NO2153704T3 - - Google Patents

Info

Publication number
NO2153704T3
NO2153704T3 NO08759500A NO08759500A NO2153704T3 NO 2153704 T3 NO2153704 T3 NO 2153704T3 NO 08759500 A NO08759500 A NO 08759500A NO 08759500 A NO08759500 A NO 08759500A NO 2153704 T3 NO2153704 T3 NO 2153704T3
Authority
NO
Norway
Application number
NO08759500A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NO2153704T3 publication Critical patent/NO2153704T3/no

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32321Discharge generated by other radiation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4415Acoustic wave CVD
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/2475Generating plasma using acoustic pressure discharges
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/2475Generating plasma using acoustic pressure discharges
    • H05H1/2493Generating plasma using acoustic pressure discharges the plasma being activated using horns
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31Surface property or characteristic of web, sheet or block

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Acoustics & Sound (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
NO08759500A 2007-05-11 2008-05-09 NO2153704T3 (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DKPA200700717 2007-05-11
PCT/EP2008/055773 WO2008138901A1 (en) 2007-05-11 2008-05-09 Enhancing plasma surface modification using high intensity and high power ultrasonic acoustic waves

Publications (1)

Publication Number Publication Date
NO2153704T3 true NO2153704T3 (no) 2018-07-14

Family

ID=39711085

Family Applications (2)

Application Number Title Priority Date Filing Date
NO08759500A NO2153704T3 (no) 2007-05-11 2008-05-09
NO08759518A NO2153705T3 (no) 2007-05-11 2008-05-13

Family Applications After (1)

Application Number Title Priority Date Filing Date
NO08759518A NO2153705T3 (no) 2007-05-11 2008-05-13

Country Status (8)

