NO911381L - Lysfoelsom elektrostatisk master og anvendselse av denne. - Google Patents

Lysfoelsom elektrostatisk master og anvendselse av denne.

Info

Publication number
NO911381L
NO911381L NO91911381A NO911381A NO911381L NO 911381 L NO911381 L NO 911381L NO 91911381 A NO91911381 A NO 91911381A NO 911381 A NO911381 A NO 911381A NO 911381 L NO911381 L NO 911381L
Authority
NO
Norway
Prior art keywords
master
acid
photoinitiator
production
light
Prior art date
Application number
NO91911381A
Other languages
English (en)
Norwegian (no)
Other versions
NO911381D0 (no
Inventor
Richard Douglas Bauer
Catherine Teh-Lin Chang
Original Assignee
Du Pont
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Du Pont filed Critical Du Pont
Publication of NO911381D0 publication Critical patent/NO911381D0/no
Publication of NO911381L publication Critical patent/NO911381L/no

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03GELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02Charge-receiving layers
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0045Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/039Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03GELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02Charge-receiving layers
    • G03G5/026Layers in which during the irradiation a chemical reaction occurs whereby electrically conductive patterns are formed in the layers, e.g. for chemixerography
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/061Etching masks
    • H05K3/065Etching masks applied by electrographic, electrophotographic or magnetographic methods
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3452Solder masks

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials For Photolithography (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
NO91911381A 1990-04-10 1991-04-09 Lysfoelsom elektrostatisk master og anvendselse av denne. NO911381L (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/507,338 US5120629A (en) 1990-04-10 1990-04-10 Positive-working photosensitive electrostatic master

Publications (2)

Publication Number Publication Date
NO911381D0 NO911381D0 (no) 1991-04-09
NO911381L true NO911381L (no) 1991-10-11

Family

ID=24018253

Family Applications (1)

Application Number Title Priority Date Filing Date
NO91911381A NO911381L (no) 1990-04-10 1991-04-09 Lysfoelsom elektrostatisk master og anvendselse av denne.

Country Status (8)

Country Link
US (1) US5120629A (de)
EP (1) EP0451741A3 (de)
JP (1) JPH04350661A (de)
KR (1) KR910018855A (de)
CN (1) CN1055825A (de)
AU (1) AU7420391A (de)
CA (1) CA2037826A1 (de)
NO (1) NO911381L (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5102771A (en) * 1990-11-26 1992-04-07 Minnesota Mining And Manufacturing Company Photosensitive materials
US5225316A (en) * 1990-11-26 1993-07-06 Minnesota Mining And Manufacturing Company An imagable article comprising a photosensitive composition comprising a polymer having acid labile pendant groups
JPH0539444A (ja) * 1990-11-30 1993-02-19 Hitachi Chem Co Ltd ポジ型感光性アニオン電着塗料樹脂組成物、これを用いた電着塗装浴、電着塗装法及びプリント回路板の製造方法
DE59108086D1 (de) * 1990-12-20 1996-09-19 Siemens Ag Photoresist
DE4120172A1 (de) * 1991-06-19 1992-12-24 Hoechst Ag Strahlungsempfindliches gemisch, das als bindemittel neue polymere mit einheiten aus amiden von (alpha),(beta)-ungesaettigten carbonsaeuren enthaelt
DE4126409A1 (de) * 1991-08-09 1993-02-11 Hoechst Ag Strahlungsempfindliches gemisch mit einem polymeren bindemittel mit einheiten aus (alpha)-(beta)-ungesaettigten carbonsaeuren
US5654354A (en) * 1991-11-14 1997-08-05 E. I. Du Pont De Nemours And Company Compositions for diffusion patterning
US5275689A (en) * 1991-11-14 1994-01-04 E. I. Du Pont De Nemours And Company Method and compositions for diffusion patterning
JP2726348B2 (ja) * 1992-02-03 1998-03-11 沖電気工業株式会社 放射線感応性樹脂組成物
US5580695A (en) * 1992-02-25 1996-12-03 Japan Synthetic Rubber Co., Ltd. Chemically amplified resist
US5338818A (en) * 1992-09-10 1994-08-16 International Business Machines Corporation Silicon containing positive resist for DUV lithography
FI95441C (fi) * 1994-05-31 1996-02-12 Leiras Oy Inhalointilaitteen lääkeainekammio
DE59508640D1 (de) * 1994-06-22 2000-09-21 Ciba Sc Holding Ag Positiv-Photoresist
DE4444669A1 (de) * 1994-12-15 1996-06-20 Hoechst Ag Strahlungsempfindliches Gemisch
JPH08262699A (ja) * 1995-03-28 1996-10-11 Canon Inc レジスト組成物、レジスト処理方法及び装置
JPH09166871A (ja) * 1995-12-15 1997-06-24 Sumitomo Chem Co Ltd フォトレジスト組成物
EP0845479B1 (de) * 1996-11-28 2004-07-14 Kaneka Corporation Verfahren zur Herstellung eines (Meth)acrylpolymers mit endständiger Hydroxylgruppe und dieses Polymer
DE69818098T2 (de) * 1997-10-15 2004-07-01 Fuji Photo Film Co., Ltd., Minami-Ashigara Wärmeempfindliches farbbildendes Polymer
US6884562B1 (en) * 1998-10-27 2005-04-26 E. I. Du Pont De Nemours And Company Photoresists and processes for microlithography
WO2001055789A2 (en) * 2000-01-25 2001-08-02 Infineon Technologies Ag Chemically amplified short wavelength resist
US20030228534A1 (en) * 2002-05-31 2003-12-11 Jiayi Zhu Organophotoreceptor with a light stabilizer
KR20040016661A (ko) * 2002-08-19 2004-02-25 에스케이케미칼주식회사 토너용 폴리에스테르 수지
US9488913B2 (en) * 2014-10-17 2016-11-08 Taiwan Semiconductor Manufacturing Company, Ltd. Photoresist having decreased outgassing

