NZ207628A - Gamma radiation scatter detection: plural detectors 'see' at different depths - Google Patents

Gamma radiation scatter detection: plural detectors 'see' at different depths

Info

Publication number
NZ207628A
NZ207628A NZ207628A NZ20762884A NZ207628A NZ 207628 A NZ207628 A NZ 207628A NZ 207628 A NZ207628 A NZ 207628A NZ 20762884 A NZ20762884 A NZ 20762884A NZ 207628 A NZ207628 A NZ 207628A
Authority
NZ
New Zealand
Prior art keywords
overlay
radiation
density
values
source
Prior art date
Application number
NZ207628A
Other languages
English (en)
Inventor
J L Molbert
E R Riddle
Original Assignee
Troxler Electronic Lab Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Troxler Electronic Lab Inc filed Critical Troxler Electronic Lab Inc
Publication of NZ207628A publication Critical patent/NZ207628A/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/203Measuring back scattering
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Radiation-Therapy Devices (AREA)
  • Measurement Of Radiation (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
NZ207628A 1983-03-22 1984-03-26 Gamma radiation scatter detection: plural detectors 'see' at different depths NZ207628A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/477,820 US4525854A (en) 1983-03-22 1983-03-22 Radiation scatter apparatus and method

Publications (1)

Publication Number Publication Date
NZ207628A true NZ207628A (en) 1988-02-29

Family

ID=23897498

Family Applications (1)

Application Number Title Priority Date Filing Date
NZ207628A NZ207628A (en) 1983-03-22 1984-03-26 Gamma radiation scatter detection: plural detectors 'see' at different depths

Country Status (11)

Country Link
US (1) US4525854A (ref)
EP (1) EP0120676B1 (ref)
JP (1) JPS59218941A (ref)
AT (1) ATE40750T1 (ref)
AU (1) AU557007B2 (ref)
CA (1) CA1219970A (ref)
DE (1) DE3476698D1 (ref)
ES (1) ES8607546A1 (ref)
IL (1) IL71299A (ref)
NZ (1) NZ207628A (ref)
ZA (1) ZA842056B (ref)

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Also Published As

Publication number Publication date
AU2598684A (en) 1984-09-27
US4525854A (en) 1985-06-25
ZA842056B (en) 1984-10-31
ES531211A0 (es) 1986-06-01
EP0120676A3 (en) 1985-06-12
IL71299A0 (en) 1984-06-29
DE3476698D1 (en) 1989-03-16
EP0120676A2 (en) 1984-10-03
IL71299A (en) 1988-11-15
ATE40750T1 (de) 1989-02-15
JPS59218941A (ja) 1984-12-10
EP0120676B1 (en) 1989-02-08
CA1219970A (en) 1987-03-31
JPH0247697B2 (ref) 1990-10-22
ES8607546A1 (es) 1986-06-01
AU557007B2 (en) 1986-11-27

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