NL7412033A - DEVICE FOR FITTING SEMICONDUCTOR DISCS WITH REGARD TO AN IRRADIATION MASK, FOR FORMING A STRUCTURE IN PHOTO PAINT BY IRRADIATION WITH X-RAYS. - Google Patents

DEVICE FOR FITTING SEMICONDUCTOR DISCS WITH REGARD TO AN IRRADIATION MASK, FOR FORMING A STRUCTURE IN PHOTO PAINT BY IRRADIATION WITH X-RAYS.

Info

Publication number
NL7412033A
NL7412033A NL7412033A NL7412033A NL7412033A NL 7412033 A NL7412033 A NL 7412033A NL 7412033 A NL7412033 A NL 7412033A NL 7412033 A NL7412033 A NL 7412033A NL 7412033 A NL7412033 A NL 7412033A
Authority
NL
Netherlands
Prior art keywords
irradiation
rays
regard
forming
mask
Prior art date
Application number
NL7412033A
Other languages
Dutch (nl)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19732346720 external-priority patent/DE2346720C3/en
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of NL7412033A publication Critical patent/NL7412033A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7073—Alignment marks and their environment
    • G03F9/7076—Mark details, e.g. phase grating mark, temporary mark

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
NL7412033A 1973-09-17 1974-09-10 DEVICE FOR FITTING SEMICONDUCTOR DISCS WITH REGARD TO AN IRRADIATION MASK, FOR FORMING A STRUCTURE IN PHOTO PAINT BY IRRADIATION WITH X-RAYS. NL7412033A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19732346720 DE2346720C3 (en) 1973-09-17 Device for aligning semiconductor wafers with respect to an irradiation mask

Publications (1)

Publication Number Publication Date
NL7412033A true NL7412033A (en) 1975-03-19

Family

ID=5892800

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7412033A NL7412033A (en) 1973-09-17 1974-09-10 DEVICE FOR FITTING SEMICONDUCTOR DISCS WITH REGARD TO AN IRRADIATION MASK, FOR FORMING A STRUCTURE IN PHOTO PAINT BY IRRADIATION WITH X-RAYS.

Country Status (9)

Country Link
JP (1) JPS5057656A (en)
BE (1) BE820006A (en)
CH (1) CH572664A5 (en)
DK (1) DK481574A (en)
FR (1) FR2244261A1 (en)
IT (1) IT1021303B (en)
LU (1) LU70922A1 (en)
NL (1) NL7412033A (en)
SE (1) SE7411634L (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5267570A (en) * 1975-12-03 1977-06-04 Hitachi Ltd Pattern printing device
JPS5313879A (en) * 1976-07-23 1978-02-07 Nec Corp Silicon mask for x-ray exposure and its production
DE2942990A1 (en) * 1979-10-24 1981-05-07 Siemens AG, 1000 Berlin und 8000 München Automatic adjusting method for two structures in parallel planes - using sensors and markings on opposite planes to detect correspondence
DD151231A1 (en) * 1980-06-02 1981-10-08 Dietmar Klingenfeld OPTICAL ARRANGEMENT FOR PROJECTION SLITHOGRAPHIC EQUIPMENT
GB2089524B (en) * 1980-12-17 1984-12-05 Westinghouse Electric Corp High resolution lithographic process
JPS61111534A (en) * 1985-09-30 1986-05-29 Chiyou Lsi Gijutsu Kenkyu Kumiai X-ray exposure device
JPS61111535A (en) * 1985-09-30 1986-05-29 Chiyou Lsi Gijutsu Kenkyu Kumiai X-ray exposure method

Also Published As

Publication number Publication date
CH572664A5 (en) 1976-02-13
FR2244261A1 (en) 1975-04-11
SE7411634L (en) 1975-03-18
JPS5057656A (en) 1975-05-20
DE2346720A1 (en) 1975-04-03
LU70922A1 (en) 1975-02-24
DK481574A (en) 1975-06-02
IT1021303B (en) 1978-01-30
DE2346720B2 (en) 1975-07-17
BE820006A (en) 1975-01-16

