US4137107A - Method of manufacturing a semiconductor device utilizing selective masking, deposition and etching - Google Patents

Method of manufacturing a semiconductor device utilizing selective masking, deposition and etching Download PDF

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US4137107A
US4137107A US05/818,312 US81831277A US4137107A US 4137107 A US4137107 A US 4137107A US 81831277 A US81831277 A US 81831277A US 4137107 A US4137107 A US 4137107A
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gallium
arsenide
aluminum arsenide
gallium aluminum
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US05/818,312
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Willem Nijman
Peter J. DE Waard
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US Philips Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/26—Materials of the light emitting region
    • H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02387—Group 13/15 materials
    • H01L21/02395—Arsenides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02436—Intermediate layers between substrates and deposited layers
    • H01L21/02439—Materials
    • H01L21/02455—Group 13/15 materials
    • H01L21/02463—Arsenides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02436—Intermediate layers between substrates and deposited layers
    • H01L21/02494—Structure
    • H01L21/02496—Layer structure
    • H01L21/02505—Layer structure consisting of more than two layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02538—Group 13/15 materials
    • H01L21/02546—Arsenides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/30604—Chemical etching
    • H01L21/30612—Etching of AIIIBV compounds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
    • H01L31/0264—Inorganic materials
    • H01L31/0304—Inorganic materials including, apart from doping materials or other impurities, only AIIIBV compounds
    • H01L31/03046—Inorganic materials including, apart from doping materials or other impurities, only AIIIBV compounds including ternary or quaternary compounds, e.g. GaAlAs, InGaAs, InGaAsP
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H01S5/227—Buried mesa structure ; Striped active layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H01S5/227—Buried mesa structure ; Striped active layer
    • H01S5/2275—Buried mesa structure ; Striped active layer mesa created by etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/544—Solar cells from Group III-V materials

