PL1945401T3 - Urządzenie i sposób do rozdzielania materiału przy użyciu impulsów laserowych, z energią impulsu laserowego mniejszą niż energia impulsu laserowego do uzyskania rozdzielenia materiału - Google Patents

Urządzenie i sposób do rozdzielania materiału przy użyciu impulsów laserowych, z energią impulsu laserowego mniejszą niż energia impulsu laserowego do uzyskania rozdzielenia materiału

Info

Publication number
PL1945401T3
PL1945401T3 PL06777003T PL06777003T PL1945401T3 PL 1945401 T3 PL1945401 T3 PL 1945401T3 PL 06777003 T PL06777003 T PL 06777003T PL 06777003 T PL06777003 T PL 06777003T PL 1945401 T3 PL1945401 T3 PL 1945401T3
Authority
PL
Poland
Prior art keywords
laser
energy
laser pulses
sequence
laser pulse
Prior art date
Application number
PL06777003T
Other languages
English (en)
Inventor
Holger Lubatschowski
Tammo Ripken
Christian Rathjen
Original Assignee
Rowiak Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=37198698&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=PL1945401(T3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Rowiak Gmbh filed Critical Rowiak Gmbh
Publication of PL1945401T3 publication Critical patent/PL1945401T3/pl

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0626—Energy control of the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1 ns or less
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Laser Surgery Devices (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Lasers (AREA)
PL06777003T 2005-08-22 2006-08-21 Urządzenie i sposób do rozdzielania materiału przy użyciu impulsów laserowych, z energią impulsu laserowego mniejszą niż energia impulsu laserowego do uzyskania rozdzielenia materiału PL1945401T3 (pl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102005039833A DE102005039833A1 (de) 2005-08-22 2005-08-22 Vorrichtung und Verfahren zur Materialtrennung mit Laserpulsen
EP06777003.2A EP1945401B2 (de) 2005-08-22 2006-08-21 Vorrichtung und verfahren zur materialtrennung mit laserpulsen, mit energie eines laserpuls kleiner als die energie eines laserpuls zum erzeugen einer materialtrennung
PCT/EP2006/008225 WO2007022948A2 (de) 2005-08-22 2006-08-21 Vorrichtung und verfahren zur materialtrennung mit laserpulsen, mit energie eines laserpuls kleiner als die energie eines laserpuls zum erzeugung einer materialtrennung

Publications (1)

Publication Number Publication Date
PL1945401T3 true PL1945401T3 (pl) 2013-01-31

Family

ID=37198698

Family Applications (1)

Application Number Title Priority Date Filing Date
PL06777003T PL1945401T3 (pl) 2005-08-22 2006-08-21 Urządzenie i sposób do rozdzielania materiału przy użyciu impulsów laserowych, z energią impulsu laserowego mniejszą niż energia impulsu laserowego do uzyskania rozdzielenia materiału

Country Status (9)

Country Link
US (1) US9162319B2 (pl)
EP (1) EP1945401B2 (pl)
JP (1) JP2009504415A (pl)
CN (1) CN101257993A (pl)
AT (1) ATE552065T1 (pl)
CA (1) CA2619857C (pl)
DE (1) DE102005039833A1 (pl)
PL (1) PL1945401T3 (pl)
WO (1) WO2007022948A2 (pl)

