AU2002212616A1 - Atmospheric plasma method for treating sheet electricity conducting materials and device therefor - Google Patents

Atmospheric plasma method for treating sheet electricity conducting materials and device therefor

Info

Publication number
AU2002212616A1
AU2002212616A1 AU2002212616A AU1261602A AU2002212616A1 AU 2002212616 A1 AU2002212616 A1 AU 2002212616A1 AU 2002212616 A AU2002212616 A AU 2002212616A AU 1261602 A AU1261602 A AU 1261602A AU 2002212616 A1 AU2002212616 A1 AU 2002212616A1
Authority
AU
Australia
Prior art keywords
treated
jet
jets
plasma
cathodic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002212616A
Inventor
Pavel Koulik
Nail Musin
Anatolii Saitchenko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
APIT Corp SA
Original Assignee
APIT Corp SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by APIT Corp SA filed Critical APIT Corp SA
Publication of AU2002212616A1 publication Critical patent/AU2002212616A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C23C16/402—Silicon dioxide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/44—Plasma torches using an arc using more than one torch

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Inorganic Chemistry (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Chemical Vapour Deposition (AREA)
  • Discharge Heating (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)

Abstract

The electric current for the generation of the cathodic and anodic plasma jets (15) is divided into three parts, one passing through the object (2) being treated and the two others supplying the jets. The cathodic jet is at an acute angle( 25 to 60 degrees) to the treated surface and the anodic jet is at an angle about 90 degrees to the surface. A series of alternate cathode and anode jets are used in a direction transversal to the direction of displacement of the abject being treated. The electrical supply feeding the jets forms a loop circuit which is closed by a part of the object being treated. The circuit includes means for varying the electric current passing through the treated object. The plasma jet generator includes an electrode, a stabilizer channel, a pipe forming the jet, and supply system for introduction and control of gas flow for protection of the electrode and gas flow to the jet. Up stream of the plasma treatment zone an air current stabilizer, which includes a cooling system is used. Aero-dynamic bearings are fitted in front and behind the plasma generators.
AU2002212616A 2000-11-10 2001-11-12 Atmospheric plasma method for treating sheet electricity conducting materials and device therefor Abandoned AU2002212616A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP00811065 2000-11-10
EP00811065 2000-11-10
PCT/IB2001/002121 WO2002039791A1 (en) 2000-11-10 2001-11-12 Atmospheric plasma method for treating sheet electricity conducting materials and device therefor

Publications (1)

Publication Number Publication Date
AU2002212616A1 true AU2002212616A1 (en) 2002-05-21

Family

ID=8175021

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002212616A Abandoned AU2002212616A1 (en) 2000-11-10 2001-11-12 Atmospheric plasma method for treating sheet electricity conducting materials and device therefor

Country Status (12)

Country Link
US (1) US6949716B2 (en)
EP (2) EP1613133B1 (en)
JP (1) JP2004514054A (en)
CN (1) CN1265684C (en)
AT (1) ATE315326T1 (en)
AU (1) AU2002212616A1 (en)
BR (1) BR0115035A (en)
CA (1) CA2424891A1 (en)
DE (1) DE60116522T2 (en)
EA (1) EA004439B1 (en)
UA (1) UA75613C2 (en)
WO (1) WO2002039791A1 (en)

