PL1648597T3 - Element filtracyjny oraz sposób jego wytwarzania - Google Patents

Element filtracyjny oraz sposób jego wytwarzania

Info

Publication number
PL1648597T3
PL1648597T3 PL04763086T PL04763086T PL1648597T3 PL 1648597 T3 PL1648597 T3 PL 1648597T3 PL 04763086 T PL04763086 T PL 04763086T PL 04763086 T PL04763086 T PL 04763086T PL 1648597 T3 PL1648597 T3 PL 1648597T3
Authority
PL
Poland
Prior art keywords
membrane
layer
membrane layer
etching
substrate
Prior art date
Application number
PL04763086T
Other languages
English (en)
Inventor
Wilfried Hofmann
Original Assignee
Nft Nanofiltertechnik Ges Mit Beschraenkter Haftung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nft Nanofiltertechnik Ges Mit Beschraenkter Haftung filed Critical Nft Nanofiltertechnik Ges Mit Beschraenkter Haftung
Publication of PL1648597T3 publication Critical patent/PL1648597T3/pl

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0081—After-treatment of organic or inorganic membranes
    • B01D67/0083—Thermal after-treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0002—Organic membrane manufacture
    • B01D67/0023—Organic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/0032—Organic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0002—Organic membrane manufacture
    • B01D67/0037—Organic membrane manufacture by deposition from the gaseous phase, e.g. CVD, PVD
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0053—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/006—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
    • B01D67/0062—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods by micromachining techniques, e.g. using masking and etching steps, photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0072—Inorganic membrane manufacture by deposition from the gaseous phase, e.g. sputtering, CVD, PVD
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0081—After-treatment of organic or inorganic membranes
    • B01D67/0086—Mechanical after-treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0081—After-treatment of organic or inorganic membranes
    • B01D67/009—After-treatment of organic or inorganic membranes with wave-energy, particle-radiation or plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/02—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/10—Supported membranes; Membrane supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/10—Supported membranes; Membrane supports
    • B01D69/108—Inorganic support material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/0213—Silicon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/0215—Silicon carbide; Silicon nitride; Silicon oxycarbide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
    • C04B38/04—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof by dissolving-out added substances
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2323/00—Details relating to membrane preparation
    • B01D2323/34—Use of radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/08—Patterned membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/24—Mechanical properties, e.g. strength
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
    • C04B2111/00793—Uses not provided for elsewhere in C04B2111/00 as filters or diaphragms
    • C04B2111/00801—Membranes; Diaphragms
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S55/00—Gas separation
    • Y10S55/05—Methods of making filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Optics & Photonics (AREA)
  • Thermal Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • Filtering Materials (AREA)
  • Micromachines (AREA)
PL04763086T 2003-07-11 2004-07-03 Element filtracyjny oraz sposób jego wytwarzania PL1648597T3 (pl)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE10331709 2003-07-11
DE10353894A DE10353894B4 (de) 2003-07-11 2003-11-18 Filterelement und Verfahren zu dessen Herstellung
EP04763086A EP1648597B1 (de) 2003-07-11 2004-07-03 Filterelement und verfahren zu dessen herstellung
PCT/EP2004/007262 WO2005007276A1 (de) 2003-07-11 2004-07-03 Filterelement und verfahren zu dessen herstellung

Publications (1)

Publication Number Publication Date
PL1648597T3 true PL1648597T3 (pl) 2009-04-30

Family

ID=34081638

Family Applications (1)

Application Number Title Priority Date Filing Date
PL04763086T PL1648597T3 (pl) 2003-07-11 2004-07-03 Element filtracyjny oraz sposób jego wytwarzania

Country Status (14)

Country Link
US (1) US7655075B2 (pl)
EP (1) EP1648597B1 (pl)
JP (1) JP4917429B2 (pl)
KR (1) KR101152577B1 (pl)
CN (1) CN100434150C (pl)
AT (1) ATE408448T1 (pl)
AU (1) AU2004257407B2 (pl)
BR (1) BRPI0412466A (pl)
CA (1) CA2532103A1 (pl)
DE (2) DE10353894B4 (pl)
ES (1) ES2314429T3 (pl)
PL (1) PL1648597T3 (pl)
RU (1) RU2355466C2 (pl)
WO (1) WO2005007276A1 (pl)

