PL2704868T3 - Systemy pomiarowe oparte na wyładowaniach mikroelektrycznych i odpowiedni sposób działania - Google Patents
Systemy pomiarowe oparte na wyładowaniach mikroelektrycznych i odpowiedni sposób działaniaInfo
- Publication number
- PL2704868T3 PL2704868T3 PL12779279T PL12779279T PL2704868T3 PL 2704868 T3 PL2704868 T3 PL 2704868T3 PL 12779279 T PL12779279 T PL 12779279T PL 12779279 T PL12779279 T PL 12779279T PL 2704868 T3 PL2704868 T3 PL 2704868T3
- Authority
- PL
- Poland
- Prior art keywords
- micro
- operating method
- corresponding operating
- discharged based
- metrology systems
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
- G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H1/00—Electrical discharge machining, i.e. removing metal with a series of rapidly recurring electrical discharges between an electrode and a workpiece in the presence of a fluid dielectric
- B23H1/02—Electric circuits specially adapted therefor, e.g. power supply, control, preventing short circuits or other abnormal discharges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H11/00—Auxiliary apparatus or details, not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H7/00—Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
- B23H7/26—Apparatus for moving or positioning electrode relatively to workpiece; Mounting of electrode
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/28—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring contours or curvatures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H1/00—Electrical discharge machining, i.e. removing metal with a series of rapidly recurring electrical discharges between an electrode and a workpiece in the presence of a fluid dielectric
- B23H1/02—Electric circuits specially adapted therefor, e.g. power supply, control, preventing short circuits or other abnormal discharges
- B23H1/024—Detection of, and response to, abnormal gap conditions, e.g. short circuits
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H7/00—Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
- B23H7/14—Electric circuits specially adapted therefor, e.g. power supply
- B23H7/18—Electric circuits specially adapted therefor, e.g. power supply for maintaining or controlling the desired spacing between electrode and workpiece
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Machine Tool Sensing Apparatuses (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201161482120P | 2011-05-03 | 2011-05-03 | |
PCT/US2012/036168 WO2012151308A2 (en) | 2011-05-03 | 2012-05-02 | Micro-electrical discharged based metrology system |
EP12779279.4A EP2704868B1 (en) | 2011-05-03 | 2012-05-02 | Micro-electrical discharged based metrology systems and corresponding operating method |
Publications (1)
Publication Number | Publication Date |
---|---|
PL2704868T3 true PL2704868T3 (pl) | 2018-11-30 |
Family
ID=47108211
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PL12779279T PL2704868T3 (pl) | 2011-05-03 | 2012-05-02 | Systemy pomiarowe oparte na wyładowaniach mikroelektrycznych i odpowiedni sposób działania |
Country Status (8)
Country | Link |
---|---|
US (1) | US9207060B2 (pl) |
EP (1) | EP2704868B1 (pl) |
JP (1) | JP6075797B2 (pl) |
KR (1) | KR101990157B1 (pl) |
CA (1) | CA2833909C (pl) |
ES (1) | ES2672877T3 (pl) |
PL (1) | PL2704868T3 (pl) |
WO (1) | WO2012151308A2 (pl) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20150082620A (ko) * | 2012-11-14 | 2015-07-15 | 레니쇼우 피엘씨 | 공작 기계로 작업편을 측정하기 위한 방법 및 장치 |
US9341610B1 (en) | 2013-08-29 | 2016-05-17 | The Boeing Company | Electrical arc trigger systems, methods, and apparatuses |
US9514917B1 (en) | 2013-08-29 | 2016-12-06 | The Boeing Company | Controlled-energy electrical arc systems, methods, and apparatuses |
US9586279B2 (en) * | 2013-09-17 | 2017-03-07 | Kangmin Hsia | Method and system of surface polishing |
EP3317608A4 (en) * | 2014-10-06 | 2019-03-06 | US Synthetic Corporation | PROBES, STYLETS, SYSTEMS COMPRISING THE SAME, AND METHODS OF MANUFACTURE |
JP7199374B2 (ja) * | 2017-04-19 | 2023-01-05 | レニショウ パブリック リミテッド カンパニー | 位置決め装置 |
KR101973636B1 (ko) | 2017-07-25 | 2019-04-29 | (주)에스엠텍 | 초경합금 고품질 레이저 복합가공 장치 |
CN111780652B (zh) * | 2020-08-13 | 2022-01-18 | 张素平 | 一种电路板生产加工质量检测装置 |
