PL2144711T3 - Sposób przenoszenia nanowarstwy - Google Patents

Sposób przenoszenia nanowarstwy

Info

Publication number
PL2144711T3
PL2144711T3 PL08735184T PL08735184T PL2144711T3 PL 2144711 T3 PL2144711 T3 PL 2144711T3 PL 08735184 T PL08735184 T PL 08735184T PL 08735184 T PL08735184 T PL 08735184T PL 2144711 T3 PL2144711 T3 PL 2144711T3
Authority
PL
Poland
Prior art keywords
nanolayer
transferring
Prior art date
Application number
PL08735184T
Other languages
English (en)
Inventor
Armin GÖLZHÄUSER
Christoph Nottbohm
André Beyer
Original Assignee
Cnm Technologies Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cnm Technologies Gmbh filed Critical Cnm Technologies Gmbh
Publication of PL2144711T3 publication Critical patent/PL2144711T3/pl

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/28—Processes for applying liquids or other fluent materials performed by transfer from the surfaces of elements carrying the liquid or other fluent material, e.g. brushes, pads, rollers
    • B05D1/283—Transferring monomolecular layers or solutions of molecules adapted for forming monomolecular layers from carrying elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00349—Creating layers of material on a substrate
    • B81C1/0038—Processes for creating layers of materials not provided for in groups B81C1/00357 - B81C1/00373
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/0191—Transfer of a layer from a carrier wafer to a device wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Composite Materials (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials Engineering (AREA)
  • Micromachines (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
PL08735184T 2007-04-11 2008-04-11 Sposób przenoszenia nanowarstwy PL2144711T3 (pl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102007016995A DE102007016995A1 (de) 2007-04-11 2007-04-11 Verfahren zum Übertragen einer Nanoschicht

Publications (1)

Publication Number Publication Date
PL2144711T3 true PL2144711T3 (pl) 2017-09-29

Family

ID=39744147

Family Applications (1)

Application Number Title Priority Date Filing Date
PL08735184T PL2144711T3 (pl) 2007-04-11 2008-04-11 Sposób przenoszenia nanowarstwy

Country Status (6)

