PL2769002T3 - Rurowy target - Google Patents

Rurowy target

Info

Publication number
PL2769002T3
PL2769002T3 PL12795724T PL12795724T PL2769002T3 PL 2769002 T3 PL2769002 T3 PL 2769002T3 PL 12795724 T PL12795724 T PL 12795724T PL 12795724 T PL12795724 T PL 12795724T PL 2769002 T3 PL2769002 T3 PL 2769002T3
Authority
PL
Poland
Prior art keywords
tubular target
tubular
target
Prior art date
Application number
PL12795724T
Other languages
English (en)
Inventor
Peter Abenthung
Christian Linke
André Dronhofer
Hartmut Wolf
Tobias Will
Wolfgang Köck
Original Assignee
Plansee Se
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plansee Se filed Critical Plansee Se
Publication of PL2769002T3 publication Critical patent/PL2769002T3/pl

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/342—Hollow targets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3423—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3426—Material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3488—Constructional details of particle beam apparatus not otherwise provided for, e.g. arrangement, mounting, housing, environment; special provisions for cleaning or maintenance of the apparatus
    • H01J37/3491—Manufacturing of targets

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Powder Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
PL12795724T 2011-10-18 2012-10-17 Rurowy target PL2769002T3 (pl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
ATGM562/2011U AT12292U3 (de) 2011-10-18 2011-10-18 Rohrtarget
PCT/AT2012/000262 WO2013056286A1 (de) 2011-10-18 2012-10-17 Rohrtarget
EP12795724.9A EP2769002B1 (de) 2011-10-18 2012-10-17 Rohrtarget

Publications (1)

Publication Number Publication Date
PL2769002T3 true PL2769002T3 (pl) 2016-03-31

Family

ID=45463107

Family Applications (1)

Application Number Title Priority Date Filing Date
PL12795724T PL2769002T3 (pl) 2011-10-18 2012-10-17 Rurowy target

Country Status (10)

Country Link
US (1) US20140238850A1 (pl)
EP (1) EP2769002B1 (pl)
JP (1) JP2015501376A (pl)
KR (1) KR20140091677A (pl)
CN (1) CN104040019B (pl)
AT (1) AT12292U3 (pl)
ES (1) ES2555876T3 (pl)
PL (1) PL2769002T3 (pl)
TW (1) TWI550115B (pl)
WO (1) WO2013056286A1 (pl)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT14912U1 (de) * 2015-05-06 2016-08-15 Plansee Se Anschlussstück für Rohrtarget
AU2020429466A1 (en) * 2020-01-31 2022-08-11 Massachusetts Institute Of Technology Molybdenum-containing alloys and associated systems and methods

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE68924095T2 (de) * 1988-05-16 1996-04-04 Tosoh Corp Verfahren zur Herstellung eines Sputtertargets zur Erzeugung einer elektrisch leitenden, durchsichtigen Schicht.
WO1992002659A1 (en) * 1990-08-10 1992-02-20 Viratec Thin Films, Inc. Shielding for arc suppression in rotating magnetron sputtering systems
BE1007067A3 (nl) 1992-07-15 1995-03-07 Emiel Vanderstraeten Besloten Sputterkathode en werkwijze voor het vervaardigen van deze kathode.
JPH06172991A (ja) * 1992-11-30 1994-06-21 Mitsui Mining & Smelting Co Ltd マグネトロンスパッタリング用セラミックスターゲット
JP3863204B2 (ja) * 1995-08-25 2006-12-27 株式会社アライドマテリアル スパッタリングターゲット材及びその製造方法
JP2002302762A (ja) * 2001-04-04 2002-10-18 Tosoh Corp Ｉｔｏスパッタリングターゲット
JP4014982B2 (ja) * 2002-09-19 2007-11-28 株式会社神戸製鋼所 アーク蒸発源用のロッドターゲット、その製造方法及びアーク蒸着装置
WO2005073418A1 (ja) * 2004-01-30 2005-08-11 Nippon Tungsten Co., Ltd. タングステン系焼結体およびその製造方法
US20050279630A1 (en) * 2004-06-16 2005-12-22 Dynamic Machine Works, Inc. Tubular sputtering targets and methods of flowforming the same
EP1787311A1 (en) * 2004-07-16 2007-05-23 Bekaert Advanced Coatings Cylindrical target obtained by hot isostatic pressing
AT8697U1 (de) * 2005-10-14 2006-11-15 Plansee Se Rohrtarget
WO2007049761A1 (ja) * 2005-10-27 2007-05-03 Kabushiki Kaisha Toshiba モリブデン合金およびそれを用いたｘ線管回転陽極ターゲット、ｘ線管並びに溶融るつぼ
WO2007141173A1 (en) * 2006-06-02 2007-12-13 Bekaert Advanced Coatings A rotatable sputter target
US8043488B2 (en) * 2006-06-02 2011-10-25 Bekaert Advanced Coatings Rotatable sputter target
FR2944295B1 (fr) * 2009-04-10 2014-08-15 Saint Gobain Coating Solutions Cible a base de molybdene et procede d'elaboration par projection thermique d'une cible

Also Published As

Publication number Publication date
EP2769002A1 (de) 2014-08-27
TW201329265A (zh) 2013-07-16
CN104040019B (zh) 2016-06-29
EP2769002B1 (de) 2015-09-30
AT12292U3 (de) 2013-03-15
ES2555876T3 (es) 2016-01-11
AT12292U2 (de) 2012-03-15
TWI550115B (zh) 2016-09-21
WO2013056286A1 (de) 2013-04-25
JP2015501376A (ja) 2015-01-15
KR20140091677A (ko) 2014-07-22
US20140238850A1 (en) 2014-08-28
CN104040019A (zh) 2014-09-10

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