PH12017500592B1 - Copper film-forming composition and method for manufacturing copper film in which said composition is used - Google Patents
Copper film-forming composition and method for manufacturing copper film in which said composition is usedInfo
- Publication number
- PH12017500592B1 PH12017500592B1 PH12017500592A PH12017500592A PH12017500592B1 PH 12017500592 B1 PH12017500592 B1 PH 12017500592B1 PH 12017500592 A PH12017500592 A PH 12017500592A PH 12017500592 A PH12017500592 A PH 12017500592A PH 12017500592 B1 PH12017500592 B1 PH 12017500592B1
- Authority
- PH
- Philippines
- Prior art keywords
- copper film
- composition
- forming composition
- compound represented
- manufacturing
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/08—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of metallic material
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemically Coating (AREA)
Abstract
Provided is a copper film-forming composition that is in a form of a solution not containing a solid phase such as a fine particle, and that makes it possible to obtain a copper film having sufficient electrical conductivity by applying the composition on a substrate and heating the substrate at a temperture of lower than 160øC. The composition is a copper film-forming composition containing 0.1-3.0 mol/kg of copper formate or a hydrate of copper formate, at least one compound selected from the group consisting of a compound represented by the following formula (1) and a compound represented by the following formula (1'), and a piperidine compound represented by general formula (2).
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014204419A JP6387280B2 (en) | 2014-10-03 | 2014-10-03 | Composition for forming copper film and method for producing copper film using the same |
PCT/JP2015/076062 WO2016052162A1 (en) | 2014-10-03 | 2015-09-14 | Copper film-forming composition and method for manufacturing copper film in which said composition is used |
Publications (2)
Publication Number | Publication Date |
---|---|
PH12017500592A1 PH12017500592A1 (en) | 2017-08-30 |
PH12017500592B1 true PH12017500592B1 (en) | 2017-08-30 |
Family
ID=55630204
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PH12017500592A PH12017500592B1 (en) | 2014-10-03 | 2017-03-30 | Copper film-forming composition and method for manufacturing copper film in which said composition is used |
Country Status (6)
Country | Link |
---|---|
JP (1) | JP6387280B2 (en) |
KR (1) | KR20170057443A (en) |
CN (1) | CN107075681B (en) |
PH (1) | PH12017500592B1 (en) |
TW (1) | TWI656239B (en) |
WO (1) | WO2016052162A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6815219B2 (en) * | 2017-02-13 | 2021-01-20 | 株式会社Adeka | Composition for forming a nickel film and a method for producing a nickel film |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004162110A (en) * | 2002-11-12 | 2004-06-10 | Mitsubishi Paper Mills Ltd | Copper/amine composition |
JP2004277868A (en) * | 2003-03-19 | 2004-10-07 | Mitsubishi Paper Mills Ltd | Preparation method of conductive composition |
JP2011034750A (en) * | 2009-07-31 | 2011-02-17 | Tosoh Corp | Composition for conductive film formation and conductive film formation method |
JP5620795B2 (en) * | 2010-11-26 | 2014-11-05 | 株式会社Adeka | Composition for forming copper film and method for producing copper film using the composition |
JP5923351B2 (en) * | 2012-03-16 | 2016-05-24 | 株式会社Adeka | Composition for forming copper film and method for producing copper film using the composition |
JP6156991B2 (en) * | 2013-07-25 | 2017-07-05 | 株式会社Adeka | Composition for forming copper film and method for producing copper film using the same |
JP6254025B2 (en) * | 2014-03-12 | 2017-12-27 | 株式会社Adeka | Composition for forming copper film and method for producing copper film using the same |
-
2014
- 2014-10-03 JP JP2014204419A patent/JP6387280B2/en active Active
-
2015
- 2015-09-14 KR KR1020177011538A patent/KR20170057443A/en not_active Application Discontinuation
- 2015-09-14 WO PCT/JP2015/076062 patent/WO2016052162A1/en active Application Filing
- 2015-09-14 CN CN201580053151.6A patent/CN107075681B/en active Active
- 2015-09-30 TW TW104132089A patent/TWI656239B/en active
-
2017
- 2017-03-30 PH PH12017500592A patent/PH12017500592B1/en unknown
Also Published As
Publication number | Publication date |
---|---|
CN107075681B (en) | 2019-04-23 |
PH12017500592A1 (en) | 2017-08-30 |
CN107075681A (en) | 2017-08-18 |
KR20170057443A (en) | 2017-05-24 |
TW201619438A (en) | 2016-06-01 |
JP2016074925A (en) | 2016-05-12 |
JP6387280B2 (en) | 2018-09-05 |
TWI656239B (en) | 2019-04-11 |
WO2016052162A1 (en) | 2016-04-07 |
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