NL7610097A - Doorstralings-rasterelektronenmicroscoop met een ringschijfvormige detector. - Google Patents
Doorstralings-rasterelektronenmicroscoop met een ringschijfvormige detector.Info
- Publication number
- NL7610097A NL7610097A NL7610097A NL7610097A NL7610097A NL 7610097 A NL7610097 A NL 7610097A NL 7610097 A NL7610097 A NL 7610097A NL 7610097 A NL7610097 A NL 7610097A NL 7610097 A NL7610097 A NL 7610097A
- Authority
- NL
- Netherlands
- Prior art keywords
- ring
- electronic microscope
- radiation grid
- disc detector
- grid electronic
- Prior art date
Links
- 230000005855 radiation Effects 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/04—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings formed by bundles of fibres
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2443—Scintillation detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2802—Transmission microscopes
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Measurement Of Radiation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19752542355 DE2542355A1 (de) | 1975-09-19 | 1975-09-19 | Durchstrahlungs-raster-elektronenmikroskop mit ringscheibenfoermigem detektor |
Publications (1)
Publication Number | Publication Date |
---|---|
NL7610097A true NL7610097A (nl) | 1977-03-22 |
Family
ID=5957167
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL7610097A NL7610097A (nl) | 1975-09-19 | 1976-09-10 | Doorstralings-rasterelektronenmicroscoop met een ringschijfvormige detector. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4149074A (nl) |
JP (1) | JPS5238880A (nl) |
DE (1) | DE2542355A1 (nl) |
GB (1) | GB1556724A (nl) |
NL (1) | NL7610097A (nl) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4217495A (en) * | 1978-04-18 | 1980-08-12 | Robinson Vivian N E | Electron microscope backscattered electron detectors |
JP2563134B2 (ja) * | 1989-01-25 | 1996-12-11 | 日本電子株式会社 | 走査透過型位相差電子顕微鏡 |
US6545277B1 (en) | 2000-08-15 | 2003-04-08 | Applied Materials, Inc. | High efficiency, enhanced detecting in-lens light guide scintillator detector for SEM |
JP4187544B2 (ja) * | 2003-02-25 | 2008-11-26 | 富士通株式会社 | 走査透過型電子顕微鏡 |
US7705301B2 (en) * | 2006-07-07 | 2010-04-27 | Hermes Microvision, Inc. | Electron beam apparatus to collect side-view and/or plane-view image with in-lens sectional detector |
EP1916696B1 (en) | 2006-10-25 | 2017-04-19 | ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Charged particle detector assembly, charged particle beam apparatus and method for generating an image |
JP6228870B2 (ja) * | 2013-06-19 | 2017-11-08 | 日本電子株式会社 | 検出器および荷電粒子線装置 |
US9431211B2 (en) * | 2014-08-22 | 2016-08-30 | The United States Of America, As Represented By The Secretary Of Commerce | Hybrid electron microscope |
EP3538941A4 (en) | 2016-11-10 | 2020-06-17 | The Trustees of Columbia University in the City of New York | METHODS FOR FAST IMAGING OF HIGH RESOLUTION LARGE SAMPLES |
US11239048B2 (en) * | 2020-03-09 | 2022-02-01 | Kla Corporation | Arrayed column detector |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1017354A (en) * | 1963-04-27 | 1966-01-19 | Contina Bureauxi Und Rechenmas | Improvements relating to optical coupling systems |
US3629579A (en) * | 1970-01-16 | 1971-12-21 | Hitachi Ltd | Electron probe specimen stage with a scattered electron detector mounted thereon |
GB1394055A (en) * | 1971-07-09 | 1975-05-14 | Nat Res Dev | Electron emitters |
DE2204654C3 (de) * | 1972-01-28 | 1974-10-10 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Korpuskularstrahlgerät mit einem Leuchtschirm und einer Fernsehkamera |
FR2298806A1 (fr) * | 1975-01-22 | 1976-08-20 | Thomson Csf | Dispositif coupleur optique pour interconnexion de |
US3995935A (en) * | 1975-04-28 | 1976-12-07 | International Telephone And Telegraph Corporation | Optical coupler |
-
1975
- 1975-09-19 DE DE19752542355 patent/DE2542355A1/de active Pending
-
1976
- 1976-08-25 US US05/717,652 patent/US4149074A/en not_active Expired - Lifetime
- 1976-08-25 GB GB35276/76A patent/GB1556724A/en not_active Expired
- 1976-09-10 NL NL7610097A patent/NL7610097A/nl not_active Application Discontinuation
- 1976-09-13 JP JP51109741A patent/JPS5238880A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
GB1556724A (en) | 1979-11-28 |
DE2542355A1 (de) | 1977-03-24 |
JPS5238880A (en) | 1977-03-25 |
US4149074A (en) | 1979-04-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
BV | The patent application has lapsed |