Similar Documents

Publication Publication Date Title
NL7410284A (en) ENERGY ABSORBING DEVICE FOR A DEVICE FOR PERFORMING BODY EXERCISES.
NL160115B (en) DEVICE FOR CONTROLLING AN IONIZING RADIATION BUNDLE, IN PARTICULAR REGARDING HOMOGENITY.
NL154518B (en) PROCESS FOR PREPARING A COMPOSITION HARDENABLE BY UV RADIATION, AND A PHOTOGRAPHIC ELEMENT CONTAINING A LAYER FORMED FROM A COMPOSITION SO PREPARED.
NL162088B (en) PROCESS FOR THE PREPARATION OF COMPOSITIONS CONTAINING LIGHTLY POLYMERIZABLE COMPOUNDS OR MIXTURES THEREOF BY IRRADIATION WITH ULTRAVIOLET.
NL7503333A (en) DEVICE FOR USING SOLAR ENERGY FOR HEATING A BUILDING.
NL187283C (en) METHOD FOR TREATING A RADIATION-SENSITIVE PLATE
NL157613B (en) PROCESS FOR PREPARING A POLYMERIZABLE ADHESIVE COMPOSITION UNDER ANAEROBIC CONDITIONS.
NL181463C (en) LIGHT-SENSITIVE ELEMENT FOR FORMING A POSITIVE TRANSPARENT IMAGE BY SILVER DIFFUSION TRANSFER.
NL7609312A (en) DEVICE FOR ABSORBING SOLAR ENERGY.
NL174987B (en) DEVICE FOR TRANSPORT BY A PIPELINE.
NL7414007A (en) METHOD FOR MANUFACTURING A SEMI-CONDUCTOR DEVICE.
NL173858C (en) PROCESS FOR PREPARING A BIFUNCTIONAL FLUORUS POLYMER
NL167359B (en) DEVICE FOR CONTINUOUSLY TREATING A POLYMER.
NL162789C (en) METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
NL156327B (en) DEVICE FOR THE CONTINUOUS DYING IN COLOR NUANCES OF A WARENBAAN.
NL7409724A (en) DEVICE FOR TREATING A HOT GLASS PLATE.
NL7511940A (en) ZIPPER WITH AN ORGANIC FOR OPENING IN AN EMERGENCY.
NL7412033A (en) DEVICE FOR FITTING SEMICONDUCTOR DISCS WITH REGARD TO AN IRRADIATION MASK, FOR FORMING A STRUCTURE IN PHOTO PAINT BY IRRADIATION WITH X-RAYS.
NL167979C (en) PROCESS FOR PREPARING HYDROFILE MATERIALS WITH A KNITTED STRUCTURE
NL161920C (en) METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE INCLUDING THE GRID DEFORMATION T.G.V. DOPER SUBSTANCES ARE COMPENSATED.
NL164613C (en) DEVICE FOR CONTROLLING THE ELECTROLYSIS IN A CHAIN OF N ELECTROLYSIS CELLS.
NL145589B (en) PROCESS FOR PREPARING A HARDABLE PAINT UNDER THE INFLUENCE OF IONIZING RADIATION.
NL7609896A (en) PROCEDURE FOR DEMOLITING WATER BY IRRADIATION WITH ULTRAVIOLET LIGHT, AS WELL AS A DEVICE FOR APPLYING THE PROCEDURE.
NL162710B (en) METHOD FOR MANUFACTURING A LADDER AND A LADDER MADE BY USING THE METHOD
NL144288B (en) PROCESS FOR PREPARING A HARDABLE PAINT UNDER THE INFLUENCE OF IONIZING RADIATION, AS WELL AS FOR COVERING A SUBSTRATE.