PL1970474T3 - Urządzenie naparowujące do naparowywania metodą wiązki molekularnej oraz do epitaksji z wiązki molekularnej - Google Patents
Urządzenie naparowujące do naparowywania metodą wiązki molekularnej oraz do epitaksji z wiązki molekularnejInfo
- Publication number
- PL1970474T3 PL1970474T3 PL08003282T PL08003282T PL1970474T3 PL 1970474 T3 PL1970474 T3 PL 1970474T3 PL 08003282 T PL08003282 T PL 08003282T PL 08003282 T PL08003282 T PL 08003282T PL 1970474 T3 PL1970474 T3 PL 1970474T3
- Authority
- PL
- Poland
- Prior art keywords
- molecular beam
- vaporisation
- moving substrate
- molecular
- substrate
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
- C30B23/06—Heating of the deposition chamber, the substrate or the materials to be evaporated
- C30B23/066—Heating of the material to be evaporated
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007012370A DE102007012370A1 (de) | 2007-03-14 | 2007-03-14 | Bedampfungseinrichtung und Bedampfungsverfahren zur Molekularstrahlbedampfung und Molekularstrahlepitaxie |
EP08003282A EP1970474B1 (de) | 2007-03-14 | 2008-02-22 | Bedampfungseinrichtung zur Molekularstrahlbedampfung und Molekularstrahlepitaxie |
Publications (1)
Publication Number | Publication Date |
---|---|
PL1970474T3 true PL1970474T3 (pl) | 2011-01-31 |
Family
ID=39508192
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PL08003282T PL1970474T3 (pl) | 2007-03-14 | 2008-02-22 | Urządzenie naparowujące do naparowywania metodą wiązki molekularnej oraz do epitaksji z wiązki molekularnej |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1970474B1 (pl) |
AT (1) | ATE472619T1 (pl) |
DE (2) | DE102007012370A1 (pl) |
PL (1) | PL1970474T3 (pl) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2956411B1 (fr) * | 2010-02-16 | 2012-04-06 | Astron Fiamm Safety | Systeme de chauffage d'une source de depot en phase vapeur |
DE102010060292B4 (de) | 2010-11-01 | 2023-05-25 | Antec Solar Gmbh | Verfahren und CSS-Reaktor zum kontinuierlichen Beschichten von Substraten |
DE102010055285A1 (de) * | 2010-12-21 | 2012-06-21 | Solarion Ag Photovoltaik | Verdampferquelle, Verdampferkammer und Beschichtungsverfahren |
DE102011013245A1 (de) | 2011-03-07 | 2012-09-13 | Createc Fischer & Co. Gmbh | Vorrichtung für ein Vakuum und zum Übertragen oder Ermöglichen einer Bewegung |
DE102011016814B4 (de) * | 2011-04-12 | 2017-03-23 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Verdampferzellen-Verschlusseinrichtung für eine Beschichtungsanlage |
DE102012004082B4 (de) | 2012-02-29 | 2014-02-13 | Createc Fischer & Co. Gmbh | Vorrichtung für ein Vakuum und zum Übertragen oder Ermöglichen einer Bewegung |
DE102015117236A1 (de) * | 2015-10-09 | 2017-04-13 | Von Ardenne Gmbh | Verfahren zum Einbringen von Material in eine Prozesskammer und Vorrichtung zum Behandeln von Substraten in einer Prozesskammer |
EP3888467A1 (de) | 2017-07-03 | 2021-10-06 | Weber Maschinenbau GmbH Breidenbach | Bereitstellen von bahnförmigem zwischenblattmaterial an einem schneidbereich |
DE102017122754A1 (de) | 2017-09-29 | 2019-04-04 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Vorrichtung sowie Vakuumkammer |
DE102018131906A1 (de) * | 2018-12-12 | 2020-06-18 | VON ARDENNE Asset GmbH & Co. KG | Verdampfungsanordnung und Verfahren |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2440135A (en) * | 1944-08-04 | 1948-04-20 | Alexander Paul | Method of and apparatus for depositing substances by thermal evaporation in vacuum chambers |
DE2548357C2 (de) * | 1975-10-29 | 1983-05-26 | Robert Bosch Gmbh, 7000 Stuttgart | Einrichtung zur kontinuierlichen Vakuumbedampfung eines bandförmigen Trägermaterials mit Zink |
DE4422697C1 (de) * | 1994-06-29 | 1996-01-25 | Zsw | Verdampferquelle für eine Aufdampfanlage und ihre Verwendung |
US5906857A (en) * | 1997-05-13 | 1999-05-25 | Ultratherm, Inc. | Apparatus, system and method for controlling emission parameters attending vaporized in a HV environment |
US6202591B1 (en) * | 1998-11-12 | 2001-03-20 | Flex Products, Inc. | Linear aperture deposition apparatus and coating process |
DE19852326A1 (de) * | 1998-11-12 | 1999-11-18 | Siemens Ag | Verfahren zum Herstellen eines mit einem dotierten Leuchtstoff beschichteten Substrats sowie Vorrichtung zum Bedampfen eines Substrats mit einem Beschichtungsstoff |
US6551405B1 (en) * | 2000-09-22 | 2003-04-22 | The Board Of Trustees Of The University Of Arkansas | Tool and method for in situ vapor phase deposition source material reloading and maintenance |
DE10056686B4 (de) | 2000-11-15 | 2005-09-29 | Forschungsverbund Berlin E.V. | Verdampferzelle und ein Verfahren zur Herstellung von Aufdampfschichten |
JP2003002778A (ja) * | 2001-06-26 | 2003-01-08 | International Manufacturing & Engineering Services Co Ltd | 薄膜堆積用分子線セル |
EP1490895A4 (en) * | 2002-03-19 | 2007-10-10 | Innovex Inc | EVAPORATION SOURCE FOR A DEPOSITION PROCESS AND INSULATION FIXING PLATE AND HEATED WINDING PLATE AND METHOD FOR FIXING A HEATING WIRE |
DE102004041846B4 (de) * | 2004-04-27 | 2007-08-02 | Von Ardenne Anlagentechnik Gmbh | Verdampfungseinrichtung und Verfahren zum Verdampfen von Beschichtungsmaterial |
-
2007
- 2007-03-14 DE DE102007012370A patent/DE102007012370A1/de not_active Ceased
-
2008
- 2008-02-22 AT AT08003282T patent/ATE472619T1/de active
- 2008-02-22 EP EP08003282A patent/EP1970474B1/de not_active Not-in-force
- 2008-02-22 DE DE502008000852T patent/DE502008000852D1/de active Active
- 2008-02-22 PL PL08003282T patent/PL1970474T3/pl unknown
Also Published As
Publication number | Publication date |
---|---|
ATE472619T1 (de) | 2010-07-15 |
EP1970474A1 (de) | 2008-09-17 |
DE102007012370A1 (de) | 2008-09-18 |
DE502008000852D1 (de) | 2010-08-12 |
EP1970474B1 (de) | 2010-06-30 |
DE102007012370A8 (de) | 2009-01-08 |
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