NO120746B - - Google Patents

Download PDF

Info

Publication number
NO120746B
NO120746B NO170178A NO17017867A NO120746B NO 120746 B NO120746 B NO 120746B NO 170178 A NO170178 A NO 170178A NO 17017867 A NO17017867 A NO 17017867A NO 120746 B NO120746 B NO 120746B
Authority
NO
Norway
Prior art keywords
drum
chamber
medium
treatment medium
treatment
Prior art date
Application number
NO170178A
Other languages
English (en)
Norwegian (no)
Inventor
A Schmitz
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of NO120746B publication Critical patent/NO120746B/no

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8222—Bipolar technology
    • H01L21/8228—Complementary devices, e.g. complementary transistors
    • H01L21/82285—Complementary vertical transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/761—PN junctions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
    • H01L27/082—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including bipolar components only
    • H01L27/0823—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including bipolar components only including vertical bipolar transistors only
    • H01L27/0826—Combination of vertical complementary transistors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/037—Diffusion-deposition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/085—Isolated-integrated
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/151—Simultaneous diffusion

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Bipolar Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)
  • Crushing And Grinding (AREA)
NO170178A 1966-10-21 1967-10-18 NO120746B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL666614858A NL145396B (nl) 1966-10-21 1966-10-21 Werkwijze ter vervaardiging van een geintegreerde halfgeleiderinrichting en geintegreerde halfgeleiderinrichting, vervaardigd volgens de werkwijze.

Publications (1)

Publication Number Publication Date
NO120746B true NO120746B (zh) 1970-11-30

Family

ID=19797975

Family Applications (1)

Application Number Title Priority Date Filing Date
NO170178A NO120746B (zh) 1966-10-21 1967-10-18

Country Status (11)

Country Link
US (1) US3702428A (zh)
AT (1) AT280350B (zh)
BE (1) BE705379A (zh)
BR (1) BR6794062D0 (zh)
CH (1) CH477765A (zh)
DK (1) DK122554B (zh)
ES (1) ES346217A1 (zh)
GB (1) GB1206427A (zh)
NL (1) NL145396B (zh)
NO (1) NO120746B (zh)
SE (1) SE334949B (zh)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3909318A (en) * 1971-04-14 1975-09-30 Philips Corp Method of forming complementary devices utilizing outdiffusion and selective oxidation
JPS5113627B2 (zh) * 1971-08-25 1976-05-01
JPS5514543B2 (zh) * 1972-01-25 1980-04-17
US3891480A (en) * 1973-10-01 1975-06-24 Honeywell Inc Bipolar semiconductor device construction
US4013484A (en) * 1976-02-25 1977-03-22 Intel Corporation High density CMOS process
US4087900A (en) * 1976-10-18 1978-05-09 Bell Telephone Laboratories, Incorporated Fabrication of semiconductor integrated circuit structure including injection logic configuration compatible with complementary bipolar transistors utilizing simultaneous formation of device regions
US4357622A (en) * 1980-01-18 1982-11-02 International Business Machines Corporation Complementary transistor structure
US4485552A (en) * 1980-01-18 1984-12-04 International Business Machines Corporation Complementary transistor structure and method for manufacture
JPS5730359A (en) * 1980-07-30 1982-02-18 Nec Corp Semiconductor device
NL8104862A (nl) * 1981-10-28 1983-05-16 Philips Nv Halfgeleiderinrichting, en werkwijze ter vervaardiging daarvan.
EP0093304B1 (en) * 1982-04-19 1986-01-15 Matsushita Electric Industrial Co., Ltd. Semiconductor ic and method of making the same
JPS5994861A (ja) * 1982-11-24 1984-05-31 Hitachi Ltd 半導体集積回路装置及びその製造方法
US4940671A (en) * 1986-04-18 1990-07-10 National Semiconductor Corporation High voltage complementary NPN/PNP process
US5529939A (en) * 1986-09-26 1996-06-25 Analog Devices, Incorporated Method of making an integrated circuit with complementary isolated bipolar transistors
US5132235A (en) * 1987-08-07 1992-07-21 Siliconix Incorporated Method for fabricating a high voltage MOS transistor
IT1218230B (it) * 1988-04-28 1990-04-12 Sgs Thomson Microelectronics Procedimento per la formazione di un circuito integrato su un substrato di tipo n,comprendente transistori pnp e npn verticali e isolati fra loro
US4951115A (en) * 1989-03-06 1990-08-21 International Business Machines Corp. Complementary transistor structure and method for manufacture
US4910160A (en) * 1989-06-06 1990-03-20 National Semiconductor Corporation High voltage complementary NPN/PNP process
US5369042A (en) * 1993-03-05 1994-11-29 Texas Instruments Incorporated Enhanced performance bipolar transistor process
JP3409548B2 (ja) 1995-12-12 2003-05-26 ソニー株式会社 半導体装置の製造方法
US6977420B2 (en) * 1998-09-30 2005-12-20 National Semiconductor Corporation ESD protection circuit utilizing floating lateral clamp diodes
US11355585B2 (en) 2019-10-01 2022-06-07 Analog Devices International Unlimited Company Bipolar junction transistor, and a method of forming a charge control structure for a bipolar junction transistor
US11563084B2 (en) 2019-10-01 2023-01-24 Analog Devices International Unlimited Company Bipolar junction transistor, and a method of forming an emitter for a bipolar junction transistor
US11404540B2 (en) 2019-10-01 2022-08-02 Analog Devices International Unlimited Company Bipolar junction transistor, and a method of forming a collector for a bipolar junction transistor