US11003160B1 (en) * | 2020-12-17 | 2021-05-11 | Thermwood Corporation | Method and system for z-axis impact resistance for machining |
Family Cites Families (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US644852A (en) * | 1899-07-27 | 1900-03-06 | Carl Eickemeyer | Electric pump. |
JPS5724481B2 (pl) * | 1973-12-31 | 1982-05-25 | ||
JPS6099537A (ja) | 1983-11-07 | 1985-06-03 | Fuji Kogu Seisakusho:Kk | クランプ装置 |
US4665739A (en) * | 1984-04-10 | 1987-05-19 | Mitutoyo Mfg. Co., Ltd | Surface roughness measuring instrument |
JPS61219519A (ja) * | 1985-03-26 | 1986-09-29 | Mitsubishi Electric Corp | 放電加工装置 |
US4765181A (en) * | 1985-08-08 | 1988-08-23 | Tokyo Seimitsu Co., Ltd. | Surface texture measuring instrument |
JPH01103234A (ja) * | 1987-10-16 | 1989-04-20 | Matsushita Electric Ind Co Ltd | 微細軸放電加工装置 |
GB9021448D0 (en) * | 1990-10-03 | 1990-11-14 | Renishaw Plc | Capacitance sensing probe |
JP3145756B2 (ja) * | 1991-12-24 | 2001-03-12 | 株式会社ソディック | 細穴放電加工機の電極延出方法 |
JPH05329711A (ja) * | 1992-05-29 | 1993-12-14 | Makino Milling Mach Co Ltd | 放電加工方法および装置 |
JPH0732217A (ja) * | 1993-07-20 | 1995-02-03 | Fanuc Ltd | ワイヤ放電加工機における被加工物厚さ測定装置と該測定装置を使用した加工条件変更方法 |
JPH09225750A (ja) * | 1996-02-19 | 1997-09-02 | Hoden Seimitsu Kako Kenkyusho Ltd | 放電加工方法およびその装置 |
GB2312957A (en) * | 1996-05-09 | 1997-11-12 | Rotadata Ltd | Alternating current spark discharge probe |
US5798529A (en) * | 1996-05-28 | 1998-08-25 | International Business Machines Corporation | Focused ion beam metrology |
JPH10118849A (ja) * | 1996-10-23 | 1998-05-12 | Matsushita Electric Ind Co Ltd | 放電加工方法及び装置 |
US6230070B1 (en) * | 1997-07-23 | 2001-05-08 | Fuji Seiki Co., Ltd. | Work position adjusting apparatus and adjusting method |
US6448529B1 (en) * | 1999-06-16 | 2002-09-10 | Matsushita Electric Industrial Co., Ltd. | Electro discharge machining apparatus |
JP2001162448A (ja) * | 1999-12-10 | 2001-06-19 | Canon Inc | 放電加工方法および装置 |
JP2003165007A (ja) * | 2001-09-18 | 2003-06-10 | Big Alpha Co Ltd | コレット |
JP2004243426A (ja) * | 2003-02-12 | 2004-09-02 | Citizen Watch Co Ltd | 工具寸法の測定方法 |
JP4346083B2 (ja) * | 2004-07-02 | 2009-10-14 | 本田技研工業株式会社 | 走査型プローブ顕微鏡システム |
JP2006118916A (ja) * | 2004-10-20 | 2006-05-11 | Sii Nanotechnology Inc | 表面情報計測装置及び表面情報計測方法 |
US7202691B2 (en) * | 2005-05-31 | 2007-04-10 | Semiconductor Diagnostics, Inc. | Non-contact method for acquiring charge-voltage data on miniature test areas of semiconductor product wafers |
JP4512901B2 (ja) * | 2005-10-17 | 2010-07-28 | 財団法人本荘由利産業科学技術振興財団 | 電気絶縁体包覆電極を用いた放電加工法における電気絶縁体の移動制御法およびその装置 |
JP5185506B2 (ja) * | 2006-03-23 | 2013-04-17 | 株式会社日立ハイテクノロジーズ | 荷電粒子線パターン測定装置 |
US7430273B2 (en) * | 2007-02-23 | 2008-09-30 | Thermo Fisher Scientific Inc. | Instrument having X-ray fluorescence and spark emission spectroscopy analysis capabilities |
JP2009229427A (ja) * | 2008-03-25 | 2009-10-08 | Oki Electric Ind Co Ltd | 表面形状測定装置 |
US20100163427A1 (en) * | 2008-12-31 | 2010-07-01 | Yimin Zhan | Methods and systems for electromachining of a workpiece |
US8803533B2 (en) * | 2011-01-06 | 2014-08-12 | University Of South Florida | Noncontact determination of interface trap density for semiconductor-dielectric interface structures |
-
2012
- 2012-05-02 CA CA2833909A patent/CA2833909C/en active Active
- 2012-05-02 EP EP12779279.4A patent/EP2704868B1/en active Active
- 2012-05-02 ES ES12779279.4T patent/ES2672877T3/es active Active
- 2012-05-02 JP JP2014509411A patent/JP6075797B2/ja active Active
- 2012-05-02 WO PCT/US2012/036168 patent/WO2012151308A2/en active Application Filing
- 2012-05-02 PL PL12779279T patent/PL2704868T3/pl unknown
- 2012-05-02 KR KR1020137030561A patent/KR101990157B1/ko active IP Right Grant
- 2012-05-02 US US14/114,894 patent/US9207060B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
KR20140043346A (ko) | 2014-04-09 |
KR101990157B1 (ko) | 2019-06-17 |
JP2014519021A (ja) | 2014-08-07 |
US20140130619A1 (en) | 2014-05-15 |
WO2012151308A2 (en) | 2012-11-08 |
CA2833909C (en) | 2019-07-16 |
US9207060B2 (en) | 2015-12-08 |
JP6075797B2 (ja) | 2017-02-08 |
CA2833909A1 (en) | 2012-11-08 |
EP2704868A4 (en) | 2014-12-31 |
ES2672877T3 (es) | 2018-06-18 |
EP2704868B1 (en) | 2018-04-18 |
EP2704868A2 (en) | 2014-03-12 |
WO2012151308A3 (en) | 2013-03-14 |
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