Definitions

  • the invention relates to a method of manufacturing a semiconductor device in which, in a first epitaxy process, a system of layers is formed epitaxially on a substrate, which system of layers comprises a first layer of gallium aluminum arsenide, the system of layers is removed locally and the substrate is exposed partly and, in a second epitaxy process, a second layer of gallium aluminum arsenide is formed selectively on the exposed parts of the substrate.
  • the invention also relates to a semiconductor device manufactured by means of the method.
  • Such semiconductor devices may be, for example, laser diodes, light-emissive diodes and photodiodes.
  • the starting material is, for example, a gallium arsenide substrate consisting of a single monocrystalline body or of such a body which is provided with an epitaxial layer of the same material.
  • the body or the epitaxial layer is successively provided epitaxially with a layer of gallium aluminum arsenide, a layer of gallium arsenide and the said first layer of gallium aluminum arsenide.
  • Mesas are then formed by local removal of the system of layers.
  • the second layer of gallium aluminum arsenide to be formed in the second epitaxy process may be deposited on the gallium arsenide substrate but is usually not formed on the said first layer of gallium aluminum arsenide.
  • the first layer of gallium aluminum arsenide has a main face having small crystallographic indices in which the side faces of the mesas are covered with the second layer of gallium aluminum arsenide at areas where they consist of gallium aluminum arsenide as well as at areas where they consist of gallium arsenide.
  • the layer For contacting the first layer of gallium aluminum arsenide it is desirable for said layer to be provided with a contact layer of gallium arsenide, and that simply as a part of the first epitaxy process.
  • the second layer of gallium aluminum arsenide is also deposited on the contact layer of gallium arsenide, after which the second layer of gallium aluminum arsenide is to be removed selectively from the contact layer of gallium arsenide.
  • the drawback of this is that extra process steps are necessary including inter alia an accurate alignment step.
  • One of the objects of the invention is to avoid the said extra process steps. It is based on the recognition of the fact that during the first epitaxy process a suitable masking layer can be provided on the contact layer of gallium arsenide to be formed.
  • the method mentioned above is characterized according to the invention in that during the first epitaxy process a contact layer of gallium arsenide and a masking layer of gallium aluminum arsenide having a composition differing from that of the second layer of gallium aluminum arsenide to be formed are formed on the first layer of gallium aluminum arsenide, the contact layer and the masking layer with the system of layers are removed locally and parts of the masking layer remaining after the second epitaxy process are removed selectively.
  • the second layer of gallium aluminum arsenide is provided with a layer of gallium arsenide during the second epitaxy process. Said gallium arsenide does not grow on the masking layer because this has been exposed to the atmosphere between the two epitaxy processes.
  • FIGS. 1 and 2 are diagrammatic sectional views of a part of a semiconductor device in successive stages of manufacture by means of a known method of the kine mentioned,
  • FIGS. 3 and 4 are diagrammatic sectional views of a part of a semiconductor device in successive stages of manufacture by means of the method according to the invention.
  • a system of layers 2, 3, 4, 5 is formed in a first epitaxy process on a substrate 1 (see FIGS. 1 and 2), which system of layers comprises a first layer 5 of gallium aluminum arsenide.
  • the system of layers 2, 3, 4, 5 is removed locally and the substrate 1 is exposed partly.
  • a second layer 6 of gallium aluminum arsenide is formed selectively on exposed parts 9 of the substrate.
  • a contact layer 7 (see FIGS. 3 and 4) of gallium arsenide and a masking layer 8 of gallium aluminum arsenide having a composition differing from that of the second layer 6 of gallium aluminum arsenide to be formed is formed on the first layer 15 of gallium aluminum arsenide.
  • the contact layer 7 and the masking layer 8 are removed locally with the system of layers 2, 3, 4, 5. After the second epitaxy process, remaining parts of the masking layer 8 are removed selectively.
  • the layers 2, 3, 4, 5, 7 and 8 are locally etched through by means of a usual photoetching method.
  • a photoetching method which consists of 3 parts by volume of 96% by weight of H 2 SO 4 , 1 part by volume of 30% by weight of H 2 0 2 and 1 part by volume of H 2 0, a uniform etching of gallium arsenide and gallium aluminum arsenide takes place, so that substantially no underetching of one layer with respect to the other occurs.
  • the deposition takes place not only on the exposed parts 9 but also uniformly on the edges of the layers 2, 3, 4, 5, 7 and not on the layer 8.
  • compositions of the layers 6 and 8 are sufficiently different in order that in the subsequent treatment in an etching bath consisting of 37% by weight of HC1 at 60° C. layer 8 is removed selectively with respect to layer 6.
  • the resulting semiconductor body may be provided in various manners with contacts dependent on the ultimately desired structure which in this case is a laser structure having a buried active layer.
  • the second layer of gallium aluminum arsenide is provided with a layer of gallium arsenide during the second epitaxy process.
  • a layer of gallium arsenide does not grow on the masking layer because this has been exposed to air after the first epitaxy process.
  • the masking layer can be removed particularly simply with respect to the layer of gallium arsenide provided in the second epitaxy process while using conventional etching baths.
  • the structure to be manufactured need not be a mesa structure. If the method according to the invention is carried out on a semiconductor disc, the disc may be divided through the center of the mesas.
  • Semiconductor devices for use in optical communication systems and in integrated optics can be manufactured by means of the method according to the invention.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
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  • Inorganic Chemistry (AREA)
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  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
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  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)
  • Weting (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
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Abstract

The invention relates to a method in which a system of layers with a contact layer of gallium arsenide is formed epitaxially. In a second epitaxy treatment a layer of gallium aluminum arsenide is formed selectively. In order not to form the latter layer on the contact layer of gallium arsenide, the latter is shielded from gallium aluminum arsenide by means of a masking layer having a composition which differs from that of the layer to be provided selectively, so that the masking layer can afterwards be removed selectively.

