PL2317294T3 - Komórka pomiarowa - Google Patents

Komórka pomiarowa

Info

Publication number
PL2317294T3
PL2317294T3 PL10007566T PL10007566T PL2317294T3 PL 2317294 T3 PL2317294 T3 PL 2317294T3 PL 10007566 T PL10007566 T PL 10007566T PL 10007566 T PL10007566 T PL 10007566T PL 2317294 T3 PL2317294 T3 PL 2317294T3
Authority
PL
Poland
Prior art keywords
measuring cell
measuring
cell
Prior art date
Application number
PL10007566T
Other languages
English (en)
Inventor
Holger Gruhler
Original Assignee
Grieshaber Vega Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Grieshaber Vega Kg filed Critical Grieshaber Vega Kg
Publication of PL2317294T3 publication Critical patent/PL2317294T3/pl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
PL10007566T 2009-11-02 2010-07-21 Komórka pomiarowa PL2317294T3 (pl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009051611A DE102009051611A1 (de) 2009-11-02 2009-11-02 Messzelle
EP10007566.2A EP2317294B1 (de) 2009-11-02 2010-07-21 Messzelle

Publications (1)

Publication Number Publication Date
PL2317294T3 true PL2317294T3 (pl) 2015-04-30

Family

ID=43501176

Family Applications (1)

Application Number Title Priority Date Filing Date
PL10007566T PL2317294T3 (pl) 2009-11-02 2010-07-21 Komórka pomiarowa

Country Status (4)

Country Link
EP (1) EP2317294B1 (pl)
CN (1) CN102052988B (pl)
DE (1) DE102009051611A1 (pl)
PL (1) PL2317294T3 (pl)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009051613A1 (de) * 2009-11-02 2011-05-05 Vega Grieshaber Kg Messzelle
DE102013222129B3 (de) * 2013-10-30 2014-10-09 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Kapazitives Sensorelement mit integrierter Mess- und Referenzkapazität
US10549982B2 (en) 2016-02-15 2020-02-04 Stmicroelectronics S.R.L. Pressure sensor encapsulated in elastomeric material, and system including the pressure sensor
ITUB20160759A1 (it) * 2016-02-15 2017-08-15 St Microelectronics Srl Sensore di pressione incapsulato in materiale elastomerico, e sistema includente il sensore di pressione
WO2018049633A1 (zh) * 2016-09-14 2018-03-22 深圳市汇顶科技股份有限公司 压力检测装置、压力检测方法及电子终端
DE102018104162A1 (de) * 2018-02-23 2019-08-29 Endress+Hauser SE+Co. KG Drucksensor
CN110567607B (zh) * 2019-01-07 2020-12-29 京东方科技集团股份有限公司 一种温度传感器、信号采集电路及温度检测装置

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2021479A1 (de) * 1970-05-02 1971-11-11 Kleinwaechter Hans Druckmessgeraet zur Messung von Drucken in Gasen und Fluessigkeiten
DE2461424A1 (de) * 1974-12-24 1976-07-08 Friedrich Flossmann Mechanisch-elektronischer druckwertaufnehmer
US4425799A (en) * 1982-06-03 1984-01-17 Kavlico Corporation Liquid capacitance pressure transducer technique
US4689999A (en) * 1985-07-26 1987-09-01 The Garrett Corporation Temperature compensated pressure transducer
DE3774645D1 (de) * 1986-02-03 1992-01-02 Matsushita Electric Ind Co Ltd Gewichtsdetektoranordnung.
JPH0812123B2 (ja) * 1987-11-27 1996-02-07 日本碍子株式会社 圧力センサ
SU1732201A1 (ru) * 1989-12-08 1992-05-07 Научно-исследовательский институт физических измерений Емкостный датчик давлени и способ его изготовлени
SU1739225A1 (ru) * 1990-05-21 1992-06-07 Научно-Исследовательский Институт Физических Изерений Емкостной датчик давлени
JP2517467B2 (ja) * 1990-10-05 1996-07-24 山武ハネウエル株式会社 静電容量式圧力センサ
DE4227819C2 (de) * 1991-08-22 1996-10-17 Yamatake Honeywell Co Ltd Kapazitiver Drucksensor
US5189591A (en) * 1992-06-12 1993-02-23 Allied-Signal Inc. Aluminosilicate glass pressure transducer
EP0649011B1 (de) * 1993-10-13 1998-08-05 K.K. Holding Ag Thermo-kompensierte Druckaufnehmer-Membranstruktur
DE19648424C1 (de) * 1996-11-22 1998-06-25 Siemens Ag Mikromechanischer Sensor
FI101426B1 (fi) * 1996-12-13 1998-06-15 Balzers And Leybold Instrument Paineanturi
US20040099061A1 (en) * 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
DE10044078A1 (de) 2000-09-07 2002-04-04 Grieshaber Vega Kg Druckmesszelle mit Temperatursensoren und Druckmessverfahren
JP2002208538A (ja) * 2000-09-29 2002-07-26 Eni Technologies Inc 液体可変コンデンサ
US6886410B1 (en) * 2003-12-30 2005-05-03 Honeywell International Inc. Modified dual diaphragm pressure sensor
CN100439890C (zh) * 2005-08-25 2008-12-03 李韫言 单片单晶硅微机械加工的电容式压力传感器
US7331239B1 (en) * 2006-09-26 2008-02-19 Honeywell International Inc. Self calibrating dual diaphragm pressure sensor
US7698952B2 (en) * 2006-10-03 2010-04-20 Kla-Tencor Corporation Pressure sensing device

Also Published As

Publication number Publication date
EP2317294B1 (de) 2015-01-07
CN102052988B (zh) 2015-07-22
CN102052988A (zh) 2011-05-11
EP2317294A1 (de) 2011-05-04
DE102009051611A1 (de) 2011-05-05

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