NL8001297A - Werkwijze voor de vervaardiging van een combinatie van een halfgeleider en glas. - Google Patents
Werkwijze voor de vervaardiging van een combinatie van een halfgeleider en glas. Download PDFInfo
- Publication number
- NL8001297A NL8001297A NL8001297A NL8001297A NL8001297A NL 8001297 A NL8001297 A NL 8001297A NL 8001297 A NL8001297 A NL 8001297A NL 8001297 A NL8001297 A NL 8001297A NL 8001297 A NL8001297 A NL 8001297A
- Authority
- NL
- Netherlands
- Prior art keywords
- semiconductor
- layer
- glass substrate
- glass
- thickness
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims description 52
- 238000000034 method Methods 0.000 title claims description 29
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000011521 glass Substances 0.000 claims description 36
- 239000000758 substrate Substances 0.000 claims description 27
- 238000005530 etching Methods 0.000 claims description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 238000005498 polishing Methods 0.000 claims description 5
- 238000000926 separation method Methods 0.000 claims description 4
- 235000012239 silicon dioxide Nutrition 0.000 claims description 4
- 239000000377 silicon dioxide Substances 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 238000007517 polishing process Methods 0.000 description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 235000008331 Pinus X rigitaeda Nutrition 0.000 description 1
- 235000011613 Pinus brutia Nutrition 0.000 description 1
- 241000018646 Pinus brutia Species 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
- H01J9/233—Manufacture of photoelectric screens or charge-storage screens
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/977—Thinning or removal of substrate
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Joining Of Glass To Other Materials (AREA)
- Surface Treatment Of Glass (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2909985 | 1979-03-14 | ||
| DE2909985A DE2909985C3 (de) | 1979-03-14 | 1979-03-14 | Verfahren zur Herstellung eines Halbleiter-Glas-Verbundwerkstoffs und Verwendung eines solchen Verbundwerkstoffes |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL8001297A true NL8001297A (nl) | 1980-09-16 |
Family
ID=6065356
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL8001297A NL8001297A (nl) | 1979-03-14 | 1980-03-04 | Werkwijze voor de vervaardiging van een combinatie van een halfgeleider en glas. |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4295923A (enExample) |
| DE (1) | DE2909985C3 (enExample) |
| FR (1) | FR2451636A1 (enExample) |
| GB (1) | GB2046178B (enExample) |
| NL (1) | NL8001297A (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4401367A (en) * | 1980-11-03 | 1983-08-30 | United Technologies Corporation | Method for pattern masking objects and the products thereof |
| DE3242737A1 (de) * | 1982-11-19 | 1984-05-24 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren zum herstellen einer halbleiter-photokathode |
| US4539687A (en) * | 1982-12-27 | 1985-09-03 | At&T Bell Laboratories | Semiconductor laser CRT |
| JPS59180525A (ja) * | 1983-03-31 | 1984-10-13 | Citizen Watch Co Ltd | カラ−液晶表示パネル |
| DE3321535A1 (de) * | 1983-04-22 | 1984-10-25 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren zum herstellen einer halbleiterphotokathode |
| DE3524765A1 (de) * | 1985-07-11 | 1987-01-22 | Licentia Gmbh | Verfahren zum herstellen einer durchsichtphotokathode |
| US4992135A (en) * | 1990-07-24 | 1991-02-12 | Micron Technology, Inc. | Method of etching back of tungsten layers on semiconductor wafers, and solution therefore |
| US5127984A (en) * | 1991-05-02 | 1992-07-07 | Avantek, Inc. | Rapid wafer thinning process |
| US6276996B1 (en) | 1998-11-10 | 2001-08-21 | Micron Technology, Inc. | Copper chemical-mechanical polishing process using a fixed abrasive polishing pad and a copper layer chemical-mechanical polishing solution specifically adapted for chemical-mechanical polishing with a fixed abrasive pad |
| US6206756B1 (en) | 1998-11-10 | 2001-03-27 | Micron Technology, Inc. | Tungsten chemical-mechanical polishing process using a fixed abrasive polishing pad and a tungsten layer chemical-mechanical polishing solution specifically adapted for chemical-mechanical polishing with a fixed abrasive pad |
| RU2670498C1 (ru) * | 2017-10-16 | 2018-10-23 | Общество с ограниченной ответственностью "Катод" | Устройство для изготовления заготовки фотокатода фотоэлектронного прибора термокомпрессионным соединением полупроводниковой пластины со стеклянной заготовкой |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1145488A (en) * | 1965-04-30 | 1969-03-12 | Texas Instruments Inc | Semiconductor device fabrication |
| GB1138401A (en) * | 1965-05-06 | 1969-01-01 | Mallory & Co Inc P R | Bonding |
| US3951707A (en) * | 1973-04-02 | 1976-04-20 | Kulite Semiconductor Products, Inc. | Method for fabricating glass-backed transducers and glass-backed structures |
| US3959045A (en) * | 1974-11-18 | 1976-05-25 | Varian Associates | Process for making III-V devices |
| US4069094A (en) * | 1976-12-30 | 1978-01-17 | Rca Corporation | Method of manufacturing apertured aluminum oxide substrates |
| DE2842492C2 (de) * | 1978-09-29 | 1986-04-17 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren zur Herstellung einer aus einem Halbleiter-Glas-Verbundwerkstoff bestehenden Photokathode |
-
1979
- 1979-03-14 DE DE2909985A patent/DE2909985C3/de not_active Expired
-
1980
- 1980-03-04 NL NL8001297A patent/NL8001297A/nl not_active Application Discontinuation
- 1980-03-13 US US06/130,122 patent/US4295923A/en not_active Expired - Lifetime
- 1980-03-14 FR FR8005827A patent/FR2451636A1/fr active Granted
- 1980-03-14 GB GB8008834A patent/GB2046178B/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2451636A1 (fr) | 1980-10-10 |
| GB2046178A (en) | 1980-11-12 |
| DE2909985B2 (de) | 1981-01-22 |
| FR2451636B1 (enExample) | 1985-03-08 |
| DE2909985C3 (de) | 1981-10-22 |
| GB2046178B (en) | 1983-01-26 |
| DE2909985A1 (de) | 1980-09-18 |
| US4295923A (en) | 1981-10-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A85 | Still pending on 85-01-01 | ||
| BA | A request for search or an international-type search has been filed | ||
| BB | A search report has been drawn up | ||
| BC | A request for examination has been filed | ||
| BV | The patent application has lapsed |