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1996-07-09
고주파-이온소오스
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1973-01-04
Trioden-Anordnung zur Zerstäubung von Stoffen mittels einer elektrischen Niederspannungsentladung
US3163753A
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1964-12-29
Process and apparatus for electrostatically applying separating and forwarding forces to a moving stream of discrete elements of dielectric material
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1987-06-29
Plasmabagapparat for paleggning av overdrag
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1988-11-03
Doppelplasma-mikrowellengeraet und oberflaechenbearbeitungsverfahren.
GB1039681A
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1966-08-17
Method of and apparatus for providing electrical air conditioning
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1970-10-27
Glow inhibiting method for glow discharge apparatus
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Plasma formation in a pseudospark discharge
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1980-09-15
Катодный блок
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1970-06-15
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1943-01-19
High voltage generator
GB766459A
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1957-01-23
Improvements in or relating to high-vacuum coating devices
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2016-12-20
Ion implantation machine presenting increased productivity
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1985-06-04
Ion beam gun
Fadeev et al.
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Cleaning of the dielectric surfaces using a controlled gas-discharge source of fast neutral particles
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1960-05-10
Magnetic blowout switch
GB1062820A
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1967-03-22
Method and apparatus for controlling coating thickness
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1968-01-24
Improvements in or relating to cathodic sputtering
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1956-09-11
Positive ion electrostatic accelerator
Bogomaz et al.
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Near electrode voltage drops in high current high pressure discharges with fast energy input
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1955-08-09
Isotope separating apparatus
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1965-12-28
Source of ions for use in synchro-cyclotrons
ES322300A1
(es )
1966-07-16
Un aparato para recubrir articulos con material aislante pulverizado electrënicamente desde un catodo blanco o anticatodo de dielectrico
DE19727882A1
(de )
1998-01-29
Verfahren und Vorrichtung zur Erzeugung hochangeregter Plasmen mittels gepulster Funkenentladung
SU1447196A2
(ru )
1990-09-23
Многоканальный анализатор атомных частиц