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US7846393B2 (en) * 2005-04-21 2010-12-07 California Institute Of Technology Membrane filter for capturing circulating tumor cells
US7922795B2 (en) 2005-04-29 2011-04-12 University Of Rochester Ultrathin nanoscale membranes, methods of making, and uses thereof
EP1874443A4 (en) 2005-04-29 2009-09-16 Univ Rochester ULTRA-THAN POROUS NANOSCAL MEMBRANES, MANUFACTURING METHOD AND USES THEREOF
EP1999247A4 (en) 2006-03-14 2011-08-31 Univ Rochester CELL CULTURE DEVICES HAVING ULTRA-POROUS MEMBRANE AND USES THEREOF
WO2008061224A1 (en) * 2006-11-16 2008-05-22 Protochips, Inc. Sample support structure and methods
US20080277332A1 (en) * 2007-05-11 2008-11-13 Becton, Dickinson And Company Micromachined membrane filter device for a glaucoma implant and method for making the same
JP5541556B2 (ja) * 2007-06-20 2014-07-09 日産自動車株式会社 水素分離装置及びその製造方法
JP5042110B2 (ja) * 2008-04-22 2012-10-03 サルナス、ペトロニス ナノ細孔の製造
DE102008035772B4 (de) * 2008-07-31 2015-02-12 Airbus Defence and Space GmbH Partikelfilter sowie Herstellverfahren hierfür
US8622223B2 (en) * 2008-12-17 2014-01-07 General Electric Company Membrane assemblies and methods of making and using the same
US20100313758A1 (en) * 2009-06-12 2010-12-16 Co2Crc Technologies Pty Ltd. Gas absorption membranes and the manufacture thereof
RU2446863C1 (ru) * 2010-09-10 2012-04-10 Сергей Михайлович Кузьмин Способ изготовления мембранного фильтра
DE102011015981A1 (de) * 2011-04-04 2013-05-16 Mann + Hummel Gmbh Be- und Entlüftungsvorrichtung eines Gehäuses und Verfahren zur Herstellung einer solchen
US9029813B2 (en) * 2011-05-20 2015-05-12 Asml Netherlands B.V. Filter for material supply apparatus of an extreme ultraviolet light source
WO2013029896A1 (en) * 2011-09-02 2013-03-07 Asml Netherlands B.V. Radiation source and method for lithographic apparatus for device manufacture
JP5518039B2 (ja) * 2011-12-28 2014-06-11 株式会社日立製作所 フィルター、及びその製造方法
CA2873638C (en) * 2012-05-16 2021-08-24 Regents Of The University Of California Low resistance microfabricated filter
FR3006606B1 (fr) * 2013-06-11 2015-07-03 Tech Avancees Et Membranes Industrielles Procede de fabrication de membranes de filtration par technique additive et membranes obtenues
CN103341291B (zh) * 2013-06-30 2015-07-15 成都易态膜分离技术有限公司 烧结多孔材料及应用该多孔材料的过滤元件
US9415349B2 (en) * 2014-02-28 2016-08-16 General Electric Company Porous membrane patterning technique
CN104014257B (zh) * 2014-05-30 2016-08-17 天津理源科技有限公司 一种精密输液用自动止液核孔滤膜及其制备方法
CN111249921B (zh) * 2014-08-11 2022-01-18 国立大学法人信州大学 过滤器成形体的制造方法
BR112017007745B1 (pt) 2014-10-15 2022-01-18 Veolia Water Solutions & Technologies Support Tratamento de água produzida particularmente obtida a partir de um processo de recuperação de óleo quimicamente aprimorado com uso de polímeros de aumento de viscosidade
DE102015101425B4 (de) * 2014-10-31 2018-02-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Herstellung eines Bauelements auf Basis eines strukturierbaren Substrats mit dreidimensionaler, Poren im nm-Bereich aufweisender Membranstruktur
CN105727755B (zh) * 2014-12-09 2018-08-28 中国科学院金属研究所 一种梯度孔隙氮化硅结合碳化硅膜管及其制备方法
CN104607054B (zh) * 2014-12-31 2017-11-10 浙江南洋慧通新材料有限公司 具有止液功能的重离子微孔膜制备方法及使用膜的输液器
US9517927B2 (en) 2015-04-29 2016-12-13 Taiwan Semiconductor Manufacturing Co., Ltd. MEMS structure having rounded edge stopper and method of fabricating the same
DE102015108068A1 (de) * 2015-05-21 2016-11-24 Infineon Technologies Ag Batteriezellen und ein Verfahren zum Bilden einer Batteriezelle
KR101759093B1 (ko) * 2015-07-01 2017-07-18 서울대학교산학협력단 나노포어 구조체, 나노포어 구조를 이용한 이온소자 및 나노멤브레인 구조체 제조방법
CN110981545A (zh) * 2019-11-07 2020-04-10 佛山市中国科学院上海硅酸盐研究所陶瓷研发中心 碳化硅陶瓷分离及其制备方法
EP3851848A1 (en) * 2020-01-20 2021-07-21 Infineon Technologies AG Micromechanical device with perforated membrane
CN113425011B (zh) * 2020-02-11 2023-12-29 宁卡赛科技(上海)有限公司 用于疾病预防的新型口罩及其生产方法