Description

The invention relates to a method of manufacturing a semiconductor device in which, in a first epitaxy process, a system of layers is formed epitaxially on a substrate, which system of layers comprises a first layer of gallium aluminum arsenide, the system of layers is removed locally and the substrate is exposed partly and, in a second epitaxy process, a second layer of gallium aluminum arsenide is formed selectively on the exposed parts of the substrate. The invention also relates to a semiconductor device manufactured by means of the method.
Such semiconductor devices may be, for example, laser diodes, light-emissive diodes and photodiodes.
A method of the kind mentioned is known from Journal of Applied Physics, 45, 4899-4906 (1974). The starting material is, for example, a gallium arsenide substrate consisting of a single monocrystalline body or of such a body which is provided with an epitaxial layer of the same material. The body or the epitaxial layer is successively provided epitaxially with a layer of gallium aluminum arsenide, a layer of gallium arsenide and the said first layer of gallium aluminum arsenide. Mesas are then formed by local removal of the system of layers.
The second layer of gallium aluminum arsenide to be formed in the second epitaxy process may be deposited on the gallium arsenide substrate but is usually not formed on the said first layer of gallium aluminum arsenide.
This is the case when the first layer of gallium aluminum arsenide has a main face having small crystallographic indices in which the side faces of the mesas are covered with the second layer of gallium aluminum arsenide at areas where they consist of gallium aluminum arsenide as well as at areas where they consist of gallium arsenide.
For contacting the first layer of gallium aluminum arsenide it is desirable for said layer to be provided with a contact layer of gallium arsenide, and that simply as a part of the first epitaxy process.
However, the second layer of gallium aluminum arsenide is also deposited on the contact layer of gallium arsenide, after which the second layer of gallium aluminum arsenide is to be removed selectively from the contact layer of gallium arsenide. The drawback of this is that extra process steps are necessary including inter alia an accurate alignment step.
One of the objects of the invention is to avoid the said extra process steps. It is based on the recognition of the fact that during the first epitaxy process a suitable masking layer can be provided on the contact layer of gallium arsenide to be formed.
Therefore, the method mentioned above is characterized according to the invention in that during the first epitaxy process a contact layer of gallium arsenide and a masking layer of gallium aluminum arsenide having a composition differing from that of the second layer of gallium aluminum arsenide to be formed are formed on the first layer of gallium aluminum arsenide, the contact layer and the masking layer with the system of layers are removed locally and parts of the masking layer remaining after the second epitaxy process are removed selectively.
In order to be able to contact also the second layer of gallium aluminum arsenide in a modified embodiment of the method according to the invention the second layer of gallium aluminum arsenide is provided with a layer of gallium arsenide during the second epitaxy process. Said gallium arsenide does not grow on the masking layer because this has been exposed to the atmosphere between the two epitaxy processes.
The invention will now be described in greater detail with reference to the accompanying drawing and an example.
In the drawing, FIGS. 1 and 2 are diagrammatic sectional views of a part of a semiconductor device in successive stages of manufacture by means of a known method of the kine mentioned,
FIGS. 3 and 4 are diagrammatic sectional views of a part of a semiconductor device in successive stages of manufacture by means of the method according to the invention.
In a known method of manufacturing a semiconductor device, a system of layers 2, 3, 4, 5 is formed in a first epitaxy process on a substrate 1 (see FIGS. 1 and 2), which system of layers comprises a first layer 5 of gallium aluminum arsenide. The system of layers 2, 3, 4, 5 is removed locally and the substrate 1 is exposed partly.
In a second epitaxy process, a second layer 6 of gallium aluminum arsenide is formed selectively on exposed parts 9 of the substrate.
According to the invention, during the first epitaxy process a contact layer 7 (see FIGS. 3 and 4) of gallium arsenide and a masking layer 8 of gallium aluminum arsenide having a composition differing from that of the second layer 6 of gallium aluminum arsenide to be formed is formed on the first layer 15 of gallium aluminum arsenide.
The contact layer 7 and the masking layer 8 are removed locally with the system of layers 2, 3, 4, 5. After the second epitaxy process, remaining parts of the masking layer 8 are removed selectively.
Starting material in the invention is, for example, an n-type monocrystalline body 1 of gallium arsenide having a net charge carrier concentration nD - nA = 1018 per cm3, which in order to improve the crystal perfection of a polished and etched (100) face, is provided in a usual manner by liquid phase epitaxy with an n-type gallium arsenide layer 2 of a few μm thickness and nD - nA = 1018 per cm3 and then with an n-type layer 3 of gallium aluminum arsenide having a composition Ga0.7 AL0.3 As, a thickness of 2 μm and nD - nA = 5·1017 per cm3, an active p-type layer 4 of gallium arsenide having a thickness of 0.3μm and nA - nD +5·1017 per cm3, a p-type so-called first layer 5 of gallium aluminum arsenide having a composition Ga0.7 Al0.3 As, a thickness of 1-1.5μm and nA - nD = 5·1017 per cm3, a p-type contact layer 7 of gallium arsenide having a thickness of 1μm and nA - nD = 2·1018 per cm3 and a p-type masking layer 8 of gallium aluminum arsenide having a composition Ga0.5 Al0.5 As, a thickness of 1μand nA - nD = 5·1017 per cm3. The layers 2, 3, 4, 5, 7 and 8 are locally etched through by means of a usual photoetching method. In the etching bath used, which consists of 3 parts by volume of 96% by weight of H2 SO4, 1 part by volume of 30% by weight of H 2 02 and 1 part by volume of H2 0, a uniform etching of gallium arsenide and gallium aluminum arsenide takes place, so that substantially no underetching of one layer with respect to the other occurs.
In the formation of the second n-type layer 6 of gallium aluminum arsenide having a composition Ga0.8 Al0.2 As and nD - nA = 5·1017 per cm3 the deposition takes place not only on the exposed parts 9 but also uniformly on the edges of the layers 2, 3, 4, 5, 7 and not on the layer 8.
The compositions of the layers 6 and 8 are sufficiently different in order that in the subsequent treatment in an etching bath consisting of 37% by weight of HC1 at 60° C. layer 8 is removed selectively with respect to layer 6.
The resulting semiconductor body may be provided in various manners with contacts dependent on the ultimately desired structure which in this case is a laser structure having a buried active layer.
For mesas the provision of contacts on layer 7 and the substrate 1 may be sufficient.
For laser structures having lateral injection a contact on layer 6 is desired, for which purpose the second layer of gallium aluminum arsenide is provided with a layer of gallium arsenide during the second epitaxy process. Such a layer of gallium arsenide does not grow on the masking layer because this has been exposed to air after the first epitaxy process. The masking layer can be removed particularly simply with respect to the layer of gallium arsenide provided in the second epitaxy process while using conventional etching baths.
The structure to be manufactured need not be a mesa structure. If the method according to the invention is carried out on a semiconductor disc, the disc may be divided through the center of the mesas.
Semiconductor devices for use in optical communication systems and in integrated optics can be manufactured by means of the method according to the invention.

