NL7316340A - - Google Patents

Info

Publication number
NL7316340A
NL7316340A NL7316340A NL7316340A NL7316340A NL 7316340 A NL7316340 A NL 7316340A NL 7316340 A NL7316340 A NL 7316340A NL 7316340 A NL7316340 A NL 7316340A NL 7316340 A NL7316340 A NL 7316340A
Authority
NL
Netherlands
Application number
NL7316340A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7316340A publication Critical patent/NL7316340A/xx

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/0033—Heating devices using lamps
    • H05B3/0038—Heating devices using lamps for industrial applications
    • H05B3/0047—Heating devices using lamps for industrial applications for semiconductor manufacture

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
NL7316340A 1972-11-29 1973-11-29 NL7316340A (enrdf_load_html_response)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US31044472A 1972-11-29 1972-11-29

Publications (1)

Publication Number Publication Date
NL7316340A true NL7316340A (enrdf_load_html_response) 1974-05-31

Family

ID=23202520

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7316340A NL7316340A (enrdf_load_html_response) 1972-11-29 1973-11-29

Country Status (5)

Country Link
JP (1) JPS508473A (enrdf_load_html_response)
DE (1) DE2359004C3 (enrdf_load_html_response)
FR (1) FR2207757B2 (enrdf_load_html_response)
GB (1) GB1452076A (enrdf_load_html_response)
NL (1) NL7316340A (enrdf_load_html_response)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2335043A1 (fr) * 1975-12-11 1977-07-08 Phizichesky Inst Im Procede d'obtention, par croissance, de couches epitaxiales de semi-conducteurs et dispositif pour la mise en oeuvre dudit procede
JPS5710240A (en) * 1980-06-20 1982-01-19 Sony Corp Forming method of insulating film
JPS5791526A (en) * 1980-11-28 1982-06-07 Fujitsu Ltd Heating method for substrate surface in vacuum container
US4545327A (en) * 1982-08-27 1985-10-08 Anicon, Inc. Chemical vapor deposition apparatus
JPS60105221A (ja) * 1984-10-11 1985-06-10 Hitachi Ltd 気相ウエハ処理装置
FR2594529B1 (fr) * 1986-02-19 1990-01-26 Bertin & Cie Appareil pour traitements thermiques de pieces minces, telles que des plaquettes de silicium
JPS62227475A (ja) * 1986-03-31 1987-10-06 Sekisui Chem Co Ltd 磁性流体を用いた防食処理方法
US4811493A (en) * 1987-08-05 1989-03-14 Burgio Joseph T Jr Dryer-cooler apparatus

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3200018A (en) * 1962-01-29 1965-08-10 Hughes Aircraft Co Controlled epitaxial crystal growth by focusing electromagnetic radiation
US3623712A (en) * 1969-10-15 1971-11-30 Applied Materials Tech Epitaxial radiation heated reactor and process
FR2114105A5 (en) * 1970-11-16 1972-06-30 Applied Materials Techno Epitaxial radiation heated reactor - including a quartz reaction chamber

Also Published As

Publication number Publication date
FR2207757B2 (enrdf_load_html_response) 1980-01-11
GB1452076A (en) 1976-10-06
DE2359004B2 (de) 1982-09-16
DE2359004C3 (de) 1983-05-19
JPS508473A (enrdf_load_html_response) 1975-01-28
DE2359004A1 (de) 1974-06-06
FR2207757A2 (enrdf_load_html_response) 1974-06-21

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Legal Events

Date Code Title Description
BN A decision not to publish the application has become irrevocable