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL297820A (zh) * 1962-10-05
US3327182A (en) * 1965-06-14 1967-06-20 Westinghouse Electric Corp Semiconductor integrated circuit structure and method of making the same
US3391035A (en) * 1965-08-20 1968-07-02 Westinghouse Electric Corp Method of making p-nu-junction devices by diffusion
US3412295A (en) * 1965-10-19 1968-11-19 Sprague Electric Co Monolithic structure with three-region complementary transistors
US3449643A (en) * 1966-09-09 1969-06-10 Hitachi Ltd Semiconductor integrated circuit device
US3502951A (en) * 1968-01-02 1970-03-24 Singer Co Monolithic complementary semiconductor device

Also Published As

Publication number Publication date
US3702428A (en) 1972-11-07
DE1614286B2 (de) 1975-07-17
BE705379A (zh) 1968-04-19
ES346217A1 (es) 1969-03-16
SE334949B (zh) 1971-05-10
NL6614858A (zh) 1968-04-22
AT280350B (de) 1970-04-10
CH477765A (de) 1969-08-31
NL145396B (nl) 1975-03-17
DE1614286A1 (de) 1970-06-25
GB1206427A (en) 1970-09-23
DK122554B (da) 1972-03-13
BR6794062D0 (pt) 1973-12-27

Similar Documents

Publication Publication Date Title
NO120746B (zh)
US4059396A (en) Cement manufacture
GB977664A (en) Multiple spouted bed
US3594918A (en) Apparatus for treating fibrous material
US4009835A (en) Procedure and apparatus for preparation of hot groundwood
US2592407A (en) Method of processing rice for preserving the vitamin contents thereof
US757186A (en) Apparatus for scalding and washing fruits and vegetables.
GB1101821A (en) Method of cooking grain and beans in a continuous way
US1341676A (en) Apparatus for treating coffee
US1915648A (en) Drying apparatus
US2000817A (en) Apparatus for drying loose material
GB772681A (en) Improvements in and relating to drying machines, or drying machine chambers
US1306835A (en) Bominictts josephus pennock
US2130025A (en) Means for soaking wood, lumber, and the like
ES335005A1 (es) Un aparato para arrastrar una materia tejida.
FR2364619A1 (fr) Combine cuiseur-sechoir en continu 1975
DE508544C (de) Heu-, Stroh- und Garbenfoerderer mit rohrfoermiger zentraler Zufuehrvorrichtung
NL8104982A (nl) Inrichting voor het stoomschillen van landbouwprodukten, zoals aardappelen en dergelijke.
US950753A (en) Machine for treating fruit.
ES350093A1 (es) Maquina chorreadora para el decapado continuo de productos alambriformes.
GB842736A (en) Improvements in or relating to heat exchange devices
US1387061A (en) Paper-making machine
US739049A (en) Apparatus for treating and utilizing sewage.
SU70538A1 (ru) Устройство дл разделени томатоотходов на семена и кожицу
FR2047495A5 (en) Continuous drying of newly pressed tiles - composed of ceramic material