ITUB20160759A1 - Sensore di pressione incapsulato in materiale elastomerico, e sistema includente il sensore di pressione - Google Patents

Sensore di pressione incapsulato in materiale elastomerico, e sistema includente il sensore di pressione

Info

Publication number
ITUB20160759A1
ITUB20160759A1 ITUB2016A000759A ITUB20160759A ITUB20160759A1 IT UB20160759 A1 ITUB20160759 A1 IT UB20160759A1 IT UB2016A000759 A ITUB2016A000759 A IT UB2016A000759A IT UB20160759 A ITUB20160759 A IT UB20160759A IT UB20160759 A1 ITUB20160759 A1 IT UB20160759A1
Authority
IT
Italy
Prior art keywords
pressure sensor
system including
elastomeric material
encapsulated
encapsulated pressure
Prior art date
Application number
ITUB2016A000759A
Other languages
English (en)
Inventor
Enri Duqi
Bruno Murari
Sebastiano Conti
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to ITUB2016A000759A priority Critical patent/ITUB20160759A1/it
Priority to US15/337,701 priority patent/US20170233245A1/en
Priority to EP17156382.8A priority patent/EP3205997B1/en
Priority to CN201710081763.7A priority patent/CN107084806B/zh
Priority to CN201720136466.3U priority patent/CN207081503U/zh
Publication of ITUB20160759A1 publication Critical patent/ITUB20160759A1/it
Priority to US15/884,624 priority patent/US10549982B2/en
Priority to US16/730,480 priority patent/US11254561B2/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L15/00—Devices or apparatus for measuring two or more fluid pressure values simultaneously
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0035—Packages or encapsulation for maintaining a controlled atmosphere inside of the chamber containing the MEMS
    • B81B7/0041—Packages or encapsulation for maintaining a controlled atmosphere inside of the chamber containing the MEMS maintaining a controlled atmosphere with techniques not provided for in B81B7/0038
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0264—Pressure sensors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Measuring Fluid Pressure (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
ITUB2016A000759A 2016-02-15 2016-02-15 Sensore di pressione incapsulato in materiale elastomerico, e sistema includente il sensore di pressione ITUB20160759A1 (it)

Priority Applications (7)

Application Number Priority Date Filing Date Title
ITUB2016A000759A ITUB20160759A1 (it) 2016-02-15 2016-02-15 Sensore di pressione incapsulato in materiale elastomerico, e sistema includente il sensore di pressione
US15/337,701 US20170233245A1 (en) 2016-02-15 2016-10-28 Pressure sensor encapsulated in elastomeric material, and system including the pressure sensor
EP17156382.8A EP3205997B1 (en) 2016-02-15 2017-02-15 Pressure sensor encapsulated in elastomeric material, and system including the pressure sensor
CN201710081763.7A CN107084806B (zh) 2016-02-15 2017-02-15 包封在弹性材料中的压力传感器与包括压力传感器的系统
CN201720136466.3U CN207081503U (zh) 2016-02-15 2017-02-15 封装压力传感器、电子组件、电子系统和电子设备
US15/884,624 US10549982B2 (en) 2016-02-15 2018-01-31 Pressure sensor encapsulated in elastomeric material, and system including the pressure sensor
US16/730,480 US11254561B2 (en) 2016-02-15 2019-12-30 Pressure sensor encapsulated in elastomeric material, and system including the pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITUB2016A000759A ITUB20160759A1 (it) 2016-02-15 2016-02-15 Sensore di pressione incapsulato in materiale elastomerico, e sistema includente il sensore di pressione

Publications (1)

Publication Number Publication Date
ITUB20160759A1 true ITUB20160759A1 (it) 2017-08-15

Family

ID=55861058

Family Applications (1)

Application Number Title Priority Date Filing Date
ITUB2016A000759A ITUB20160759A1 (it) 2016-02-15 2016-02-15 Sensore di pressione incapsulato in materiale elastomerico, e sistema includente il sensore di pressione

Country Status (4)

Country Link
US (1) US20170233245A1 (it)
EP (1) EP3205997B1 (it)
CN (2) CN107084806B (it)
IT (1) ITUB20160759A1 (it)

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CN114993548A (zh) * 2022-05-30 2022-09-02 无锡胜脉电子有限公司 一种高压硅mems压力传感器及制备方法