Families Citing this family (85)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8221400B2 (en) 2005-08-22 2012-07-17 Sie Surgical Instruments Engineering Ag Apparatus for and method of refractive surgery with laser pulses
US8092446B2 (en) * 2005-10-14 2012-01-10 Carl Zeiss Meditec Ag Device and method for material processing by means of laser radiation
DE102005049281A1 (de) * 2005-10-14 2007-04-19 Carl Zeiss Meditec Ag Vorrichtung und Verfahren zur Materialbearbeitung mittels Laserstrahlung
DE102007012815B4 (de) * 2007-03-16 2024-06-06 Dmg Mori Ultrasonic Lasertec Gmbh Verfahren und Vorrichtung zur Bildung eines Gesenks
DE102007017119A1 (de) 2007-04-11 2008-10-16 Carl Zeiss Meditec Ag Vorrichtung und Verfahren zur Materialbearbeitung mittels Laserstrahlung
US8486055B2 (en) * 2007-06-26 2013-07-16 Bausch & Lomb Incorporated Method for modifying the refractive index of ocular tissues
US8231612B2 (en) * 2007-11-19 2012-07-31 Amo Development Llc. Method of making sub-surface photoalterations in a material
US9108270B2 (en) 2008-01-02 2015-08-18 Amo Development, Llc System and method for scanning a pulsed laser beam
US9101446B2 (en) 2008-01-02 2015-08-11 Intralase Corp. System and method for scanning a pulsed laser beam
JP2009291865A (ja) * 2008-06-04 2009-12-17 Rezakku:Kk 抜き型の製造方法および抜き型
DE102009012873B4 (de) * 2009-03-12 2021-08-19 Carl Zeiss Meditec Ag Ophthalmologisches Lasersystem und Steuereinheit
JP5525601B2 (ja) * 2009-06-04 2014-06-18 コアレイズ オーワイ レーザを用いた基板加工方法
DE102009038590B4 (de) * 2009-08-26 2017-02-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Bearbeitung von Werkstücken mit Laserstrahlung
EP2332688A1 (de) * 2009-12-08 2011-06-15 LCD Laser Cut AG Verfahren zum Herstellen eines magnetisierbaren Körpers
JP5397768B2 (ja) * 2009-12-10 2014-01-22 三菱マテリアル株式会社 レーザ加工装置およびレーザ加工方法
DE102010022634A1 (de) 2010-06-03 2011-12-08 Carl Zeiss Meditec Ag Vorrichtung und Verfahren zur Steuerung eines Lasersystems
DE102010023568A1 (de) * 2010-06-08 2011-12-08 Forschungsverbund Berlin E.V. Verfahren und Vorrichtung zum Herstellen nanostrukturierter Oberflächen
JP5634765B2 (ja) * 2010-06-24 2014-12-03 東芝機械株式会社 パルスレーザ加工方法およびパルスレーザ加工用データ作成方法
WO2012006736A2 (en) * 2010-07-12 2012-01-19 Filaser Inc. Method of material processing by laser filamentation
DE102011078825B4 (de) 2011-07-07 2018-07-19 Sauer Gmbh Lasertec Verfahren und Laserbearbeitungsmaschine zur Bearbeitung eines Werkstücks
DE102012205702B3 (de) * 2012-04-05 2013-05-23 Schaeffler Technologies AG & Co. KG Verfahren zum Markieren von Bauteilen
DE102012019438B4 (de) 2012-10-04 2015-05-21 Medite Gmbh Verfahren und Vorrichtung zur Bearbeitung histologischer Gewebeproben
WO2014079478A1 (en) 2012-11-20 2014-05-30 Light In Light Srl High speed laser processing of transparent materials
EP2754524B1 (de) 2013-01-15 2015-11-25 Corning Laser Technologies GmbH Verfahren und Vorrichtung zum laserbasierten Bearbeiten von flächigen Substraten, d.h. Wafer oder Glaselement, unter Verwendung einer Laserstrahlbrennlinie
EP2781296B1 (de) 2013-03-21 2020-10-21 Corning Laser Technologies GmbH Vorrichtung und verfahren zum ausschneiden von konturen aus flächigen substraten mittels laser
DE102013212577A1 (de) * 2013-06-28 2014-12-31 Trumpf Laser- Und Systemtechnik Gmbh Verfahren zum Abtragschneiden eines Werkstücks mittels eines gepulsten Laserstrahls
US9102011B2 (en) 2013-08-02 2015-08-11 Rofin-Sinar Technologies Inc. Method and apparatus for non-ablative, photoacoustic compression machining in transparent materials using filamentation by burst ultrafast laser pulses