Country Link
US (1) US8377243B2 (pl)
EP (1) EP2144711B1 (pl)
DE (1) DE102007016995A1 (pl)
ES (1) ES2629782T3 (pl)
PL (1) PL2144711T3 (pl)
WO (1) WO2008125302A2 (pl)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9195004B2 (en) 2008-01-04 2015-11-24 Massachusetts Institute Of Technology Method and apparatus for forming structures of polymer nanobeads
US8409450B2 (en) * 2008-03-24 2013-04-02 The Regents Of The University Of California Graphene-based structure, method of suspending graphene membrane, and method of depositing material onto graphene membrane
US8232136B2 (en) 2008-08-07 2012-07-31 Massachusetts Institute Of Technology Method and apparatus for simultaneous lateral and vertical patterning of molecular organic films
WO2010028390A2 (en) 2008-09-08 2010-03-11 Massachusetts Institute Of Technology Method and apparatus for super radiant laser action in half wavelength thick organic semiconductor microcavities
US9388048B1 (en) * 2008-10-08 2016-07-12 University Of Southern California Synthesis of graphene by chemical vapor deposition
US8057863B2 (en) * 2008-12-05 2011-11-15 The Regents Of The University Of California Electrostatic force assisted deposition of graphene
US8963262B2 (en) 2009-08-07 2015-02-24 Massachusettes Institute Of Technology Method and apparatus for forming MEMS device
US8739390B2 (en) 2008-12-16 2014-06-03 Massachusetts Institute Of Technology Method for microcontact printing of MEMS
DE102009034575A1 (de) * 2009-07-24 2011-01-27 Universität Bielefeld Perforierte Membranen
KR101652787B1 (ko) * 2009-11-12 2016-09-01 삼성전자주식회사 대면적 그라핀의 제조방법 및 전사방법
DE102009056052B4 (de) 2009-11-26 2014-07-10 Humboldt-Universität Zu Berlin Anordnung mit einem Träger und einer Schicht
FI125151B (fi) * 2010-03-05 2015-06-15 Canatu Oy Menetelmä konformisen elementin valmistamiseksi
TW201203041A (en) 2010-03-05 2012-01-16 Canatu Oy A touch sensitive film and a touch sensing device
KR101767921B1 (ko) 2010-08-11 2017-08-14 한화테크윈 주식회사 그래핀의 후처리 방법 및 이를 이용한 그래핀 제조 방법
DE102010056562B4 (de) 2010-12-30 2018-10-11 Snaptrack, Inc. Elektroakustisches Bauelement und Verfahren zur Herstellung des elektroakustischen Bauelements
DE102010056572B4 (de) * 2010-12-30 2018-12-27 Snaptrack, Inc. Elektronisches Bauelement und Verfahren zur Herstellung des elektronischen Bauelements
US20120261073A1 (en) * 2011-04-13 2012-10-18 Empire Technology Development Llc Conforming graphene to a target substrate
CN102249175B (zh) * 2011-04-13 2014-08-13 中国航天科技集团公司第五研究院第五一0研究所 基于电子束激励脱附的纳电子器件和/或电路的制作方法
KR101878737B1 (ko) * 2011-08-19 2018-07-17 삼성전자주식회사 트렌치를 이용한 그래핀 전사방법 및 그래핀 전사 대상 기판
KR101822500B1 (ko) * 2011-09-06 2018-01-29 삼성전자주식회사 양자점층 제조 방법 및 양자점층을 포함한 양자점 광전자소자
KR101878739B1 (ko) 2011-10-24 2018-07-17 삼성전자주식회사 그래핀 전사부재, 그래핀 전사방법 및 이를 이용한 그래핀 소자 제조방법
WO2013096841A1 (en) * 2011-12-22 2013-06-27 The Trustees Of Columbia University In The City Of New York Assisted transfer of graphene
DE102012100476A1 (de) * 2012-01-20 2013-07-25 Gsi Helmholtzzentrum Für Schwerionenforschung Gmbh Verfahren zur Herstellung ultradünner Polymerfolien
US9431487B2 (en) 2013-01-11 2016-08-30 International Business Machines Corporation Graphene layer transfer
US8916451B2 (en) 2013-02-05 2014-12-23 International Business Machines Corporation Thin film wafer transfer and structure for electronic devices
US10957816B2 (en) 2013-02-05 2021-03-23 International Business Machines Corporation Thin film wafer transfer and structure for electronic devices
US9059013B2 (en) 2013-03-21 2015-06-16 International Business Machines Corporation Self-formation of high-density arrays of nanostructures
US9096050B2 (en) 2013-04-02 2015-08-04 International Business Machines Corporation Wafer scale epitaxial graphene transfer
US9337274B2 (en) 2013-05-15 2016-05-10 Globalfoundries Inc. Formation of large scale single crystalline graphene
ES2536491B2 (es) * 2013-11-21 2015-11-18 Universidad Politecnica De Madrid Procedimiento de transferencia de nanocapas y aparato de realización del mismo.
US10586651B2 (en) 2014-06-26 2020-03-10 Cnm Technologies Gmbh Method of manufacture of a multilayer structure
JP6472883B2 (ja) * 2014-11-28 2019-02-20 ソウル大学校産学協力団Ｓｅｏｕｌ Ｎａｔｉｏｎａｌ Ｕｎｉｖｅｒｓｉｔｙ Ｒ＆Ｄｂ Ｆｏｕｎｄａｔｉｏｎ 量子ドット転写印刷方法
GB2534404A (en) 2015-01-23 2016-07-27 Cnm Tech Gmbh Pellicle
EP3050620A1 (en) 2015-01-29 2016-08-03 Johann Wolfgang Goethe-Universität, Frankfurt am Main Functionalized nanomembrane, a method for preparation thereof and their use
JP6271454B2 (ja) * 2015-02-16 2018-01-31 日本電信電話株式会社 機能性材料の転写方法
US10450650B2 (en) * 2015-09-24 2019-10-22 The United States of America as represented by the Admininstrator of the National Aeronautics and Space Administration Method of manufacturing large area graphene and graphene-based photonics devices
CN105304832B (zh) * 2015-11-02 2017-07-25 深圳市华星光电技术有限公司 电致发光器件的制备方法
EP3217423A1 (en) 2016-03-07 2017-09-13 Fritz Haber Institut der Max Planck Gesellschaft Department of Inorganic Chemistry Transferable silica bilayer film
US10986435B2 (en) 2017-04-18 2021-04-20 Massachusetts Institute Of Technology Electrostatic acoustic transducer utilized in a hearing aid or audio processing system
LU100276B1 (en) 2017-06-02 2018-12-03 Cnm Tech Gmbh Immobilisation of nucleic acids on surfaces
CN109809358B (zh) * 2017-11-21 2021-03-26 中国科学院金属研究所 采用液相界面层洁净、无损转移大面积二维材料的方法
CN110098099B (zh) * 2018-01-27 2020-09-29 清华大学 透射电镜微栅及透射电镜微栅的制备方法
CN112469665B (zh) * 2018-05-22 2023-10-17 Etx公司 用于二维材料的转移的方法和装置
LU100812B1 (en) 2018-05-29 2019-11-29 Cnm Tech Gmbh Carbon nanomembranes on porous materials
US10841709B2 (en) 2018-12-06 2020-11-17 Waves Audio Ltd. Nanocomposite graphene polymer membrane assembly, and manufacturing method thereof
US20240164199A1 (en) 2021-03-22 2024-05-16 Friedrich-Schiller-Universität Jena Method of transfer of organic semiconductor films to a substrate and electronic devices made therefrom

