NO953891L - Fremgangsmåte for sintring av aluminiumnitrid til sintrede legemer med höy termisk ledningsevne - Google Patents

Fremgangsmåte for sintring av aluminiumnitrid til sintrede legemer med höy termisk ledningsevne

Info

Publication number
NO953891L
NO953891L NO953891A NO953891A NO953891L NO 953891 L NO953891 L NO 953891L NO 953891 A NO953891 A NO 953891A NO 953891 A NO953891 A NO 953891A NO 953891 L NO953891 L NO 953891L
Authority
NO
Norway
Prior art keywords
aluminum nitride
sintered bodies
thermal conductivity
high thermal
sintering aluminum
Prior art date
Application number
NO953891A
Other languages
English (en)
Other versions
NO953891D0 (no
Inventor
Theresa A Guiton
Lynne K Mills
Original Assignee
Dow Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Chemical Co filed Critical Dow Chemical Co
Publication of NO953891L publication Critical patent/NO953891L/no
Publication of NO953891D0 publication Critical patent/NO953891D0/no

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)

Abstract

Sintrede aluminiumnitrid-legemer ned en TC på minst 200 W/m»fremstilles ved sintring un-der ikke-reduserende betingelser og regulering av innbyrdes forbundne parametere så som atmosfære ved utbrenning av bindemiddel, opp-varmingshastighet, sintringtempera-tur, tid ved sintringstemperatur, avkjelingshastighet og avkjølings-temperatur. De sintrede legemer kan også ha en TC på over 270 W/m»K.
NO953891A 1993-03-30 1995-09-29 Fremgangsmåte for sintring av aluminiumnitrid til sintrede legemer med höy termisk ledningsevne NO953891D0 (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/039,657 US5320990A (en) 1993-03-30 1993-03-30 Process for sintering aluminum nitride to a high thermal conductivity and resultant sintered bodies
PCT/US1994/001688 WO1994022787A1 (en) 1993-03-30 1994-02-15 An improved process for sintering aluminum nitride to a high thermal conductivity and resultant sintered bodies

Publications (2)

Publication Number Publication Date
NO953891L true NO953891L (no) 1995-09-29
NO953891D0 NO953891D0 (no) 1995-09-29

Family

ID=21906654

Family Applications (1)

Application Number Title Priority Date Filing Date
NO953891A NO953891D0 (no) 1993-03-30 1995-09-29 Fremgangsmåte for sintring av aluminiumnitrid til sintrede legemer med höy termisk ledningsevne

Country Status (9)