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CH678403A5 (en) * 1989-06-12 1991-09-13 Sulzer Ag Prodn. of micro-filter membranes contg. microscopic pores - by selectively dissolving grain of different metallurgical composition within its structure
US5139624A (en) * 1990-12-06 1992-08-18 Sri International Method for making porous semiconductor membranes
NL9200902A (nl) * 1992-05-21 1993-12-16 Cornelis Johannes Maria Van Ri Keramisch membraan voor microfiltratie, alsmede werkwijze ter vervaardiging van een dergelijk membraan.
NL9401260A (nl) * 1993-11-12 1995-06-01 Cornelis Johannes Maria Van Ri Membraan voor microfiltratie, ultrafiltratie, gasscheiding en katalyse, werkwijze ter vervaardiging van een dergelijk membraan, mal ter vervaardiging van een dergelijk membraan, alsmede diverse scheidingssystemen omvattende een dergelijk membraan.
US5882496A (en) * 1997-02-27 1999-03-16 The Regents Of The University Of California Porous silicon structures with high surface area/specific pore size
NL1006118C2 (nl) * 1997-05-24 1998-11-25 Koninkl Grolsch N V Inrichting voor het filtreren van een gefermenteerde vloeistof.
AU1389799A (en) * 1997-11-07 1999-05-31 California Institute Of Technology Micromachined membrane particle filter using parylene reinforcement
CA2351325A1 (en) * 1998-12-02 2000-06-08 Aleksander J. Franz Integrated palladium-based micromembranes for hydrogen separation and hydrogenation/dehydrogenation reactions
WO2001036321A1 (en) * 1999-11-17 2001-05-25 The Regents Of The University Of California Apparatus and method for forming a membrane with nanometer scale pores
BR0008062A (pt) * 1999-12-08 2001-11-06 Baxter Int Membrana de filtro microporosa, método de produzir membrana de filtro microporosa, e separador que emprega membranas de filtro microporosas
US20030150791A1 (en) * 2002-02-13 2003-08-14 Cho Steven T. Micro-fluidic anti-microbial filter
CN1290599C (zh) * 2002-07-25 2006-12-20 大日本印刷株式会社 用于氢气制造用过滤器的薄膜支持基板及氢气制造用过滤器制造方法
ITTO20030032A1 (it) * 2003-01-24 2004-07-25 Varian Spa Membrana permeabile selettivamente ai gas e metodo per la sua realizzazione.
US7282148B2 (en) * 2003-10-30 2007-10-16 International Business Machines Corporation Porous silicon composite structure as large filtration array

Also Published As

Publication number Publication date
KR101152577B1 (ko) 2012-06-01
KR20060104983A (ko) 2006-10-09
BRPI0412466A (pt) 2006-09-19
WO2005007276A1 (de) 2005-01-27
RU2355466C2 (ru) 2009-05-20
US7655075B2 (en) 2010-02-02
RU2006103984A (ru) 2007-08-20
DE10353894A1 (de) 2005-02-17
US20070039471A1 (en) 2007-02-22
ES2314429T3 (es) 2009-03-16
DE10353894B4 (de) 2007-02-15
AU2004257407A1 (en) 2005-01-27
CN1849164A (zh) 2006-10-18
EP1648597A1 (de) 2006-04-26
CA2532103A1 (en) 2005-01-27
EP1648597B1 (de) 2008-09-17
JP2009513317A (ja) 2009-04-02
DE502004008098D1 (de) 2008-10-30
AU2004257407B2 (en) 2010-07-01
ATE408448T1 (de) 2008-10-15
CN100434150C (zh) 2008-11-19
JP4917429B2 (ja) 2012-04-18

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