Claims (3)

What is claimed is:
1. A method of manufacturing a semiconductor device which comprises:
providing a semiconductor substrate having a major surface;
forming an epitaxial system of layers on said major surface in a first epitaxy process by forming a plurality of epitaxial layers on said major surface, forming a gallium arsenide contact layer on said plurality of layers and forming a gallium aluminum arsenide masking layer on said contact layer;
locally removing said epitaxial system of layers down to said major surface at selected locations to expose selected portions of said major surface;
selectively forming a localized layer of gallium aluminum arsenide on the exposed portions of said major surface in a second epitaxy process, the composition of said localized gallium aluminum arsenide layer being sufficiently different from that of said gallium aluminum arsenide masking layer so that the masking layer can be selectively removed with respect to the localized layer by asubsequent etching treatment; and
selectively removing portions of said masking layer by an etching treatment.
2. A method as claimed in claim 1, further comprising the steps of exposing the gallium aluminum arsenide masking layer to the atmosphere after the first epitaxy process and locally forming a layer of gallium arsenide on said localized layer of gallium aluminum arsenide during the second epitaxy process.
3. A method as claimed in claim 1, wherein the step of forming the plurality of epitaxial layers of said epitaxial system of layers on said major surface further comprises the steps of consecutively forming, on said major surface, a first layer of gallium arsenide, a first layer of gallium aluminum arsenide, a second layer of gallium arsenide and a second layer of gallium aluminum arsenide.
US05/818,312 1976-08-30 1977-07-25 Method of manufacturing a semiconductor device utilizing selective masking, deposition and etching Expired - Lifetime US4137107A (en)

