PH12011000344A1 - Die bonder incorporating dual-head dispenser - Google Patents

Die bonder incorporating dual-head dispenser

Info

Publication number
PH12011000344A1
PH12011000344A1 PH12011000344A PH12011000344A PH12011000344A1 PH 12011000344 A1 PH12011000344 A1 PH 12011000344A1 PH 12011000344 A PH12011000344 A PH 12011000344A PH 12011000344 A PH12011000344 A PH 12011000344A PH 12011000344 A1 PH12011000344 A1 PH 12011000344A1
Authority
PH
Philippines
Prior art keywords
substrate
axis
nozzle
bond pads
dispensing
Prior art date
Application number
PH12011000344A
Other versions
PH12011000344B1 (en
Inventor
Lam Kui Kam
Tang Yen Hsi
Wong Yiu Yan
Wan Hok Man
Original Assignee
Asm Assembly Automation Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asm Assembly Automation Ltd filed Critical Asm Assembly Automation Ltd
Publication of PH12011000344A1 publication Critical patent/PH12011000344A1/en
Publication of PH12011000344B1 publication Critical patent/PH12011000344B1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/27—Manufacturing methods
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/741—Apparatus for manufacturing means for bonding, e.g. connectors
    • H01L24/743—Apparatus for manufacturing layer connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/27—Manufacturing methods
    • H01L2224/273—Manufacturing methods by local deposition of the material of the layer connector
    • H01L2224/2731—Manufacturing methods by local deposition of the material of the layer connector in liquid form
    • H01L2224/27312—Continuous flow, e.g. using a microsyringe, a pump, a nozzle or extrusion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • H01L2224/29001—Core members of the layer connector
    • H01L2224/2902—Disposition
    • H01L2224/29034—Disposition the layer connector covering only portions of the surface to be connected
    • H01L2224/29036—Disposition the layer connector covering only portions of the surface to be connected covering only the central area of the surface to be connected
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • H01L2224/29001—Core members of the layer connector
    • H01L2224/29099—Material
    • H01L2224/2919—Material with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/741—Apparatus for manufacturing means for bonding, e.g. connectors
    • H01L2224/743—Apparatus for manufacturing layer connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/756—Means for supplying the connector to be connected in the bonding apparatus
    • H01L2224/75611—Feeding means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/757—Means for aligning
    • H01L2224/75743—Suction holding means
    • H01L2224/75744—Suction holding means in the lower part of the bonding apparatus, e.g. in the apparatus chuck
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/759—Means for monitoring the connection process
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319—Arrangement of the layer connectors prior to mounting
    • H01L2224/83192—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/838—Bonding techniques
    • H01L2224/8385—Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector

Abstract

Adhesive is dispensed for conducting die bonding onto a substrate including rows of bond pads aligned along a first axis and columns of bond pads aligned along a second axis transverse to the first axis where target dispensing positions are located. A first dispensing head incorporating a first nozzle and a second dispensing head incorporating a second nozzle are provided and the substrate is fed along the first axis to a position where the first and second dispensing heads are located. Pattern recognition of a columnar section of the substrate comprising one or more consecutive columns of bond pads with an optical system may be conducted by moving the optical system along the second axis relative to the substrate. Thereafter, the first nozzle and the second nozzle are driven concurrently to dispense adhesive from the first and second nozzles onto the target dispensing positions in the same columnar section of the substrate.
PH12011000344A 2010-11-08 2011-10-26 Die bonder incorporating dual-head dispenser PH12011000344B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/941,174 US7977231B1 (en) 2010-11-08 2010-11-08 Die bonder incorporating dual-head dispenser

Publications (2)

Publication Number Publication Date
PH12011000344A1 true PH12011000344A1 (en) 2016-04-04
PH12011000344B1 PH12011000344B1 (en) 2016-04-04

Family

ID=44245501

Family Applications (1)

Application Number Title Priority Date Filing Date
PH12011000344A PH12011000344B1 (en) 2010-11-08 2011-10-26 Die bonder incorporating dual-head dispenser

Country Status (10)