US20150034613A1 (en) 2013-08-02 2015-02-05 Rofin-Sinar Technologies Inc. System for performing laser filamentation within transparent materials
US10017410B2 (en) 2013-10-25 2018-07-10 Rofin-Sinar Technologies Llc Method of fabricating a glass magnetic hard drive disk platter using filamentation by burst ultrafast laser pulses
US10252507B2 (en) 2013-11-19 2019-04-09 Rofin-Sinar Technologies Llc Method and apparatus for forward deposition of material onto a substrate using burst ultrafast laser pulse energy
US11053156B2 (en) 2013-11-19 2021-07-06 Rofin-Sinar Technologies Llc Method of closed form release for brittle materials using burst ultrafast laser pulses
US10005152B2 (en) 2013-11-19 2018-06-26 Rofin-Sinar Technologies Llc Method and apparatus for spiral cutting a glass tube using filamentation by burst ultrafast laser pulses
US9517929B2 (en) 2013-11-19 2016-12-13 Rofin-Sinar Technologies Inc. Method of fabricating electromechanical microchips with a burst ultrafast laser pulses
US10144088B2 (en) 2013-12-03 2018-12-04 Rofin-Sinar Technologies Llc Method and apparatus for laser processing of silicon by filamentation of burst ultrafast laser pulses
US9701563B2 (en) 2013-12-17 2017-07-11 Corning Incorporated Laser cut composite glass article and method of cutting
US9850160B2 (en) 2013-12-17 2017-12-26 Corning Incorporated Laser cutting of display glass compositions
US10293436B2 (en) 2013-12-17 2019-05-21 Corning Incorporated Method for rapid laser drilling of holes in glass and products made therefrom
US9815730B2 (en) * 2013-12-17 2017-11-14 Corning Incorporated Processing 3D shaped transparent brittle substrate
US9676167B2 (en) 2013-12-17 2017-06-13 Corning Incorporated Laser processing of sapphire substrate and related applications
US20150165560A1 (en) 2013-12-17 2015-06-18 Corning Incorporated Laser processing of slots and holes
US10442719B2 (en) 2013-12-17 2019-10-15 Corning Incorporated Edge chamfering methods
US11556039B2 (en) 2013-12-17 2023-01-17 Corning Incorporated Electrochromic coated glass articles and methods for laser processing the same
US20150187558A1 (en) * 2013-12-27 2015-07-02 Imra America, Inc. Pulse-burst assisted electrospray ionization mass spectrometer
US9938187B2 (en) 2014-02-28 2018-04-10 Rofin-Sinar Technologies Llc Method and apparatus for material processing using multiple filamentation of burst ultrafast laser pulses
KR102445217B1 (ko) 2014-07-08 2022-09-20 코닝 인코포레이티드 재료를 레이저 가공하는 방법 및 장치
WO2016010949A1 (en) 2014-07-14 2016-01-21 Corning Incorporated Method and system for forming perforations
WO2016010991A1 (en) 2014-07-14 2016-01-21 Corning Incorporated Interface block; system for and method of cutting a substrate being transparent within a range of wavelengths using such interface block
EP3536440A1 (en) 2014-07-14 2019-09-11 Corning Incorporated Glass article with a defect pattern
LT3169477T (lt) * 2014-07-14 2020-05-25 Corning Incorporated Skaidrių medžiagų apdorojimo sistema ir būdas, naudojant lazerio pluošto židinio linijas, kurių ilgis ir skersmuo yra reguliuojami
US9757815B2 (en) 2014-07-21 2017-09-12 Rofin-Sinar Technologies Inc. Method and apparatus for performing laser curved filamentation within transparent materials
US10047001B2 (en) 2014-12-04 2018-08-14 Corning Incorporated Glass cutting systems and methods using non-diffracting laser beams
JP2018507154A (ja) 2015-01-12 2018-03-15 コーニング インコーポレイテッド マルチフォトン吸収方法を用いた熱強化基板のレーザー切断
WO2016114934A1 (en) 2015-01-13 2016-07-21 Rofin-Sinar Technologies Inc. Method and system for scribing brittle material followed by chemical etching
