NO20006306D0 - Mikromekanisk dreiehastighetsensor - Google Patents

Mikromekanisk dreiehastighetsensor

Info

Publication number
NO20006306D0
NO20006306D0 NO20006306A NO20006306A NO20006306D0 NO 20006306 D0 NO20006306 D0 NO 20006306D0 NO 20006306 A NO20006306 A NO 20006306A NO 20006306 A NO20006306 A NO 20006306A NO 20006306 D0 NO20006306 D0 NO 20006306D0
Authority
NO
Norway
Prior art keywords
drive
plate
case
oscillators
elements
Prior art date
Application number
NO20006306A
Other languages
English (en)
Other versions
NO20006306L (no
Inventor
Uwe Breng
Martin Hafen
Eberhard Handrich
Bruno Ryrko
Original Assignee
Litef Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Litef Gmbh filed Critical Litef Gmbh
Publication of NO20006306D0 publication Critical patent/NO20006306D0/no
Publication of NO20006306L publication Critical patent/NO20006306L/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
NO20006306A 1998-06-25 2000-12-12 Mikromekanisk rotasjonshastighetsensor NO20006306L (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19828424A DE19828424C1 (de) 1998-06-25 1998-06-25 Mikromechanischer Drehratensensor
PCT/EP1999/002389 WO1999067597A1 (de) 1998-06-25 1999-04-08 Mikromechanischer drehratensensor

Publications (2)

Publication Number Publication Date
NO20006306D0 true NO20006306D0 (no) 2000-12-12
NO20006306L NO20006306L (no) 2001-02-23

Family

ID=7872051

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20006306A NO20006306L (no) 1998-06-25 2000-12-12 Mikromekanisk rotasjonshastighetsensor

Country Status (6)

Country Link
US (1) US6490923B1 (no)
EP (1) EP1090271B1 (no)
JP (1) JP2002519625A (no)
DE (1) DE19828424C1 (no)
NO (1) NO20006306L (no)
WO (1) WO1999067597A1 (no)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6831765B2 (en) * 2001-02-22 2004-12-14 Canon Kabushiki Kaisha Tiltable-body apparatus, and method of fabricating the same
JP5159062B2 (ja) 2006-08-09 2013-03-06 キヤノン株式会社 角速度センサ
CN100439864C (zh) * 2007-06-01 2008-12-03 北京沃尔康科技有限责任公司 一种新型硅微机械陀螺
JP5617921B2 (ja) * 2010-06-16 2014-11-05 トヨタ自動車株式会社 複合センサ
DE102011057032B4 (de) * 2011-12-23 2019-09-19 Hanking Electronics, Ltd. Mikro-Gyroskop und Verfahren zum Betreiben eines Mikro-Gyroskops
WO2013112156A1 (en) * 2012-01-26 2013-08-01 Hewlett-Packard Development Company, L.P. Micro-scale pendulum
JP6339669B2 (ja) 2013-07-08 2018-06-06 モーション・エンジン・インコーポレーテッド Ｍｅｍｓデバイスおよび製造する方法
WO2015042700A1 (en) 2013-09-24 2015-04-02 Motion Engine Inc. Mems components and method of wafer-level manufacturing thereof
WO2015013828A1 (en) 2013-08-02 2015-02-05 Motion Engine Inc. Mems motion sensor and method of manufacturing
WO2015103688A1 (en) 2014-01-09 2015-07-16 Motion Engine Inc. Integrated mems system
US20170030788A1 (en) 2014-04-10 2017-02-02 Motion Engine Inc. Mems pressure sensor
US11674803B2 (en) 2014-06-02 2023-06-13 Motion Engine, Inc. Multi-mass MEMS motion sensor
CA3004760A1 (en) 2014-12-09 2016-06-16 Motion Engine Inc. 3d mems magnetometer and associated methods
CA3220839A1 (en) 2015-01-15 2016-07-21 Motion Engine Inc. 3d mems device with hermetic cavity

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2886431B2 (ja) * 1993-10-27 1999-04-26 住友精密工業株式会社 振動ジャイロセンサー
DE19503623B4 (de) * 1995-02-03 2008-01-10 Robert Bosch Gmbh Drehratensensor
JP3061864B2 (ja) * 1995-05-31 2000-07-10 リテフ ゲゼルシャフト ミット ベシュレンクテル ハフツング マイクロメカニカル回転速度センサ
DE19635923C1 (de) * 1996-09-04 1998-02-26 Litef Gmbh Verfahren zur Antriebsanregung von Schwingern zur kapazitiven Messung von Kraft, Beschleunigung und/oder Drehraten
DE19831594C1 (de) * 1998-07-14 2000-01-27 Litef Gmbh Mikromechanischer Drehratensensor mit Koppelstruktur

Also Published As

Publication number Publication date
WO1999067597A1 (de) 1999-12-29
EP1090271B1 (de) 2004-07-28
JP2002519625A (ja) 2002-07-02
DE19828424C1 (de) 1999-12-02
NO20006306L (no) 2001-02-23
US6490923B1 (en) 2002-12-10
EP1090271A1 (de) 2001-04-11

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Legal Events

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FC2A Withdrawal, rejection or dismissal of laid open patent application