NL7316340A - - Google Patents
Info
- Publication number
- NL7316340A NL7316340A NL7316340A NL7316340A NL7316340A NL 7316340 A NL7316340 A NL 7316340A NL 7316340 A NL7316340 A NL 7316340A NL 7316340 A NL7316340 A NL 7316340A NL 7316340 A NL7316340 A NL 7316340A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/0033—Heating devices using lamps
- H05B3/0038—Heating devices using lamps for industrial applications
- H05B3/0047—Heating devices using lamps for industrial applications for semiconductor manufacture
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US31044472A | 1972-11-29 | 1972-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL7316340A true NL7316340A (en:Method) | 1974-05-31 |
Family
ID=23202520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL7316340A NL7316340A (en:Method) | 1972-11-29 | 1973-11-29 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPS508473A (en:Method) |
| DE (1) | DE2359004C3 (en:Method) |
| FR (1) | FR2207757B2 (en:Method) |
| GB (1) | GB1452076A (en:Method) |
| NL (1) | NL7316340A (en:Method) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2335043A1 (fr) * | 1975-12-11 | 1977-07-08 | Phizichesky Inst Im | Procede d'obtention, par croissance, de couches epitaxiales de semi-conducteurs et dispositif pour la mise en oeuvre dudit procede |
| JPS5710240A (en) * | 1980-06-20 | 1982-01-19 | Sony Corp | Forming method of insulating film |
| JPS5791526A (en) * | 1980-11-28 | 1982-06-07 | Fujitsu Ltd | Heating method for substrate surface in vacuum container |
| US4545327A (en) * | 1982-08-27 | 1985-10-08 | Anicon, Inc. | Chemical vapor deposition apparatus |
| JPS60105221A (ja) * | 1984-10-11 | 1985-06-10 | Hitachi Ltd | 気相ウエハ処理装置 |
| FR2594529B1 (fr) * | 1986-02-19 | 1990-01-26 | Bertin & Cie | Appareil pour traitements thermiques de pieces minces, telles que des plaquettes de silicium |
| JPS62227475A (ja) * | 1986-03-31 | 1987-10-06 | Sekisui Chem Co Ltd | 磁性流体を用いた防食処理方法 |
| US4811493A (en) * | 1987-08-05 | 1989-03-14 | Burgio Joseph T Jr | Dryer-cooler apparatus |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3200018A (en) * | 1962-01-29 | 1965-08-10 | Hughes Aircraft Co | Controlled epitaxial crystal growth by focusing electromagnetic radiation |
| US3623712A (en) * | 1969-10-15 | 1971-11-30 | Applied Materials Tech | Epitaxial radiation heated reactor and process |
| FR2114105A5 (en) * | 1970-11-16 | 1972-06-30 | Applied Materials Techno | Epitaxial radiation heated reactor - including a quartz reaction chamber |
-
1973
- 1973-11-27 DE DE19732359004 patent/DE2359004C3/de not_active Expired
- 1973-11-27 GB GB5501573A patent/GB1452076A/en not_active Expired
- 1973-11-28 FR FR7342353A patent/FR2207757B2/fr not_active Expired
- 1973-11-29 NL NL7316340A patent/NL7316340A/xx unknown
- 1973-11-29 JP JP13391173A patent/JPS508473A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JPS508473A (en:Method) | 1975-01-28 |
| FR2207757B2 (en:Method) | 1980-01-11 |
| DE2359004A1 (de) | 1974-06-06 |
| DE2359004C3 (de) | 1983-05-19 |
| GB1452076A (en) | 1976-10-06 |
| FR2207757A2 (en:Method) | 1974-06-21 |
| DE2359004B2 (de) | 1982-09-16 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| BN | A decision not to publish the application has become irrevocable |