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DE10157191A1 (en) * 2001-11-23 2003-06-05 Fritzmeier Georg Gmbh & Co Microbiological energy source for driving a consumer
KR100464856B1 (en) * 2002-11-07 2005-01-05 삼성전자주식회사 Method for etching a surface of workpiece and a backside of silicon substrate
FR2856079B1 (en) * 2003-06-11 2006-07-14 Pechiney Rhenalu SURFACE TREATMENT METHOD FOR ALUMINUM ALLOY TILES AND BANDS
CN1716557A (en) * 2004-02-25 2006-01-04 库力索法投资公司 Laser cleaning system for a wire bonding machine
JP2005285520A (en) * 2004-03-29 2005-10-13 Hiroshi Takigawa Electrode for plasma generation, plasma generator, and plasma treatment device
JP4658506B2 (en) * 2004-03-31 2011-03-23 浩史 滝川 Power supply circuit for generating pulsed arc plasma and pulsed arc plasma processing apparatus
JP2005293945A (en) * 2004-03-31 2005-10-20 Tama Tlo Kk Plasma heating device, and electrode with nozzle
DE102004033728B4 (en) * 2004-07-13 2009-07-23 Plasmatreat Gmbh Method for processing and bonding workpieces made of a metal or a metal alloy with a hydrated oxide and / or hydroxide layer
WO2006015604A1 (en) 2004-08-13 2006-02-16 Force Technology Method and device for enhancing a process involving a solid object and a gas
EP1877351B1 (en) * 2004-11-19 2008-10-29 Vetrotech Saint-Gobain (International) AG Method and device for strip and flat-shaping machining surfaces of glass panes
DE102005012296A1 (en) * 2005-03-17 2006-09-21 Sms Demag Ag Method and device for descaling a metal strip
US20060219754A1 (en) * 2005-03-31 2006-10-05 Horst Clauberg Bonding wire cleaning unit and method of wire bonding using same
SK51082006A3 (en) * 2006-12-05 2008-07-07 Fakulta Matematiky, Fyziky A Informatiky Univerzitfakulta Matematiky, Fyziky A Informatiky Univerzity Komensk�Hoy Komensk�Ho Apparatus and treatment method of surface of metals and metalloids, oxides of metals and oxides of metalloids and nitrides of metalloids
PL2153704T3 (en) * 2007-05-11 2018-06-29 Force Technology Enhancing plasma surface modification using high intensity and high power ultrasonic acoustic waves
CN102395691B (en) * 2009-04-14 2014-08-06 株式会社达文希斯 Surface treatment apparatus and method using plasma
DE102012104224A1 (en) * 2012-05-15 2013-11-21 Plasmatreat Gmbh Device for e.g. cleaning high-speed wire, has dielectric small tube portion surrounding channel and arranged in plasma nozzle such that channel is partially electrically insulated against discharge space that is formed within plasma nozzle
JP6482014B2 (en) * 2014-07-30 2019-03-13 株式会社イーツーラボ Plasma surface treatment apparatus and plasma surface treatment system
NL2014022B1 (en) * 2014-12-19 2016-10-12 Ihc Holland Ie Bv Device and method for crushing rock by means of pulsed electric energy.
JP6224139B2 (en) * 2016-01-22 2017-11-01 沖野　晃俊 Plasma processing equipment
DE102020114016A1 (en) 2020-05-26 2021-12-02 Einhell Germany Ag Plasma treatment of a carrier film for an electrode of a lithium-ion battery
KR102451424B1 (en) * 2020-07-14 2022-10-05 이창훈 System and method for cleaning surface of substrate using roll-to-roll plasma generating device
DE102021118156A1 (en) 2021-07-14 2023-01-19 Rolls-Royce Deutschland Ltd & Co Kg Method for surface treatment of a wire, a superconducting device, an electric machine, an aircraft and a surface treatment device

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US3050616A (en) 1957-09-09 1962-08-21 Union Carbide Corp Arc process and apparatus
FR2039566A5 (en) * 1969-03-31 1971-01-15 Soudure Autogene Elect
US3940641A (en) * 1974-04-05 1976-02-24 Reynolds Metals Company Plasma jet electrode for magnetohydrodynamic generators
GB1493394A (en) * 1974-06-07 1977-11-30 Nat Res Dev Plasma heater assembly
US5548611A (en) * 1993-05-19 1996-08-20 Schuller International, Inc. Method for the melting, combustion or incineration of materials and apparatus therefor
JP3204801B2 (en) * 1993-06-18 2001-09-04 富士写真フイルム株式会社 Vacuum glow discharge processing apparatus and processing method
JP2000500273A (en) 1995-11-13 2000-01-11 イエステ インスタント サーフェイス テクノロジー ソシエテ アノニム Plasma arc stream generator with closed configuration
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Also Published As

Publication number Publication date
UA75613C2 (en) 2006-05-15
ATE315326T1 (en) 2006-02-15
EP1613133A3 (en) 2011-04-27
CN1471800A (en) 2004-01-28
EP1332650B1 (en) 2006-01-04
US20040026385A1 (en) 2004-02-12
WO2002039791A1 (en) 2002-05-16
CA2424891A1 (en) 2002-05-16
BR0115035A (en) 2004-02-03
JP2004514054A (en) 2004-05-13
EP1613133A2 (en) 2006-01-04
CN1265684C (en) 2006-07-19
EP1332650A1 (en) 2003-08-06
EA004439B1 (en) 2004-04-29
EA200300416A1 (en) 2003-10-30
DE60116522T2 (en) 2006-08-03
DE60116522D1 (en) 2006-03-30
US6949716B2 (en) 2005-09-27
EP1613133B1 (en) 2013-01-16

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