WO2016154284A1 (en) 2015-03-24 2016-09-29 Corning Incorporated Laser cutting and processing of display glass compositions
CN107666983B (zh) 2015-03-27 2020-10-02 康宁股份有限公司 可透气窗及其制造方法
KR102499697B1 (ko) 2015-07-10 2023-02-14 코닝 인코포레이티드 유연한 기판 시트에서의 홀의 연속 제조 방법 및 이에 관한 물품
KR102405144B1 (ko) 2016-05-06 2022-06-07 코닝 인코포레이티드 투명 기판들로부터의 윤곽 형상들의 레이저 절단 및 제거
US10410883B2 (en) 2016-06-01 2019-09-10 Corning Incorporated Articles and methods of forming vias in substrates
US10794679B2 (en) 2016-06-29 2020-10-06 Corning Incorporated Method and system for measuring geometric parameters of through holes
JP7090594B2 (ja) 2016-07-29 2022-06-24 コーニング インコーポレイテッド レーザ加工するための装置および方法
US10522963B2 (en) 2016-08-30 2019-12-31 Corning Incorporated Laser cutting of materials with intensity mapping optical system
WO2018064409A1 (en) 2016-09-30 2018-04-05 Corning Incorporated Apparatuses and methods for laser processing transparent workpieces using non-axisymmetric beam spots
LT3529214T (lt) 2016-10-24 2021-02-25 Corning Incorporated Substrato apdorojimo stotis lakšto formos stiklo substratų lazeriniam mašininiam apdorojimui
US10752534B2 (en) 2016-11-01 2020-08-25 Corning Incorporated Apparatuses and methods for laser processing laminate workpiece stacks
US10688599B2 (en) 2017-02-09 2020-06-23 Corning Incorporated Apparatus and methods for laser processing transparent workpieces using phase shifted focal lines
US11078112B2 (en) 2017-05-25 2021-08-03 Corning Incorporated Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same
US10580725B2 (en) 2017-05-25 2020-03-03 Corning Incorporated Articles having vias with geometry attributes and methods for fabricating the same
US10626040B2 (en) 2017-06-15 2020-04-21 Corning Incorporated Articles capable of individual singulation
CN107520545B (zh) * 2017-09-01 2019-06-21 大族激光科技产业集团股份有限公司 激光钻孔方法
DE102018216507A1 (de) 2017-09-29 2019-04-04 Carl Zeiss Meditec Ag Vorrichtung und Verfahren zur Materialbearbeitung mittels Laserstrahlung
US12180108B2 (en) 2017-12-19 2024-12-31 Corning Incorporated Methods for etching vias in glass-based articles employing positive charge organic molecules
US11554984B2 (en) 2018-02-22 2023-01-17 Corning Incorporated Alkali-free borosilicate glasses with low post-HF etch roughness
DE102018205270A1 (de) * 2018-04-09 2019-10-10 Scanlab Gmbh Laserstrahlpositioniersystem, Laserbearbeitungsvorrichtung und Steuerungsverfahren
EP3811085A4 (en) * 2018-06-21 2022-03-16 Genomic Health, Inc. AUTOMATED SAMPLE PREPARATION SYSTEM AND APPLICATIONS THEREOF
CN109471119A (zh) * 2018-09-30 2019-03-15 维沃移动通信有限公司 一种控制功耗的方法及终端设备
US10615044B1 (en) * 2018-10-18 2020-04-07 Asm Technology Singapore Pte Ltd Material cutting using laser pulses
DE102019219121A1 (de) * 2018-12-10 2020-06-10 Trumpf Laser Gmbh Verfahren zum Abtragen von Material von einer Oberfläche
CN111037115A (zh) * 2019-12-30 2020-04-21 英诺激光科技股份有限公司 一种雾面玻璃的激光切割方法及装置
US20210252644A1 (en) * 2020-02-13 2021-08-19 Hach Company pH ELECTRODE WITH CARBON REGION
DE102020122598A1 (de) * 2020-08-28 2022-03-03 Trumpf Laser- Und Systemtechnik Gmbh Verfahren zum Bearbeiten eines Materials
CN112646703B (zh) * 2020-12-29 2023-01-24 中国科学院长春光学精密机械与物理研究所 一种单分子荧光基因测序光学系统
DE102021200748A1 (de) * 2021-01-28 2022-07-28 Carl Zeiss Smt Gmbh Reflektives optisches Element und Verfahren zur Reparatur und/oder Aufbereitung eines reflektiven optischen Elements
JP7768757B2 (ja) * 2021-12-24 2025-11-12 株式会社ディスコ 面処理装置
TWI880732B (zh) * 2023-04-25 2025-04-11 聚嶸科技股份有限公司 用於切割複合材料的GHz脈衝串雷射光源系統與方法
TWI902485B (zh) * 2023-04-25 2025-10-21 聚嶸科技股份有限公司 用於切割複合材料的GHz脈衝串雷射光源系統與方法

