CH591080A5 - - Google Patents

Info

Publication number
CH591080A5
CH591080A5 CH1695773A CH1695773A CH591080A5 CH 591080 A5 CH591080 A5 CH 591080A5 CH 1695773 A CH1695773 A CH 1695773A CH 1695773 A CH1695773 A CH 1695773A CH 591080 A5 CH591080 A5 CH 591080A5
Authority
CH
Switzerland
Application number
CH1695773A
Original Assignee
Anvar
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anvar filed Critical Anvar
Publication of CH591080A5 publication Critical patent/CH591080A5/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
CH1695773A 1972-12-22 1973-12-04 CH591080A5 (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7246022A FR2212044A5 (xx) 1972-12-22 1972-12-22

Publications (1)

Publication Number Publication Date
CH591080A5 true CH591080A5 (xx) 1977-08-31

Family

ID=9109211

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1695773A CH591080A5 (xx) 1972-12-22 1973-12-04

Country Status (6)

Country Link
JP (1) JPS4998297A (xx)
CH (1) CH591080A5 (xx)
DE (1) DE2363581C2 (xx)
FR (1) FR2212044A5 (xx)
GB (1) GB1414907A (xx)
NL (1) NL7317452A (xx)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2319194A1 (fr) * 1975-07-25 1977-02-18 Devienne Fernand Source d'ions de masse elevee, notamment d'ions d'oxyde d'uranium uo2
JPS6044A (ja) * 1983-06-16 1985-01-05 Hitachi Ltd 二次イオン化質量分析装置
GB8419768D0 (en) * 1984-08-02 1984-09-05 Manchester Inst Science Tech Atom beams
GB8725459D0 (en) * 1987-10-30 1987-12-02 Nat Research Dev Corpn Generating particle beams
DE4028044A1 (de) * 1990-09-05 1992-03-12 Geesthacht Gkss Forschung Verfahren und vorrichtung zur analyse und bestimmung der konzentration von elementen in vorbestimmten tiefen von objekten
GB2269934B (en) * 1992-08-19 1996-03-27 Toshiba Cambridge Res Center Spectrometer
FR2745382B1 (fr) * 1996-02-27 1998-05-07 Devienne Fernand Marcel Appareil de detection et d'analyse de molecules de natures diverses

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1349302A (fr) * 1962-11-28 1964-01-17 Centre Nat Rech Scient Microanalyseur par émission ionique secondaire

Also Published As

Publication number Publication date
DE2363581C2 (de) 1984-10-11
NL7317452A (xx) 1974-06-25
FR2212044A5 (xx) 1974-07-19
GB1414907A (en) 1975-11-19
DE2363581A1 (de) 1974-06-27
JPS4998297A (xx) 1974-09-17

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Legal Events

Date Code Title Description
PL Patent ceased