Country Link
US (3) US8399795B2 (no)
EP (2) EP2153704B1 (no)
CN (2) CN101743785B (no)
DK (2) DK2153704T3 (no)
ES (2) ES2662029T3 (no)
NO (2) NO2153704T3 (no)
PL (2) PL2153704T3 (no)
WO (2) WO2008138901A1 (no)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5458300B2 (ja) * 2009-02-09 2014-04-02 公立大学法人横浜市立大学 微細構造物の蒸着装置及び方法
EP2455332B1 (en) * 2010-11-19 2014-02-12 Imec Method for producing temporary cap on a MEMS device
EP2691496A2 (en) * 2011-03-29 2014-02-05 Fuelina, Inc. Hybrid fuel and method of making the same
US8603207B2 (en) 2011-04-20 2013-12-10 General Electric Company Acoustic cleaning assembly for use in power generation systems and method of assembling same
CN102206866A (zh) * 2011-04-30 2011-10-05 常州天合光能有限公司 介质阻挡放电氢等离子钝化方法
KR101492175B1 (ko) 2011-05-03 2015-02-10 주식회사 엘지화학 양극 활물질 입자의 표면 처리 방법 및 이로부터 형성된 양극 활물질 입자
DE102011076806A1 (de) * 2011-05-31 2012-12-06 Leibniz-Institut für Plasmaforschung und Technologie e.V. Vorrichtung und Verfahren zur Erzeugung eines kalten, homogenen Plasmas unter Atmosphärendruckbedingungen
US9540545B2 (en) * 2011-09-02 2017-01-10 Schlumberger Technology Corporation Plasma treatment in fabricating directional drilling assemblies
CN102595756A (zh) * 2012-03-15 2012-07-18 大连海事大学 一种气液混合介质阻挡放电的发生装置及发生方法
WO2014093513A1 (en) * 2012-12-11 2014-06-19 Cold Plasma Medical Technologies, Inc. Method and apparatus for cold plasma food contact surface sanitation
US9567542B2 (en) * 2013-03-15 2017-02-14 Fuelina Technologies, Llc Hybrid fuel and method of making the same
US10800092B1 (en) * 2013-12-18 2020-10-13 Surfx Technologies Llc Low temperature atmospheric pressure plasma for cleaning and activating metals
US10709007B2 (en) * 2014-09-30 2020-07-07 Plasco Conversion Technologies Inc. Non-equilibrium plasma system and method of refining syngas
US10308885B2 (en) 2014-12-03 2019-06-04 Drexel University Direct incorporation of natural gas into hydrocarbon liquid fuels
CN105879597A (zh) * 2014-12-24 2016-08-24 苏州超等环保科技有限公司 一种螺旋式等离子高压放电管的废气处理装置
US10427129B2 (en) * 2015-04-17 2019-10-01 LLT International (Ireland) Ltd. Systems and methods for facilitating reactions in gases using shockwaves produced in a supersonic gaseous vortex
CN107529789A (zh) 2015-04-28 2018-01-02 马斯公司 制备灭菌湿宠物食品的方法
US10194672B2 (en) 2015-10-23 2019-02-05 NanoGuard Technologies, LLC Reactive gas, reactive gas generation system and product treatment using reactive gas
KR101788808B1 (ko) * 2015-11-26 2017-11-15 조선대학교산학협력단 상온 및 상압 조건하에서 이산화탄소와 수소를 이용한 메탄가스 합성방법 및 합성장치
US10543457B2 (en) 2017-10-18 2020-01-28 Thrivaltech, Llc Isolated plasma array treatment systems
US20230193442A1 (en) * 2017-11-17 2023-06-22 Sms Group Gmbh Method for the preoxidation of strip steel in a reaction chamber arranged in a furnace chamber
CN109030615A (zh) * 2018-11-03 2018-12-18 宁波华仪宁创智能科技有限公司 热解吸装置及质谱分析方法
US10925144B2 (en) 2019-06-14 2021-02-16 NanoGuard Technologies, LLC Electrode assembly, dielectric barrier discharge system and use thereof
CN111111581B (zh) * 2019-12-19 2021-07-02 中国科学院电工研究所 一种等离子体燃料重整装置
JPWO2021131817A1 (no) * 2019-12-27 2021-07-01
US11896731B2 (en) 2020-04-03 2024-02-13 NanoGuard Technologies, LLC Methods of disarming viruses using reactive gas
EP4169023A1 (en) * 2020-06-17 2023-04-26 Awe Technologies, LLC Destruction of airborne pathogens, and microorganisms on grains and dried food using ultrasound
CN111954360A (zh) * 2020-09-18 2020-11-17 云南电网有限责任公司电力科学研究院 基于混合气体的大面积冷等离子体发生装置及方法
US11510307B1 (en) * 2021-05-08 2022-11-22 Perriquest Defense Research Enterprises, Llc Plasma engine using reactive species