Family Cites Families (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3527198A (en) * 1966-03-26 1970-09-08 Tokyo Shibaura Electric Co Method and apparatus for working diamonds by means of laser light beam
GB2218660B (en) 1988-05-16 1991-09-25 Lumonics Ltd Method of material processing using a laser beam
US5312396A (en) * 1990-09-06 1994-05-17 Massachusetts Institute Of Technology Pulsed laser system for the surgical removal of tissue
DE4232915A1 (de) * 1992-10-01 1994-04-07 Hohla Kristian Vorrichtung zur Formung der Cornea durch Abtragen von Gewebe
US5656186A (en) * 1994-04-08 1997-08-12 The Regents Of The University Of Michigan Method for controlling configuration of laser induced breakdown and ablation
US5786560A (en) * 1995-03-31 1998-07-28 Panasonic Technologies, Inc. 3-dimensional micromachining with femtosecond laser pulses
DE19636429C1 (de) * 1996-09-07 1997-11-20 Jenoptik Jena Gmbh Verfahren zur Herstellung einer Schwächelinie mittels Laser
US5931834A (en) * 1996-10-15 1999-08-03 Eclipse Surgical Technologies, Inc. Method for non-synchronous laser-assisted myocardial revascularization
DE19730028C2 (de) * 1997-07-14 2002-12-12 Deutsche Telekom Ag Verfahren zum Trennen und Bearbeiten von auf einem Halbleitersubstrat im Verband hergestellten Halbleiterchips aus A III - B V- Verbindungshalbleitern unter Verwendung eines Excimer-Lasers
DE19745294A1 (de) * 1997-10-14 1999-04-15 Biotronik Mess & Therapieg Verfahren zur Herstellung feinstrukturierter medizintechnischer Implantate
US5928221A (en) * 1997-11-17 1999-07-27 Coherent, Inc. Fluence monitoring method for laser treatment of biological tissue
WO2001008547A2 (en) * 1999-07-28 2001-02-08 Visx, Incorporated Hydration and topography measurements for laser sculpting
US6552301B2 (en) * 2000-01-25 2003-04-22 Peter R. Herman Burst-ultrafast laser machining method
US6509547B1 (en) * 2000-04-07 2003-01-21 Resonetics, Inc. Method for laser stripping of optical fiber and flat cable
DE10018251C2 (de) * 2000-04-13 2003-08-14 Leica Microsystems Laserschneid-Vorrichtung mit Mikroskop
DE10020559A1 (de) * 2000-04-27 2001-10-31 Hannover Laser Zentrum Laser-Bearbeitung von Materialien
US20010035447A1 (en) * 2000-05-05 2001-11-01 Andreas Gartner Methods for laser cut initiation
JP4659300B2 (ja) * 2000-09-13 2011-03-30 浜松ホトニクス株式会社 レーザ加工方法及び半導体チップの製造方法
US6676878B2 (en) † 2001-01-31 2004-01-13 Electro Scientific Industries, Inc. Laser segmented cutting
WO2002034455A1 (en) * 2000-10-26 2002-05-02 Xsil Technology Limited Control of laser machining
US7247240B2 (en) * 2002-03-11 2007-07-24 Nippon Shokubai Co., Ltd. Method for treating waste water
US6580054B1 (en) * 2002-06-10 2003-06-17 New Wave Research Scribing sapphire substrates with a solid state UV laser
DE10250015B3 (de) 2002-10-25 2004-09-16 Universität Kassel Adaptive, rückkopplungsgesteuerte Materialbearbeitung mit ultrakurzen Laserpulsen
DE10300091A1 (de) * 2003-01-04 2004-07-29 Lubatschowski, Holger, Dr. Mikrotom
US7351241B2 (en) * 2003-06-02 2008-04-01 Carl Zeiss Meditec Ag Method and apparatus for precision working of material
JP2005118821A (ja) 2003-10-16 2005-05-12 Olympus Corp 超短パルスレーザ加工方法
DE10358927B4 (de) * 2003-12-16 2021-09-09 Carl Zeiss Meditec Ag Laservorrichtung und Verfahren zur Materialbearbeitung mittels Laserstrahlung
JP4348199B2 (ja) * 2004-01-16 2009-10-21 日立ビアメカニクス株式会社 レーザ加工方法およびレーザ加工装置
US20060100610A1 (en) * 2004-03-05 2006-05-11 Wallace Daniel T Methods using a robotic catheter system
US7486705B2 (en) * 2004-03-31 2009-02-03 Imra America, Inc. Femtosecond laser processing system with process parameters, controls and feedback
DE102004039023A1 (de) 2004-08-11 2006-02-23 Siemens Ag Verfahren zur Bearbeitung eines Werkstücks mittels Laserstrahlung, Laserbearbeitungssystem
US7169687B2 (en) * 2004-11-03 2007-01-30 Intel Corporation Laser micromachining method

