NL7317452A - - Google Patents

Info

Publication number
NL7317452A
NL7317452A NL7317452A NL7317452A NL7317452A NL 7317452 A NL7317452 A NL 7317452A NL 7317452 A NL7317452 A NL 7317452A NL 7317452 A NL7317452 A NL 7317452A NL 7317452 A NL7317452 A NL 7317452A
Authority
NL
Netherlands
Application number
NL7317452A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7317452A publication Critical patent/NL7317452A/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/10Ion sources; Ion guns
    • H01J49/14Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252Tubes for spot-analysing by electron or ion beams; Microanalysers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
NL7317452A 1972-12-22 1973-12-20 NL7317452A (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7246022A FR2212044A5 (xx) 1972-12-22 1972-12-22

Publications (1)

Publication Number Publication Date
NL7317452A true NL7317452A (xx) 1974-06-25

Family

ID=9109211

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7317452A NL7317452A (xx) 1972-12-22 1973-12-20

Country Status (6)

Country Link
JP (1) JPS4998297A (xx)
CH (1) CH591080A5 (xx)
DE (1) DE2363581C2 (xx)
FR (1) FR2212044A5 (xx)
GB (1) GB1414907A (xx)
NL (1) NL7317452A (xx)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2319194A1 (fr) * 1975-07-25 1977-02-18 Devienne Fernand Source d'ions de masse elevee, notamment d'ions d'oxyde d'uranium uo2
JPS6044A (ja) * 1983-06-16 1985-01-05 Hitachi Ltd 二次イオン化質量分析装置
GB8419768D0 (en) * 1984-08-02 1984-09-05 Manchester Inst Science Tech Atom beams
GB8725459D0 (en) * 1987-10-30 1987-12-02 Nat Research Dev Corpn Generating particle beams
DE4028044A1 (de) * 1990-09-05 1992-03-12 Geesthacht Gkss Forschung Verfahren und vorrichtung zur analyse und bestimmung der konzentration von elementen in vorbestimmten tiefen von objekten
GB2269934B (en) * 1992-08-19 1996-03-27 Toshiba Cambridge Res Center Spectrometer
FR2745382B1 (fr) * 1996-02-27 1998-05-07 Devienne Fernand Marcel Appareil de detection et d'analyse de molecules de natures diverses

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1349302A (fr) * 1962-11-28 1964-01-17 Centre Nat Rech Scient Microanalyseur par émission ionique secondaire

Also Published As

Publication number Publication date
DE2363581C2 (de) 1984-10-11
FR2212044A5 (xx) 1974-07-19
GB1414907A (en) 1975-11-19
DE2363581A1 (de) 1974-06-27
JPS4998297A (xx) 1974-09-17
CH591080A5 (xx) 1977-08-31

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