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ITUB20160759A1 (it) * 2016-02-15 2017-08-15 St Microelectronics Srl Sensore di pressione incapsulato in materiale elastomerico, e sistema includente il sensore di pressione
JP6654161B2 (ja) * 2016-09-05 2020-02-26 オムロンヘルスケア株式会社 力検出装置
US11255737B2 (en) 2017-02-09 2022-02-22 Nextinput, Inc. Integrated digital force sensors and related methods of manufacture
US11243125B2 (en) 2017-02-09 2022-02-08 Nextinput, Inc. Integrated piezoresistive and piezoelectric fusion force sensor
US11243126B2 (en) 2017-07-27 2022-02-08 Nextinput, Inc. Wafer bonded piezoresistive and piezoelectric force sensor and related methods of manufacture
WO2019079420A1 (en) 2017-10-17 2019-04-25 Nextinput, Inc. SHIFT TEMPERATURE COEFFICIENT COMPENSATION FOR FORCE SENSOR AND STRAIN GAUGE
US11874185B2 (en) * 2017-11-16 2024-01-16 Nextinput, Inc. Force attenuator for force sensor
US10837852B2 (en) * 2017-12-29 2020-11-17 Honeywell International Inc Pressure sensor media interface with integrated seal and diaphragm
TWI668419B (zh) * 2018-03-26 2019-08-11 創為精密材料股份有限公司 具有多氣室結構之壓力感應模組
CN108477750A (zh) * 2018-05-31 2018-09-04 西南大学 一种电热鞋底
DE102018114077B4 (de) * 2018-06-13 2020-02-13 Danfoss A/S Drucksensoranordnung
IT201800006827A1 (it) * 2018-06-29 2019-12-29 Metodo di test della chiusura ermetica di un incapsulamento
US11851319B2 (en) * 2018-09-20 2023-12-26 Stmicroelectronics S.R.L. High-range semiconductor load sensor device
DE102018222781A1 (de) * 2018-12-21 2020-06-25 Robert Bosch Gmbh Drucksensoranordnung
US11060929B2 (en) * 2019-03-04 2021-07-13 Silicon Microstructures, Inc. Pressure sensor die attach
US11118990B2 (en) * 2019-06-21 2021-09-14 Honeywell International Inc. Micro-molded fluid pressure sensor housing
EP3770112A1 (en) * 2019-07-22 2021-01-27 Infineon Technologies AG Pressure sensor
CN112539817B (zh) * 2019-09-23 2025-03-28 精量电子（深圳）有限公司 一种压力传感器及压力装置
IT201900017546A1 (it) * 2019-09-30 2021-03-30 St Microelectronics Srl Dispositivo a pulsante mems resistente all'acqua, dispositivo di ingresso comprendente il dispositivo a pulsante mems e apparecchio elettronico
IT201900019169A1 (it) * 2019-10-17 2021-04-17 St Microelectronics Srl Interruttore impermeabile azionabile da un fluido quale aria e utilizzabile in particolare per l'attivazione di un apparecchio inalatore, quale una sigaretta elettronica
DE102020108775B4 (de) 2020-03-30 2022-08-18 Infineon Technologies Ag Sensorpackages und verfahren zur herstellung von sensorpackages
DE102020205490A1 (de) * 2020-04-30 2021-11-04 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zum Herstellen einer Drucksensoreinrichtung und Drucksensoreinrichtung
CN113582126B (zh) * 2020-04-30 2024-05-10 苏州敏芯微电子技术股份有限公司 压力传感器封装结构及电子设备
CN113582127B (zh) * 2020-04-30 2024-05-10 苏州敏芯微电子技术股份有限公司 压力传感器封装结构
US11945714B2 (en) 2020-07-30 2024-04-02 Stmicroelectronics S.R.L. Electronic device and corresponding method
CN111879444A (zh) * 2020-07-31 2020-11-03 深圳市迈姆斯科技有限公司 一种小型力传感器及制作方法
CN113970389B (zh) * 2020-12-14 2024-08-30 钛深科技(深圳)有限公司 一种薄膜式压力传感器及电子设备
CN112885789B (zh) * 2021-01-07 2024-07-05 浙江荷清柔性电子技术有限公司 柔性气动压力测量装置及其制作方法
DE102021113914A1 (de) 2021-05-28 2022-12-01 Endress+Hauser SE+Co. KG Messgerät zum Bestimmen und/oder Überwachen zumindest einer physikalischen und/oder chemischen Messgröße
CN113447167A (zh) * 2021-07-30 2021-09-28 武汉奥特多电子科技有限公司 一种mems压力传感器
CN114136533A (zh) * 2021-12-17 2022-03-04 江西万年芯微电子有限公司 一种压力传感器的封装结构和封装方法
DE102022200186A1 (de) 2022-01-11 2023-07-13 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zur Herstellung einer Umverpackung eines Halbleiterbauelements sowie ein derartig hergestelltes Halbleiterbauelement
JP2023109029A (ja) * 2022-01-26 2023-08-07 アルプスアルパイン株式会社 荷重センサ装置
CN115290246B (zh) * 2022-03-25 2024-07-19 西人马联合测控（泉州）科技有限公司 一种交叉耦合的双芯片压力传感器
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US20150369680A1 (en) * 2014-06-19 2015-12-24 Fuji Electric Co., Ltd. Double diaphragm type pressure sensor

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US4842685A (en) * 1986-04-22 1989-06-27 Motorola, Inc. Method for forming a cast membrane protected pressure sensor
DE102004035545A1 (de) * 2004-07-22 2006-02-16 Siemens Ag Drucksensor und Verfahren zu dessen Herstellung
US20060201255A1 (en) * 2005-03-10 2006-09-14 Walter Czarnocki Media isolated absolute pressure sensor
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Publication number Priority date Publication date Assignee Title
CN114993548A (zh) * 2022-05-30 2022-09-02 无锡胜脉电子有限公司 一种高压硅mems压力传感器及制备方法
CN114993548B (zh) * 2022-05-30 2023-09-01 无锡胜脉电子有限公司 一种高压硅mems压力传感器及制备方法

Also Published As

Publication number Publication date
EP3205997A1 (en) 2017-08-16
EP3205997B1 (en) 2019-06-19
CN207081503U (zh) 2018-03-09
CN107084806A (zh) 2017-08-22
US20170233245A1 (en) 2017-08-17
CN107084806B (zh) 2020-03-06

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