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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4218269A (en) * 1977-11-09 1980-08-19 U.S. Philips Corporation Method for the epitaxial deposition of several layers
US4233090A (en) * 1979-06-28 1980-11-11 Rca Corporation Method of making a laser diode
US4341010A (en) * 1979-04-24 1982-07-27 U.S. Philips Corporation Fabrication of electroluminescent semiconductor device utilizing selective etching and epitaxial deposition
US4414558A (en) * 1980-02-07 1983-11-08 Zaidan Hojin Handotai Kenkyu Shinkokai Hetero-junction light-emitting diode
US4439910A (en) * 1980-09-29 1984-04-03 Hughes Aircraft Company Process for fabrication of monolithic transistor coupled electroluminescent diode
US4566171A (en) * 1983-06-20 1986-01-28 At&T Bell Laboratories Elimination of mask undercutting in the fabrication of InP/InGaAsP BH devices
US4578127A (en) * 1982-08-13 1986-03-25 At&T Bell Laboratories Method of making an improved group III-V semiconductor device utilizing a getter-smoothing layer
US4661961A (en) * 1983-06-20 1987-04-28 American Telephone And Telegraph Company, At&T Bell Laboratories Buried heterostructure devices with unique contact-facilitating layers
US4788159A (en) * 1986-09-18 1988-11-29 Eastman Kodak Company Process for forming a positive index waveguide
US4818722A (en) * 1986-09-29 1989-04-04 Siemens Aktiengesellschaft Method for generating a strip waveguide
US4897361A (en) * 1987-12-14 1990-01-30 American Telephone & Telegraph Company, At&T Bell Laboratories Patterning method in the manufacture of miniaturized devices

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5563887A (en) * 1978-11-06 1980-05-14 Nec Corp Light-emitting diode
JPS61107758A (en) * 1984-10-31 1986-05-26 Fujitsu Ltd Gaas integrated circuit and manufacture thereof
EP0287793A3 (en) * 1987-04-23 1991-03-06 International Business Machines Corporation Integrated circuit substrate product

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US4341010A (en) * 1979-04-24 1982-07-27 U.S. Philips Corporation Fabrication of electroluminescent semiconductor device utilizing selective etching and epitaxial deposition
US4233090A (en) * 1979-06-28 1980-11-11 Rca Corporation Method of making a laser diode
US4414558A (en) * 1980-02-07 1983-11-08 Zaidan Hojin Handotai Kenkyu Shinkokai Hetero-junction light-emitting diode
US4439910A (en) * 1980-09-29 1984-04-03 Hughes Aircraft Company Process for fabrication of monolithic transistor coupled electroluminescent diode
US4578127A (en) * 1982-08-13 1986-03-25 At&T Bell Laboratories Method of making an improved group III-V semiconductor device utilizing a getter-smoothing layer
US4566171A (en) * 1983-06-20 1986-01-28 At&T Bell Laboratories Elimination of mask undercutting in the fabrication of InP/InGaAsP BH devices
US4661961A (en) * 1983-06-20 1987-04-28 American Telephone And Telegraph Company, At&T Bell Laboratories Buried heterostructure devices with unique contact-facilitating layers
US4788159A (en) * 1986-09-18 1988-11-29 Eastman Kodak Company Process for forming a positive index waveguide
US4818722A (en) * 1986-09-29 1989-04-04 Siemens Aktiengesellschaft Method for generating a strip waveguide
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AU504549B2 (en) 1979-10-18
AR210970A1 (en) 1977-09-30
JPS567290B2 (en) 1981-02-17
FR2363201A1 (en) 1978-03-24
GB1530085A (en) 1978-10-25
DE2737150A1 (en) 1978-03-09
DE2737150C2 (en) 1989-10-12
CA1090458A (en) 1980-11-25
AU2831577A (en) 1979-03-08
NL7609607A (en) 1978-03-02
IT1086123B (en) 1985-05-28
FR2363201B1 (en) 1983-02-04
BR7705750A (en) 1978-07-04
JPS5329666A (en) 1978-03-20
SE7709678L (en) 1978-03-01

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