JPS5238880A - Transmission scanning electron microscope - Google Patents
Transmission scanning electron microscopeInfo
- Publication number
- JPS5238880A JPS5238880A JP51109741A JP10974176A JPS5238880A JP S5238880 A JPS5238880 A JP S5238880A JP 51109741 A JP51109741 A JP 51109741A JP 10974176 A JP10974176 A JP 10974176A JP S5238880 A JPS5238880 A JP S5238880A
- Authority
- JP
- Japan
- Prior art keywords
- electron microscope
- scanning electron
- transmission scanning
- transmission
- microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/04—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings formed by bundles of fibres
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2443—Scintillation detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2802—Transmission microscopes
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Measurement Of Radiation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19752542355 DE2542355A1 (de) | 1975-09-19 | 1975-09-19 | Durchstrahlungs-raster-elektronenmikroskop mit ringscheibenfoermigem detektor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5238880A true JPS5238880A (en) | 1977-03-25 |
Family
ID=5957167
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51109741A Pending JPS5238880A (en) | 1975-09-19 | 1976-09-13 | Transmission scanning electron microscope |
Country Status (5)
Country | Link |
---|---|
US (1) | US4149074A (ja) |
JP (1) | JPS5238880A (ja) |
DE (1) | DE2542355A1 (ja) |
GB (1) | GB1556724A (ja) |
NL (1) | NL7610097A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004259516A (ja) * | 2003-02-25 | 2004-09-16 | Fujitsu Ltd | 走査透過型電子顕微鏡 |
JP2015026596A (ja) * | 2013-06-19 | 2015-02-05 | 日本電子株式会社 | 検出器および荷電粒子線装置 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4217495A (en) * | 1978-04-18 | 1980-08-12 | Robinson Vivian N E | Electron microscope backscattered electron detectors |
JP2563134B2 (ja) * | 1989-01-25 | 1996-12-11 | 日本電子株式会社 | 走査透過型位相差電子顕微鏡 |
US6545277B1 (en) | 2000-08-15 | 2003-04-08 | Applied Materials, Inc. | High efficiency, enhanced detecting in-lens light guide scintillator detector for SEM |
US7705301B2 (en) * | 2006-07-07 | 2010-04-27 | Hermes Microvision, Inc. | Electron beam apparatus to collect side-view and/or plane-view image with in-lens sectional detector |
EP1916696B1 (en) | 2006-10-25 | 2017-04-19 | ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Charged particle detector assembly, charged particle beam apparatus and method for generating an image |
US9431211B2 (en) * | 2014-08-22 | 2016-08-30 | The United States Of America, As Represented By The Secretary Of Commerce | Hybrid electron microscope |
US11506877B2 (en) | 2016-11-10 | 2022-11-22 | The Trustees Of Columbia University In The City Of New York | Imaging instrument having objective axis and light sheet or light beam projector axis intersecting at less than 90 degrees |
US11239048B2 (en) * | 2020-03-09 | 2022-02-01 | Kla Corporation | Arrayed column detector |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1017354A (en) * | 1963-04-27 | 1966-01-19 | Contina Bureauxi Und Rechenmas | Improvements relating to optical coupling systems |
US3629579A (en) * | 1970-01-16 | 1971-12-21 | Hitachi Ltd | Electron probe specimen stage with a scattered electron detector mounted thereon |
GB1394055A (en) * | 1971-07-09 | 1975-05-14 | Nat Res Dev | Electron emitters |
DE2204654C3 (de) * | 1972-01-28 | 1974-10-10 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Korpuskularstrahlgerät mit einem Leuchtschirm und einer Fernsehkamera |
FR2298806A1 (fr) * | 1975-01-22 | 1976-08-20 | Thomson Csf | Dispositif coupleur optique pour interconnexion de |
US3995935A (en) * | 1975-04-28 | 1976-12-07 | International Telephone And Telegraph Corporation | Optical coupler |
-
1975
- 1975-09-19 DE DE19752542355 patent/DE2542355A1/de active Pending
-
1976
- 1976-08-25 US US05/717,652 patent/US4149074A/en not_active Expired - Lifetime
- 1976-08-25 GB GB35276/76A patent/GB1556724A/en not_active Expired
- 1976-09-10 NL NL7610097A patent/NL7610097A/xx not_active Application Discontinuation
- 1976-09-13 JP JP51109741A patent/JPS5238880A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004259516A (ja) * | 2003-02-25 | 2004-09-16 | Fujitsu Ltd | 走査透過型電子顕微鏡 |
JP2015026596A (ja) * | 2013-06-19 | 2015-02-05 | 日本電子株式会社 | 検出器および荷電粒子線装置 |
Also Published As
Publication number | Publication date |
---|---|
DE2542355A1 (de) | 1977-03-24 |
US4149074A (en) | 1979-04-10 |
NL7610097A (nl) | 1977-03-22 |
GB1556724A (en) | 1979-11-28 |
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