Country Link
US (1) US5320990A (no)
EP (1) EP0691944A1 (no)
JP (1) JPH08508461A (no)
KR (1) KR960701812A (no)
AU (1) AU6392594A (no)
CA (1) CA2155836A1 (no)
IL (1) IL109150A0 (no)
NO (1) NO953891D0 (no)
WO (1) WO1994022787A1 (no)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5541145A (en) * 1993-12-22 1996-07-30 The Carborundum Company/Ibm Corporation Low temperature sintering route for aluminum nitride ceramics
US5424261A (en) * 1993-12-22 1995-06-13 The Carborundum Company Low temperature sintering route for aluminum nitride ceramics
JPH07187788A (ja) * 1993-12-27 1995-07-25 Ngk Spark Plug Co Ltd 窒化アルミニウム焼結体及びその製造方法
US5688450A (en) * 1994-12-21 1997-11-18 Hughes Aircraft Company Method of making an electronic package structure utilizing aluminum nitride/aluminum composite material
US5766394A (en) * 1995-09-08 1998-06-16 Smith International, Inc. Method for forming a polycrystalline layer of ultra hard material
US6017485A (en) * 1996-03-28 2000-01-25 Carborundum Corporation Process for making a low electrical resistivity, high purity aluminum nitride electrostatic chuck
JP3318514B2 (ja) * 1997-08-06 2002-08-26 日本碍子株式会社 半導体支持装置
US6723274B1 (en) * 1999-12-09 2004-04-20 Saint-Gobain Ceramics & Plastics, Inc. High-purity low-resistivity electrostatic chucks
DE10085268T1 (de) 1999-12-09 2002-12-12 Saint Gobain Ceramics Elektrostatische Scheibenhalter mit Flachfilmelektrode
US6603650B1 (en) 1999-12-09 2003-08-05 Saint-Gobain Ceramics And Plastics, Inc. Electrostatic chuck susceptor and method for fabrication
US6888236B2 (en) * 2000-03-07 2005-05-03 Ibiden Co., Ltd. Ceramic substrate for manufacture/inspection of semiconductor
JP2002160974A (ja) * 2000-11-22 2002-06-04 Ibiden Co Ltd 窒化アルミニウム焼結体、窒化アルミニウム焼結体の製造方法、セラミック基板およびセラミック基板の製造方法
TW200521103A (en) * 2003-11-21 2005-07-01 Toshiba Kk High thermally conductive aluminum nitride sintered product
JP4564257B2 (ja) * 2003-12-24 2010-10-20 株式会社東芝 高熱伝導性窒化アルミニウム焼結体
CN100545082C (zh) * 2004-03-29 2009-09-30 电气化学工业株式会社 氮化铝粉末及氮化铝烧结体
KR101114938B1 (ko) * 2006-03-13 2012-03-06 가부시끼가이샤 도꾸야마 질화알루미늄 소결체의 제조 방법
US20080076658A1 (en) * 2006-09-26 2008-03-27 Tokuyama Corporation Aluminum nitride sintered body
US8580593B2 (en) * 2009-09-10 2013-11-12 Micron Technology, Inc. Epitaxial formation structures and associated methods of manufacturing solid state lighting devices
WO2012012384A1 (en) * 2010-07-20 2012-01-26 Hexatech, Inc. Polycrystalline aluminum nitride material and method of production thereof
JP2014507363A (ja) 2010-12-14 2014-03-27 ヘクサテック，インコーポレイテッド 多結晶質窒化アルミニウム焼結体の熱膨張処理、および半導体製造へのその応用
EP3231558B1 (en) 2016-04-11 2020-02-05 3M Innovative Properties Company A green body, a grinding wheel and a method for manufacturing at least a green body
TWI589023B (zh) * 2016-06-27 2017-06-21 國立暨南國際大學 半導體裝置用基材及使用其之半導體裝置
CN109809823B (zh) * 2019-02-25 2022-04-05 银川艾森达新材料发展有限公司 氮化铝陶瓷基板的烧结方法
CN113121244B (zh) * 2021-03-26 2022-07-29 福建华清电子材料科技有限公司 一种高强度氮化铝陶瓷基板及其制备方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4897372A (en) * 1985-12-18 1990-01-30 General Electric Company High thermal conductivity ceramic body
US4847221A (en) * 1987-01-13 1989-07-11 Kabushiki Kaisha Toshiba AlN sintered body having high thermal conductivity and a method of fabricating the same
US4778778A (en) * 1987-06-03 1988-10-18 Keramont Advanced Ceramic Products Corporation Process for the production of sintered aluminum nitrides
JPH01203270A (ja) * 1988-02-08 1989-08-16 Sumitomo Electric Ind Ltd 高熱伝導性窒化アルミニウム焼結体及びその製造法
US4952535A (en) * 1989-07-19 1990-08-28 Corning Incorporated Aluminum nitride bodies and method

Also Published As

Publication number Publication date
EP0691944A1 (en) 1996-01-17
KR960701812A (ko) 1996-03-28
WO1994022787A1 (en) 1994-10-13
JPH08508461A (ja) 1996-09-10
CA2155836A1 (en) 1994-10-13
IL109150A0 (en) 1994-06-24
US5320990A (en) 1994-06-14
AU6392594A (en) 1994-10-24
NO953891D0 (no) 1995-09-29

Similar Documents

Publication Publication Date Title
NO953891L (no) Fremgangsmåte for sintring av aluminiumnitrid til sintrede legemer med höy termisk ledningsevne
MX9606581A (es) Conjunto de techado fotovoltaico, regulado termicamente.
EP0181740A3 (en) Heat retaining means
LU90721B1 (en) Method for producing metal foams and furnace for producing same
CA2355078A1 (en) Combination conduction/convection furnace
EP0196243A3 (en) Temperature gradient furnace for materials processing
NO984068L (no) FremgangsmÕte ved drift av solaranlegg, og anordning for gjennomf°ring av denne fremgangmÕten
MY142253A (en) Reflow soldering method, and reflow soldering equipment for soldering by breflow soldering method
JPS57113938A (en) Stirling engine
RU97118729A (ru) Способ отжига стекла
JPS5734212A (en) Thermostatic controller
Bergman Combined Hot Isostatic Pressing and Heat Treatment Advantageous for Turbine and Other Near-Net Shape Parts
ATE152183T1 (de) Vorrichtung zur wärmebehandlung metallischer werkstücke
JPS52126607A (en) Preheating of material for hot rolling
GB2289328B (en) Heat accumulating stove
Stewart Thermal expansion--its importance and practical aspects
JPS5274951A (en) High temperature heat exchanger
JPS57120058A (en) Method and apparatus for accumulating energy utilizing solar heat
JPS52141404A (en) Hot stove
JPS5281009A (en) Heating furnace with holding equipment
UA28139A (uk) Спосіб термообробки виробів з монокристалів корунду
Wang et al. Microstructure and Properties of Gas Sulfo-Nitrocarburizing Layer
Tang et al. Function on high temperature furnace wall surface in radiation heat transfer
JPS5328007A (en) Dehumidifying and heating method for air to be sent into blast furnace
Mao et al. Process of Bluing Compounded With Quenching in Graphite Fluidised Bed and Its Application