Country Link
US (1) US7977231B1 (en)
EP (1) EP2450947B1 (en)
JP (1) JP5745386B2 (en)
KR (1) KR101242402B1 (en)
CN (1) CN102569103B (en)
HK (1) HK1170337A1 (en)
MY (1) MY152215A (en)
PH (1) PH12011000344B1 (en)
SG (1) SG181221A1 (en)
TW (1) TWI458024B (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013063719A1 (en) * 2011-11-02 2013-05-10 无锡华润安盛科技有限公司 Method for die-bonding pressure sensor die into pre-plastic packaged lead box, and device thereof
US8996285B2 (en) 2012-05-09 2015-03-31 Hyundai Motor Company System for detecting malfunction of variable valve lift apparatus and method for the same
JP6073625B2 (en) * 2012-09-28 2017-02-01 キヤノンマシナリー株式会社 Substrate transport method and substrate transport apparatus
TWI587416B (en) * 2013-01-25 2017-06-11 先進科技新加坡有限公司 A wire bonder and method of calibrating a wire bonder
CH707890B1 (en) 2013-04-15 2017-12-15 Besi Switzerland Ag Device for applying adhesive to a substrate.
US20140341691A1 (en) * 2013-05-14 2014-11-20 Kui Kam Lam Bonding apparatus having a plurality of rotary transfer arms for transferring electronic devices for bonding
KR101647968B1 (en) * 2015-03-19 2016-08-16 앰코 테크놀로지 코리아 주식회사 Chip attach device for manufacturing semiconductor package
CN108313724A (en) * 2017-12-28 2018-07-24 芜湖瑞思机器人有限公司 A kind of donkey-hide gelatin blob of viscose puts conveying mechanism after inker automatically
US11289445B2 (en) * 2018-12-24 2022-03-29 Asm Technology Singapore Pte Ltd Die bonder incorporating rotatable adhesive dispenser head
CN112742631B (en) * 2020-12-24 2021-12-28 厦门天马微电子有限公司 Nozzle assembly, jet printing device and jet printing method
CN115424947B (en) * 2022-09-21 2023-08-29 深圳市三联盛科技股份有限公司 Semiconductor chip mounting technology and equipment
CN116544253B (en) * 2023-05-08 2024-03-22 马鞍山东大汇泽半导体科技有限公司 Packaging method of image sensor

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JPS61235075A (en) * 1985-04-11 1986-10-20 Toshiba Corp Feeding method for adhesive liquid by dispenser head
KR970013262A (en) * 1995-08-30 1997-03-29 김광호 Leadframe with Extended Internal Leads
KR970024104A (en) * 1995-10-30 1997-05-30 김광호 Package with lead structure pad with dual structure
US5813590A (en) * 1995-12-18 1998-09-29 Micron Technology, Inc. Extended travel wire bonding machine
JPH10137660A (en) * 1996-11-18 1998-05-26 Ricoh Co Ltd Paste coating apparatus
US6204093B1 (en) * 1997-08-21 2001-03-20 Micron Technology, Inc. Method and apparatus for applying viscous materials to a lead frame
US6112973A (en) * 1997-10-31 2000-09-05 Texas Instruments Incorporated Angled transducer-dual head bonder for optimum ultrasonic power application and flexibility for tight pitch leadframe
US6331452B1 (en) * 1999-04-12 2001-12-18 Verdicom, Inc. Method of fabricating integrated circuit package with opening allowing access to die
JP4675505B2 (en) * 2001-06-21 2011-04-27 株式会社東芝 Coating device, coating method, and display device manufacturing method
US6564979B2 (en) * 2001-07-18 2003-05-20 Micron Technology, Inc. Method and apparatus for dispensing adhesive on microelectronic substrate supports
US20030044534A1 (en) * 2001-09-06 2003-03-06 Lau Siu Wing Multi-pin epoxy writing apparatus
US7332819B2 (en) * 2002-01-09 2008-02-19 Micron Technology, Inc. Stacked die in die BGA package
US6861278B2 (en) * 2002-04-11 2005-03-01 Nordson Corporation Method and apparatus for underfilling semiconductor devices
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Also Published As

Publication number Publication date
HK1170337A1 (en) 2013-02-22
US7977231B1 (en) 2011-07-12
CN102569103B (en) 2015-04-08
KR101242402B1 (en) 2013-03-12
EP2450947A3 (en) 2017-05-10
EP2450947A2 (en) 2012-05-09
JP5745386B2 (en) 2015-07-08
TWI458024B (en) 2014-10-21
KR20120049139A (en) 2012-05-16
EP2450947B1 (en) 2018-07-04
CN102569103A (en) 2012-07-11
PH12011000344B1 (en) 2016-04-04
TW201227840A (en) 2012-07-01
SG181221A1 (en) 2012-06-28
MY152215A (en) 2014-08-29
JP2012104828A (en) 2012-05-31

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