NL7610097A - Doorstralings-rasterelektronenmicroscoop met een ringschijfvormige detector. - Google Patents

Doorstralings-rasterelektronenmicroscoop met een ringschijfvormige detector.

Info

Publication number
NL7610097A
NL7610097A NL7610097A NL7610097A NL7610097A NL 7610097 A NL7610097 A NL 7610097A NL 7610097 A NL7610097 A NL 7610097A NL 7610097 A NL7610097 A NL 7610097A NL 7610097 A NL7610097 A NL 7610097A
Authority
NL
Netherlands
Prior art keywords
ring
electronic microscope
radiation grid
disc detector
grid electronic
Prior art date
Application number
NL7610097A
Other languages
English (en)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of NL7610097A publication Critical patent/NL7610097A/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/04—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings formed by bundles of fibres
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2802—Transmission microscopes

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Measurement Of Radiation (AREA)
NL7610097A 1975-09-19 1976-09-10 Doorstralings-rasterelektronenmicroscoop met een ringschijfvormige detector. NL7610097A (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752542355 DE2542355A1 (de) 1975-09-19 1975-09-19 Durchstrahlungs-raster-elektronenmikroskop mit ringscheibenfoermigem detektor

Publications (1)

Publication Number Publication Date
NL7610097A true NL7610097A (nl) 1977-03-22

Family

ID=5957167

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7610097A NL7610097A (nl) 1975-09-19 1976-09-10 Doorstralings-rasterelektronenmicroscoop met een ringschijfvormige detector.

Country Status (5)

Country Link
US (1) US4149074A (nl)
JP (1) JPS5238880A (nl)
DE (1) DE2542355A1 (nl)
GB (1) GB1556724A (nl)
NL (1) NL7610097A (nl)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4217495A (en) * 1978-04-18 1980-08-12 Robinson Vivian N E Electron microscope backscattered electron detectors
JP2563134B2 (ja) * 1989-01-25 1996-12-11 日本電子株式会社 走査透過型位相差電子顕微鏡
US6545277B1 (en) 2000-08-15 2003-04-08 Applied Materials, Inc. High efficiency, enhanced detecting in-lens light guide scintillator detector for SEM
JP4187544B2 (ja) * 2003-02-25 2008-11-26 富士通株式会社 走査透過型電子顕微鏡
US7705301B2 (en) * 2006-07-07 2010-04-27 Hermes Microvision, Inc. Electron beam apparatus to collect side-view and/or plane-view image with in-lens sectional detector
EP1916696B1 (en) 2006-10-25 2017-04-19 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle detector assembly, charged particle beam apparatus and method for generating an image
JP6228870B2 (ja) * 2013-06-19 2017-11-08 日本電子株式会社 検出器および荷電粒子線装置
US9431211B2 (en) * 2014-08-22 2016-08-30 The United States Of America, As Represented By The Secretary Of Commerce Hybrid electron microscope
EP3538941A4 (en) 2016-11-10 2020-06-17 The Trustees of Columbia University in the City of New York METHODS FOR FAST IMAGING OF HIGH RESOLUTION LARGE SAMPLES
US11239048B2 (en) * 2020-03-09 2022-02-01 Kla Corporation Arrayed column detector

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1017354A (en) * 1963-04-27 1966-01-19 Contina Bureauxi Und Rechenmas Improvements relating to optical coupling systems
US3629579A (en) * 1970-01-16 1971-12-21 Hitachi Ltd Electron probe specimen stage with a scattered electron detector mounted thereon
GB1394055A (en) * 1971-07-09 1975-05-14 Nat Res Dev Electron emitters
DE2204654C3 (de) * 1972-01-28 1974-10-10 Siemens Ag, 1000 Berlin Und 8000 Muenchen Korpuskularstrahlgerät mit einem Leuchtschirm und einer Fernsehkamera
FR2298806A1 (fr) * 1975-01-22 1976-08-20 Thomson Csf Dispositif coupleur optique pour interconnexion de
US3995935A (en) * 1975-04-28 1976-12-07 International Telephone And Telegraph Corporation Optical coupler

Also Published As

Publication number Publication date
JPS5238880A (en) 1977-03-25
DE2542355A1 (de) 1977-03-24
GB1556724A (en) 1979-11-28
US4149074A (en) 1979-04-10

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Legal Events

Date Code Title Description
BV The patent application has lapsed