Also Published As

Publication number Publication date
WO2007022948A3 (de) 2007-05-10
US20090294422A1 (en) 2009-12-03
EP1945401B2 (de) 2016-12-28
JP2009504415A (ja) 2009-02-05
DE102005039833A1 (de) 2007-03-01
EP1945401A2 (de) 2008-07-23
CA2619857A1 (en) 2007-03-01
CN101257993A (zh) 2008-09-03
CA2619857C (en) 2014-12-09
EP1945401B1 (de) 2012-04-04
US9162319B2 (en) 2015-10-20
ATE552065T1 (de) 2012-04-15
WO2007022948A2 (de) 2007-03-01

Similar Documents

Publication Publication Date Title
ATE552065T1 (de) Vorrichtung und verfahren zur materialtrennung mit laserpulsen, mit energie eines laserpuls kleiner als die energie eines laserpuls zum erzeugen einer materialtrennung
GB2433459B (en) Laser processing apparatus and laser processing method as well as debris extraction mechanism and debris extraction method
GB2440701B (en) Method and system for collecting cells following laser microdissection
WO2015108991A3 (en) Laser-based modification of transparent materials
WO2010081171A3 (en) Laser mediated sectioning and transfer of cell colonies
WO2009039315A3 (en) Methods and apparatus for laser treatment of the crystalline lens
MY185774A (en) Laser processing of slots and holes
WO2005099957A3 (en) Pulsed laser processing with controlled thermal and physical alterations
GB2399880B (en) Apparatus and methods for monitoring output from pulsed neutron sources
WO2016083610A3 (de) Festkörperteilung mittels stoffumwandlung
ZA200902146B (en) Method and apparatus for the milling cutting of materials
TWI350783B (en) Method and apparatus for scoring and separating a brittle material with a single beam of radiation
SG119217A1 (en) Workpiece dividing method utilizing laser beam
WO2003072521A3 (en) Method for cutting non-metallic materials and device for carrying out said method
GB2443587A (en) Energy monitoring or control of individual vias formed during laser micromachining
DE502007003728D1 (de) Verfahren zum hinterschleifen der schneidzähne von gewindebohrern, gewindeformern und ähnlichen werkzeugen, und schleifmaschine zur durchführung des verfahrens
GB0800500D0 (en) System and method for high power laser processing
MX2018002987A (es) Metodos y sistemas para eliminar material intersticial de materiales superabrasivos de elementos de corte mediante uso de haces de energia.
WO2016083609A3 (de) Laserbasiertes trennverfahren
EP1872292A4 (en) METHOD AND APPARATUS FOR CUTTING A MACHINING PIECE
WO2013115857A3 (en) Laser system with multiple laser pulses for fabrication of solar cells
DE602006019445D1 (de) Vorrichtung, system und verfahren zum abschneiden von faserbündeln
SG111233A1 (en) Processing method using laser beam
TWI350782B (en) Method for removing by-products in laser beam process and apparartus for the same
GB2438562B (en) Interior material and laser beam processing method for the same