (zh) * 2020-11-13 2021-10-11 國立勤益科技大學 自動擠膏拋光刀把

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FR945469A (fr) 1946-03-22 1949-05-05 Passch & Larsen Petersen Procédé pour prélever une quantité déterminée de beurre ou autre matière plastique aspirées dans une cuve et appareil pour la mise en oeuvre de ce procédé
SU97285A1 (ru) 1952-09-26 1953-11-30 В.В. Залесский Насос дл перекачки жидкостей с плохими смазывающими свойствами
SU125162A1 (ru) 1959-06-15 1959-11-30 В.М. Данич Устройство дл подачи абразивных паст в рабочую зону полировального станка
US3635607A (en) 1970-04-20 1972-01-18 Novelty Tool Co Inc Vacuum pump
US3756456A (en) 1972-05-22 1973-09-04 Graco Inc Apparatus and method for a metering system
SU591609A1 (ru) 1976-04-26 1978-02-05 Московское Научно-Производственное Объединение По Механизированному Строительному Инструменту И Отделочным Машинам (Объединение "Вниисми") Поршневой растворонасос
SU723215A2 (ru) 1978-04-04 1980-03-25 Предприятие П/Я В-8662 Гидро - или пневмоприводной насос
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US4863066A (en) 1986-06-02 1989-09-05 Technicon Instruments Corporation System for dispensing precisely metered quantities of a fluid and method of utilizing the system
FR2608225B1 (fr) 1986-12-10 1989-02-17 Imaje Sa Cellule a multiples fonctions comportant une chambre a volume variable, et circuit d'alimentation fluide d'une tete d'impression a jet d'encre qui en est equipe
US4950134A (en) * 1988-12-27 1990-08-21 Cybor Corporation Precision liquid dispenser
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US5753515A (en) 1996-07-02 1998-05-19 Eastman Kodak Company Syringe pump apparatus for remote delivery of reactants
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US6107203A (en) * 1997-11-03 2000-08-22 Motorola, Inc. Chemical mechanical polishing system and method therefor
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US6254453B1 (en) * 1999-09-30 2001-07-03 International Business Machines Corporation Optimization of chemical mechanical process by detection of oxide/nitride interface using CLD system
US6544109B1 (en) * 2000-08-31 2003-04-08 Micron Technology, Inc. Slurry delivery and planarization systems

Also Published As

Publication number Publication date
AU2003266022B2 (en) 2007-09-06
BR0314955A (pt) 2005-08-02
EP1545835B1 (en) 2010-10-27
JP4372010B2 (ja) 2009-11-25
CN1729082A (zh) 2006-02-01
EP2343156A2 (en) 2011-07-13
CN101491889B (zh) 2011-03-23
DK1545835T3 (da) 2011-01-31
HK1129628A1 (en) 2009-12-04
DK2343156T3 (en) 2015-04-20
RU2313004C2 (ru) 2007-12-20
CA2500543C (en) 2009-03-24
WO2004030860A2 (en) 2004-04-15
PL206361B1 (pl) 2010-07-30
EP2347858A3 (en) 2012-05-02
AR041382A1 (es) 2005-05-18
MY135346A (en) 2008-03-31
EP1545835A2 (en) 2005-06-29
DE60334712D1 (de) 2010-12-09
EP2347858A2 (en) 2011-07-27
EP2108482A1 (en) 2009-10-14
WO2004030860A3 (en) 2004-09-30
EP2343156A3 (en) 2012-05-02
MXPA05003444A (es) 2005-07-05
KR100649468B1 (ko) 2006-11-28
US20040060607A1 (en) 2004-04-01
KR20050055737A (ko) 2005-06-13
US7204679B2 (en) 2007-04-17
AR071409A2 (es) 2010-06-16
HK1086523A1 (zh) 2006-09-22
PL206360B1 (pl) 2010-07-30
EP2343156B1 (en) 2015-01-28
CN101491889A (zh) 2009-07-29
JP2006501075A (ja) 2006-01-12
ATE485919T1 (de) 2010-11-15
AU2003266022A1 (en) 2004-04-23
CN100528485C (zh) 2009-08-19
RU2005113299A (ru) 2005-09-20
CA2500543A1 (en) 2004-04-15
PL206362B1 (pl) 2010-07-30

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