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5391257A (en) * 1993-12-10 1995-02-21 Rockwell International Corporation Method of transferring a thin film to an alternate substrate
DE19945935B4 (de) 1999-09-24 2008-01-03 Universität Heidelberg Verfahren zur Herstellung eines oberflächenmodifizierten Schichtsystems
WO2003029018A1 (en) * 2001-10-01 2003-04-10 Paradigma S.R.L. Transfer of image with sublimating inks and medium in sheet form for performing it
AU2003217184A1 (en) * 2002-01-11 2003-09-02 Massachusetts Institute Of Technology Microcontact printing
AU2003304211A1 (en) * 2002-10-30 2005-01-04 The Regents Of The University Of California Direct micro-patterning of lipid bilayers using uv light and selected uses thereof
US7150801B2 (en) * 2003-02-26 2006-12-19 Mitsubishi Gas Chemical Company, Inc. Process for producing cold field-emission cathodes
US20060003097A1 (en) * 2003-08-06 2006-01-05 Andres Ronald P Fabrication of nanoparticle arrays
GB0323295D0 (en) * 2003-10-04 2003-11-05 Dow Corning Deposition of thin films
US7227034B2 (en) * 2004-11-22 2007-06-05 Xerox Corporation Process for arylamine production
US7238456B2 (en) * 2004-11-30 2007-07-03 Xerox Corporation Silicon-containing layers for electrophotographic photoreceptors and methods for making the same
US7541483B2 (en) * 2005-03-31 2009-06-02 Xerox Corporation Process for arylamine production
US7510810B2 (en) * 2005-06-29 2009-03-31 Xerox Corporation Cyanoresin polymers and electrophotographic imaging members containing cyanoresin polymers
US7998651B2 (en) * 2006-05-15 2011-08-16 Asml Netherlands B.V. Imprint lithography
US7524596B2 (en) * 2006-11-01 2009-04-28 Xerox Corporation Electrophotographic photoreceptors having reduced torque and improved mechanical robustness
JP2008155578A (ja) * 2006-12-26 2008-07-10 Fuji Xerox Co Ltd 記録装置
WO2010003132A1 (en) * 2008-07-02 2010-01-07 Illumina Cambridge Ltd. Using populations of beads for the fabrication of arrays on surfaces
JP2012128355A (ja) * 2010-12-17 2012-07-05 Sharp Corp 電子写真感光体およびそれを用いた画像形成装置

Also Published As

Publication number Publication date
EP2144711B1 (de) 2017-05-31
US8377243B2 (en) 2013-02-19
WO2008125302A3 (de) 2009-02-26
US20100143726A1 (en) 2010-06-10
WO2008125302A2 (de) 2008-10-23
ES2629782T3 (es) 2017-08-14
DE102007016995A1 (de) 2008-10-16
EP2144711A2 (de) 2010-01-20

Similar Documents

Publication Publication Date Title
PL2144711T3 (pl) Sposób przenoszenia nanowarstwy
GB2453238B (en) A system for completing injector wells
EP2137951A4 (en) TECHNIQUES TO COMPLETE A CONTACTS LIST
HK1141251A1 (en) A method for enhancing cell response
GB0624773D0 (en) A facility decontaminaton system
EP2152970A4 (en) METHOD FOR MANUFACTURING PAPER
IL206074A0 (en) A method for secure transactions
PL2150361T3 (pl) System wymiany walca
PL2117856T3 (pl) Sposób klimatyzowania pojazdu
GB0724491D0 (en) A method
PL2231355T3 (pl) System zawierający uchwyt
EP2123477A4 (en) METHOD OF GENERATING A MOSAIC
PL2041493T3 (pl) Sposób ogrzewania wsadu
EP2373342A4 (en) PROCESS FOR TRIF BIAS INDUCTION
EP2173110A4 (en) REALIZATION PROCEDURE FOR RECEIVING A CALL
GB0723927D0 (en) A gripper
GB2454346B8 (en) A method for reducing fuel usage
GB0705086D0 (en) Method for engaging a clutch
HK1129991A2 (en) A forming method for three-colour-scissors
HK1114738A2 (en) A spinal structure for robot
EP2146617A4 (en) DEVICE FOR RECTOSCOPE
GB0706436D0 (en) A method
TWI346613B (en) A method for forming a structure
TWI339916B (en) Method for making a battery
GB0618996D0 (en) A system for moving elements