NL7317452A - - Google Patents

Info

Publication number
NL7317452A
NL7317452A NL7317452A NL7317452A NL7317452A NL 7317452 A NL7317452 A NL 7317452A NL 7317452 A NL7317452 A NL 7317452A NL 7317452 A NL7317452 A NL 7317452A NL 7317452 A NL7317452 A NL 7317452A
Authority
NL
Netherlands
Application number
NL7317452A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7317452A publication Critical patent/NL7317452A/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/10Ion sources; Ion guns
    • H01J49/14Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252Tubes for spot-analysing by electron or ion beams; Microanalysers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
NL7317452A 1972-12-22 1973-12-20 NL7317452A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7246022A FR2212044A5 (enrdf_load_stackoverflow) 1972-12-22 1972-12-22

Publications (1)

Publication Number Publication Date
NL7317452A true NL7317452A (enrdf_load_stackoverflow) 1974-06-25

Family

ID=9109211

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7317452A NL7317452A (enrdf_load_stackoverflow) 1972-12-22 1973-12-20

Country Status (6)

Country Link
JP (1) JPS4998297A (enrdf_load_stackoverflow)
CH (1) CH591080A5 (enrdf_load_stackoverflow)
DE (1) DE2363581C2 (enrdf_load_stackoverflow)
FR (1) FR2212044A5 (enrdf_load_stackoverflow)
GB (1) GB1414907A (enrdf_load_stackoverflow)
NL (1) NL7317452A (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH611735A5 (enrdf_load_stackoverflow) 1975-07-25 1979-06-15 Fernand Marcel Devienne
FR2319194A1 (fr) * 1975-07-25 1977-02-18 Devienne Fernand Source d'ions de masse elevee, notamment d'ions d'oxyde d'uranium uo2
JPS6044A (ja) * 1983-06-16 1985-01-05 Hitachi Ltd 二次イオン化質量分析装置
GB8419768D0 (en) * 1984-08-02 1984-09-05 Manchester Inst Science Tech Atom beams
GB8725459D0 (en) * 1987-10-30 1987-12-02 Nat Research Dev Corpn Generating particle beams
DE4028044A1 (de) * 1990-09-05 1992-03-12 Geesthacht Gkss Forschung Verfahren und vorrichtung zur analyse und bestimmung der konzentration von elementen in vorbestimmten tiefen von objekten
GB2269934B (en) * 1992-08-19 1996-03-27 Toshiba Cambridge Res Center Spectrometer
FR2745382B1 (fr) * 1996-02-27 1998-05-07 Devienne Fernand Marcel Appareil de detection et d'analyse de molecules de natures diverses

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1349302A (fr) * 1962-11-28 1964-01-17 Centre Nat Rech Scient Microanalyseur par émission ionique secondaire

Also Published As

Publication number Publication date
FR2212044A5 (enrdf_load_stackoverflow) 1974-07-19
JPS4998297A (enrdf_load_stackoverflow) 1974-09-17
DE2363581A1 (de) 1974-06-27
CH591080A5 (enrdf_load_stackoverflow) 1977-08-31
DE2363581C2 (de) 1984-10-11
GB1414907A (en) 1975-11-19

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