PL2458321T3 - Sposób i urządzenie do pomiaru odstępów między powierzchniami optycznymi układu optycznego - Google Patents

Sposób i urządzenie do pomiaru odstępów między powierzchniami optycznymi układu optycznego

Info

Publication number
PL2458321T3
PL2458321T3 PL11009186T PL11009186T PL2458321T3 PL 2458321 T3 PL2458321 T3 PL 2458321T3 PL 11009186 T PL11009186 T PL 11009186T PL 11009186 T PL11009186 T PL 11009186T PL 2458321 T3 PL2458321 T3 PL 2458321T3
Authority
PL
Poland
Prior art keywords
optical
measuring distances
areas
optical system
optical areas
Prior art date
Application number
PL11009186T
Other languages
English (en)
Inventor
Josef Heinisch
Stefan Krey
Eugen Dumitrescu
Aiko Ruprecht
Patrik Langehanenberg
Original Assignee
Trioptics Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trioptics Gmbh filed Critical Trioptics Gmbh
Publication of PL2458321T3 publication Critical patent/PL2458321T3/pl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02025—Interference between three or more discrete surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0221—Testing optical properties by determining the optical axis or position of lenses

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
PL11009186T 2010-11-29 2011-11-19 Sposób i urządzenie do pomiaru odstępów między powierzchniami optycznymi układu optycznego PL2458321T3 (pl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010053423A DE102010053423A1 (de) 2010-11-29 2010-11-29 Verfahren und Vorrichtung zur Messung von Abständen zwischen optischen Flächen eines optischen Systems
EP11009186.5A EP2458321B1 (de) 2010-11-29 2011-11-19 Verfahren und Vorrichtung zur Messung von Abständen zwischen optischen Flächen eines optischen Systems

Publications (1)

Publication Number Publication Date
PL2458321T3 true PL2458321T3 (pl) 2014-08-29

Family

ID=45047537

Family Applications (1)

Application Number Title Priority Date Filing Date
PL11009186T PL2458321T3 (pl) 2010-11-29 2011-11-19 Sposób i urządzenie do pomiaru odstępów między powierzchniami optycznymi układu optycznego

Country Status (5)

Country Link
US (1) US8760666B2 (pl)
EP (1) EP2458321B1 (pl)
JP (1) JP2012118071A (pl)
DE (1) DE102010053423A1 (pl)
PL (1) PL2458321T3 (pl)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010053422B3 (de) * 2010-11-29 2012-03-29 Trioptics Gmbh Messung der Positionen von Krümmungsmittelpunkten optischer Flächen eines mehrlinsigen optischen Systems
US8944001B2 (en) * 2013-02-18 2015-02-03 Nordson Corporation Automated position locator for a height sensor in a dispensing system
DE102014208636B4 (de) * 2014-05-08 2018-06-28 Asphericon Gmbh Verfahren und Vorrichtung zur Messung einer Dezentrierung und Verkippung von Flächen eines optischen Elements
CN105108186A (zh) * 2015-06-25 2015-12-02 中国科学院西安光学精密机械研究所 透镜基于定心加工的误差分离方法
DE102016014834B3 (de) * 2016-12-14 2018-04-19 Innolite Gmbh Verfahren zur ultrapräzisen Zentrierbearbeitung einer transmittiven oder reflektiven Optik, insbesondere einer Linse mit einer asphärischen oder frei geformten vorderen Linsenfläche
CN109425312B (zh) * 2017-09-01 2021-12-03 宁波舜宇车载光学技术有限公司 偏心测试装置及方法
CN108734766B (zh) * 2018-05-17 2022-04-08 业成科技（成都）有限公司 曲面装置的曲率半径的评估方法
FR3093560B1 (fr) * 2019-03-05 2021-10-29 Fogale Nanotech Procédé et dispositif de mesure d’interfaces d’un élément optique
CN110057552B (zh) * 2019-04-23 2020-11-06 芋头科技（杭州）有限公司 虚像距离测量方法、装置、设备以及控制器和介质
CN110737103B (zh) * 2019-10-31 2022-03-08 中国科学院长春光学精密机械与物理研究所 一种大口径离轴折反式多通道光学系统装调方法
CN111220095B (zh) * 2019-12-06 2021-08-03 凌云光技术股份有限公司 一种用于高精度检测发散光束光轴垂直度的方法及装置
DE102020107298A1 (de) 2020-03-17 2021-09-23 Berliner Glas GmbH Verfahren und Justiervorrichtung zur Ausrichtung optischer Linsen
CN112526697B (zh) * 2020-12-10 2022-07-22 业成科技（成都）有限公司 镜片对位方法
US11860380B1 (en) * 2023-08-15 2024-01-02 Mloptic Corp. Lens assembly alignment tool

Family Cites Families (15)

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JPH06194122A (ja) * 1992-12-24 1994-07-15 Shimadzu Corp 偏心測定装置
FR2803027B1 (fr) 1999-12-23 2003-03-21 Nanotec Solution Procede de mesure optique pour la mesure sans contact d'epaisseur de materiaux translucides, et dispositif associe
FR2803021B1 (fr) 1999-12-27 2002-05-24 Soudure Autogene Francaise Chalumeau oxy-combustible
JP2002213926A (ja) * 2001-01-22 2002-07-31 Nikon Corp 間隔測定装置、間隔測定方法、及び光学系の製造方法、並びに干渉計
US7046351B2 (en) * 2002-05-20 2006-05-16 Pentax Corporation Method and apparatus for measuring eccentricity of optical lens, and method and apparatus for centering and edging optical lens
JP2004069594A (ja) * 2002-08-08 2004-03-04 Olympus Corp 偏心量測定機及び偏心量測定方法
JP2005147703A (ja) * 2003-11-11 2005-06-09 Olympus Corp 面間隔測定装置および面間隔測定方法
DE102004029735C5 (de) 2004-06-21 2011-09-15 Trioptics Gmbh Verfahren zur Messung optischer Oberflächen innerhalb einer mehrlinsigen Anordnung
US7133225B1 (en) 2004-10-18 2006-11-07 Carl Zeiss Smt Ag Method of manufacturing an optical system
DE102005013571A1 (de) 2005-03-23 2006-06-14 Carl Zeiss Smt Ag Verfahren zum Herstellen eines optischen Elements
WO2006125609A1 (en) 2005-05-24 2006-11-30 Carl Zeiss Smt Ag Method of aligning an optical system
JP2007046971A (ja) * 2005-08-09 2007-02-22 Olympus Corp レンズ偏心測定装置及びレンズ偏心測定方法
JP4880513B2 (ja) * 2007-03-29 2012-02-22 富士フイルム株式会社 非球面レンズの面ずれ測定方法および装置
CN101334334B (zh) * 2007-06-25 2010-06-02 佛山普立华科技有限公司 镜片偏心检测系统
CN101373167B (zh) * 2007-08-24 2010-04-07 鸿富锦精密工业（深圳）有限公司 镜片偏心检测系统及方法

Also Published As

Publication number Publication date
EP2458321A1 (de) 2012-05-30
JP2012118071A (ja) 2012-06-21
DE102010053423A1 (de) 2012-05-31
US20120133951A1 (en) 2012-05-31
EP2458321B1 (de) 2014-01-08
US8760666B2 (en) 2014-06-24

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