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3408186A (en) * 1965-01-18 1968-10-29 Xerox Corp Electrophotographic materials and methods employing photoconductive resinous charge transfer complexes
US3600169A (en) * 1966-11-25 1971-08-17 Bard Lab Inc Photochemical electrostatic copying sheet and process using free radicals
US4111692A (en) * 1976-06-04 1978-09-05 Toyo Boseki Kabushiki Kaisha Electrostatic printing plate
US4491628A (en) * 1982-08-23 1985-01-01 International Business Machines Corporation Positive- and negative-working resist compositions with acid generating photoinitiator and polymer with acid labile groups pendant from polymer backbone
US4552833A (en) * 1984-05-14 1985-11-12 International Business Machines Corporation Radiation sensitive and oxygen plasma developable resist
US4837124A (en) * 1986-02-24 1989-06-06 Hoechst Celanese Corporation High resolution photoresist of imide containing polymers
US4661429A (en) * 1986-04-28 1987-04-28 Eastman Kodak Company Photoelectrographic elements and imaging method
US4732831A (en) * 1986-05-01 1988-03-22 E. I. Du Pont De Nemours And Company Xeroprinting with photopolymer master
EP0243934A3 (de) * 1986-05-01 1990-04-18 E.I. Du Pont De Nemours And Company Elektrophotographisches Drucken mit einer Druckplatte auf der Basis von Photopolymeren
US4996136A (en) * 1988-02-25 1991-02-26 At&T Bell Laboratories Radiation sensitive materials and devices made therewith
JPH021868A (ja) * 1988-06-13 1990-01-08 Konica Corp 光電写真材料及び光電写真法
US4945020A (en) * 1989-06-30 1990-07-31 E. I. Du Pont De Nemours And Company Photosensitive leuco dye containing electrostatic master with printout image
US4985332A (en) * 1990-04-10 1991-01-15 E. I. Du Pont De Nemours And Company Resist material with carbazole diazonium salt acid generator and process for use

Also Published As

Publication number Publication date
EP0451741A2 (de) 1991-10-16
CN1055825A (zh) 1991-10-30
KR910018855A (ko) 1991-11-30
US5120629A (en) 1992-06-09
EP0451741A3 (en) 1992-02-26
NO911381D0 (no) 1991-04-09
AU7420391A (en) 1991-10-17
JPH04350661A (ja) 1992-12-04
CA2037826A1 (en) 1991-10-11

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