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2755767A (en) * 1951-07-10 1956-07-24 Centre Nat Rech Scient High power generators of sounds and ultra-sounds
US3169507A (en) * 1961-06-14 1965-02-16 Northern Ind Inc Elastic wave generator
US5367139A (en) * 1989-10-23 1994-11-22 International Business Machines Corporation Methods and apparatus for contamination control in plasma processing
JP2820599B2 (ja) * 1993-08-31 1998-11-05 株式会社伸興 除塵装置
JP3405439B2 (ja) * 1996-11-05 2003-05-12 株式会社荏原製作所 固体表面の清浄化方法
JPH11335869A (ja) 1998-05-20 1999-12-07 Seiko Epson Corp 表面処理方法及び装置
JP2000040689A (ja) 1998-07-23 2000-02-08 Hitachi Chem Co Ltd プラズマエッチング用電極板
US6383301B1 (en) * 1998-08-04 2002-05-07 E. I. Du Pont De Nemours And Company Treatment of deagglomerated particles with plasma-activated species
US6231933B1 (en) * 1999-03-18 2001-05-15 Primaxx, Inc. Method and apparatus for metal oxide chemical vapor deposition on a substrate surface
AU2002212616A1 (en) * 2000-11-10 2002-05-21 Apit Corp. Sa Atmospheric plasma method for treating sheet electricity conducting materials and device therefor
US20020182101A1 (en) * 2001-03-27 2002-12-05 Pavel Koulik Process and device for plasma surface treatment
US7288293B2 (en) * 2001-03-27 2007-10-30 Apit Corp. S.A. Process for plasma surface treatment and device for realizing the process
MXPA03008615A (es) * 2001-03-27 2005-03-07 Apit Corp S A Metodo de tratamiento de superficie por plasma y dispositivo para la aplicacion de dicho metodo.
DK176184B1 (da) * 2001-03-28 2006-12-11 Force Technology Fremgangsmåde og apparat til desinfektion af et emne ved en overfladebehandling
US6554969B1 (en) * 2001-07-11 2003-04-29 Advanced Micro Devices, Inc. Acoustically enhanced deposition processes, and systems for performing same
TW507858U (en) * 2001-07-23 2002-10-21 Lin Chau Tang Energy saving lighting device with high illumination
US7001631B2 (en) * 2002-07-30 2006-02-21 Steris Inc. Low temperature sanitization of human pathogens from the surfaces of food and food packaging
WO2005049886A2 (fr) * 2003-11-20 2005-06-02 Apit Corp. Sa Procede de depot de film mince par plasma
JP2006013903A (ja) 2004-06-25 2006-01-12 Seiko Epson Corp 音響レンズ及びこれを用いた超音波スピーカ
UA95486C2 (uk) * 2006-07-07 2011-08-10 Форс Текнолоджи Спосіб та система для поліпшеного застосування високоінтенсивних акустичних хвиль
US20080220133A1 (en) * 2007-03-05 2008-09-11 Gary Bruce Carman Food sanitation system

Also Published As

Publication number Publication date
US8399795B2 (en) 2013-03-19
ES2662029T3 (es) 2018-04-05
DK2153704T3 (en) 2018-04-23
EP2153705B1 (en) 2017-12-27
US20110048251A1 (en) 2011-03-03
EP2153704B1 (en) 2018-02-14
NO2153705T3 (no) 2018-05-26
CN101743785B (zh) 2012-11-14
EP2153705A1 (en) 2010-02-17
ES2659714T3 (es) 2018-03-19
US20100304146A1 (en) 2010-12-02
CN101743785A (zh) 2010-06-16
PL2153704T3 (pl) 2018-06-29
US20180122622A1 (en) 2018-05-03
PL2153705T3 (pl) 2018-06-29
CN101731025B (zh) 2012-12-12
DK2153705T3 (en) 2018-03-19
EP2153704A1 (en) 2010-02-17
CN101731025A (zh) 2010-06-09
WO2008138901A1 (en) 2008-11-20
WO2008138915A1 (en) 2008-11-20

Similar Documents

Publication Publication Date Title
JP2009123656A5 (no)
CN104335712B8 (no)
CN300727985S (zh) 标签(jmy-016)
CN300728912S (zh) 组合式操作台
CN300728409S (zh) 天花灯(6)
CN300726086S (zh) 钥匙圈
CN300728410S (zh) 横插灯(方头)
CN300795566S (zh) 真空泵
CN300726282S (zh) 包装纸
CN300726283S (zh) 玻璃板(第六印象)
CN300726363S (zh) 婴儿床
CN300726666S (zh) 电磁茶炉
CN300726847S (zh) 酒瓶
CN300726955S (zh) 包装盒(黄金搭档儿童青少年型)
CN300726969S (zh) 酒类包装盒(8)
CN300726334S (zh) 椅(1161h)
CN300731140S (zh) 手套(15)
CN300727525S (zh) 漏电断路器(tgb7l-40)
CN300727568S (zh) 扬声器(2)
CN300727586S (zh) 迷你音箱(cql1065)
CN300754489S (zh) 卷筒卫生纸包装袋(花丝雨)
CN300811544S (zh) 床边凳(82683)
CN300727612S (zh) 显示器(五)
CN300727777S (zh) 数控雕铣机床
CN300727132S (zh) 包装袋(田七纯棉洗衣粉)