NL8415005A - Infrarood-detector. - Google Patents

Infrarood-detector. Download PDF

Info

Publication number
NL8415005A
NL8415005A NL8415005A NL8415005A NL8415005A NL 8415005 A NL8415005 A NL 8415005A NL 8415005 A NL8415005 A NL 8415005A NL 8415005 A NL8415005 A NL 8415005A NL 8415005 A NL8415005 A NL 8415005A
Authority
NL
Netherlands
Prior art keywords
layer
mercury telluride
substrate
cadmium mercury
cadmium
Prior art date
Application number
NL8415005A
Other languages
English (en)
Dutch (nl)
Original Assignee
Marconi Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Marconi Co Ltd filed Critical Marconi Co Ltd
Publication of NL8415005A publication Critical patent/NL8415005A/nl

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00Etching of wafers, substrates or parts of devices
    • H10P50/60Wet etching
    • H10P50/64Wet etching of semiconductor materials
    • H10P50/642Chemical etching
    • H10P50/646Chemical etching of Group III-V materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • H10F71/125The active layers comprising only Group II-VI materials, e.g. CdS, ZnS or CdTe
    • H10F71/1253The active layers comprising only Group II-VI materials, e.g. CdS, ZnS or CdTe comprising at least three elements, e.g. HgCdTe
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/10Semiconductor bodies
    • H10F77/12Active materials
    • H10F77/123Active materials comprising only Group II-VI materials, e.g. CdS, ZnS or HgCdTe
    • H10F77/1237Active materials comprising only Group II-VI materials, e.g. CdS, ZnS or HgCdTe having at least three elements, e.g. HgCdTe
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00Etching of wafers, substrates or parts of devices
    • H10P50/20Dry etching; Plasma etching; Reactive-ion etching
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00Grinding, lapping or polishing of wafers, substrates or parts of devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H10P95/70Chemical treatments

Landscapes

  • Light Receiving Elements (AREA)
  • Weting (AREA)
  • Glass Compositions (AREA)
  • Measurement Of Radiation (AREA)
NL8415005A 1983-09-13 1984-09-13 Infrarood-detector. NL8415005A (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB8324512 1983-09-13
GB8324512 1983-09-13

Publications (1)

Publication Number Publication Date
NL8415005A true NL8415005A (nl) 1986-07-01

Family

ID=10548717

Family Applications (1)

Application Number Title Priority Date Filing Date
NL8415005A NL8415005A (nl) 1983-09-13 1984-09-13 Infrarood-detector.

Country Status (8)

Country Link
DE (1) DE3447954A1 (it)
DK (1) DK436984A (it)
FR (1) FR2571896B1 (it)
GB (1) GB2165089B (it)
IT (1) IT8567524A0 (it)
NL (1) NL8415005A (it)
NO (1) NO843614L (it)
SE (1) SE8504828D0 (it)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2137259C1 (ru) * 1997-10-21 1999-09-10 Государственный научный центр Российской Федерации Государственное предприятие Научно-производственное объединение "Орион" Способ изготовления многоэлементного фотоприемника
FR2833757B1 (fr) * 2001-12-13 2004-11-05 Commissariat Energie Atomique Dispositif d'emission de lumiere et procede de fabrication d'un tel dispositif
CN115197705B (zh) * 2022-05-30 2023-08-15 北京智创芯源科技有限公司 一种蚀刻液、一种碲镉汞红外焦平面混成芯片的减薄方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL6910274A (it) * 1969-07-04 1971-01-06
US4037311A (en) * 1976-07-14 1977-07-26 U.S. Philips Corporation Methods of manufacturing infra-red detector elements
GB2027986B (en) * 1978-07-31 1983-01-19 Philips Electronic Associated Infra-red detectors
GB2027556B (en) * 1978-07-31 1983-01-19 Philips Electronic Associated Manufacturing infra-red detectors

Also Published As

Publication number Publication date
GB2165089B (en) 1987-06-03
SE8504828D0 (sv) 1985-10-16
IT8567524A0 (it) 1985-06-06
FR2571896B1 (fr) 1988-07-22
NO843614L (no) 1986-06-23
DK436984A (da) 1985-07-15
GB2165089A (en) 1986-04-03
FR2571896A1 (fr) 1986-04-18
DE3447954A1 (de) 1987-01-02

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