JPS4998297A - - Google Patents
Info
- Publication number
- JPS4998297A JPS4998297A JP49004677A JP467774A JPS4998297A JP S4998297 A JPS4998297 A JP S4998297A JP 49004677 A JP49004677 A JP 49004677A JP 467774 A JP467774 A JP 467774A JP S4998297 A JPS4998297 A JP S4998297A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7246022A FR2212044A5 (ja) | 1972-12-22 | 1972-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4998297A true JPS4998297A (ja) | 1974-09-17 |
Family
ID=9109211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49004677A Pending JPS4998297A (ja) | 1972-12-22 | 1973-12-21 |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS4998297A (ja) |
| CH (1) | CH591080A5 (ja) |
| DE (1) | DE2363581C2 (ja) |
| FR (1) | FR2212044A5 (ja) |
| GB (1) | GB1414907A (ja) |
| NL (1) | NL7317452A (ja) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2319194A1 (fr) * | 1975-07-25 | 1977-02-18 | Devienne Fernand | Source d'ions de masse elevee, notamment d'ions d'oxyde d'uranium uo2 |
| JPS6044A (ja) * | 1983-06-16 | 1985-01-05 | Hitachi Ltd | 二次イオン化質量分析装置 |
| GB8419768D0 (en) * | 1984-08-02 | 1984-09-05 | Manchester Inst Science Tech | Atom beams |
| GB8725459D0 (en) * | 1987-10-30 | 1987-12-02 | Nat Research Dev Corpn | Generating particle beams |
| DE4028044A1 (de) * | 1990-09-05 | 1992-03-12 | Geesthacht Gkss Forschung | Verfahren und vorrichtung zur analyse und bestimmung der konzentration von elementen in vorbestimmten tiefen von objekten |
| GB2269934B (en) * | 1992-08-19 | 1996-03-27 | Toshiba Cambridge Res Center | Spectrometer |
| FR2745382B1 (fr) * | 1996-02-27 | 1998-05-07 | Devienne Fernand Marcel | Appareil de detection et d'analyse de molecules de natures diverses |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1349302A (fr) * | 1962-11-28 | 1964-01-17 | Centre Nat Rech Scient | Microanalyseur par émission ionique secondaire |
-
1972
- 1972-12-22 FR FR7246022A patent/FR2212044A5/fr not_active Expired
-
1973
- 1973-12-04 CH CH1695773A patent/CH591080A5/xx not_active IP Right Cessation
- 1973-12-10 GB GB5702473A patent/GB1414907A/en not_active Expired
- 1973-12-20 DE DE19732363581 patent/DE2363581C2/de not_active Expired
- 1973-12-20 NL NL7317452A patent/NL7317452A/xx unknown
- 1973-12-21 JP JP49004677A patent/JPS4998297A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE2363581C2 (de) | 1984-10-11 |
| NL7317452A (ja) | 1974-06-25 |
| FR2212044A5 (ja) | 1974-07-19 |
| GB1414907A (en) | 1975-11-19 |
| DE2363581A1 (de) | 1974-06-27 |
| CH591080A5 (ja) | 1977-08-31 |