NL7313420A - - Google Patents

Info

Publication number
NL7313420A
NL7313420A NL7313420A NL7313420A NL7313420A NL 7313420 A NL7313420 A NL 7313420A NL 7313420 A NL7313420 A NL 7313420A NL 7313420 A NL7313420 A NL 7313420A NL 7313420 A NL7313420 A NL 7313420A
Authority
NL
Netherlands
Application number
NL7313420A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7313420A publication Critical patent/NL7313420A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
NL7313420A 1972-09-29 1973-09-28 NL7313420A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00293322A US3817592A (en) 1972-09-29 1972-09-29 Method for reproducibly fabricating and using stable thermal-field emission cathodes

Publications (1)

Publication Number Publication Date
NL7313420A true NL7313420A (enrdf_load_stackoverflow) 1974-04-02

Family

ID=23128615

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7313420A NL7313420A (enrdf_load_stackoverflow) 1972-09-29 1973-09-28

Country Status (7)

Country Link
US (1) US3817592A (enrdf_load_stackoverflow)
JP (1) JPS585496B2 (enrdf_load_stackoverflow)
CA (1) CA1014602A (enrdf_load_stackoverflow)
DE (1) DE2345096A1 (enrdf_load_stackoverflow)
FR (1) FR2201533B1 (enrdf_load_stackoverflow)
GB (1) GB1445695A (enrdf_load_stackoverflow)
NL (1) NL7313420A (enrdf_load_stackoverflow)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3947716A (en) * 1973-08-27 1976-03-30 The United States Of America As Represented By The Secretary Of The Army Field emission tip and process for making same
JPS5062766A (enrdf_load_stackoverflow) * 1973-10-05 1975-05-28
US3919580A (en) * 1974-09-11 1975-11-11 Us Energy Relativistic electron beam generator
US4324999A (en) * 1980-04-30 1982-04-13 Burroughs Corporation Electron-beam cathode having a uniform emission pattern
US4486684A (en) * 1981-05-26 1984-12-04 International Business Machines Corporation Single crystal lanthanum hexaboride electron beam emitter having high brightness
US4588928A (en) * 1983-06-15 1986-05-13 At&T Bell Laboratories Electron emission system
JPS60225345A (ja) * 1984-04-20 1985-11-09 Hitachi Ltd 電界放射方法およびそれに用いる電子線装置
EP0287774A3 (de) * 1987-04-24 1990-03-07 Balzers Aktiengesellschaft Thermionische Haarnadelkathode
US5012194A (en) * 1989-09-05 1991-04-30 Raytheon Company Method testing electron discharge tubes
DE4040201C2 (de) * 1990-12-15 1994-11-24 Hell Ag Linotype Verfahren zum wartungsarmen Betrieb einer Vorrichtung zur Herstellung einer Oberflächenstruktur und Vorrichtung zur Durchführung des Verfahrens
FR2707795B1 (fr) * 1993-07-12 1995-08-11 Commissariat Energie Atomique Perfectionnement à un procédé de fabrication d'une source d'électrons à micropointes.
FR2750785B1 (fr) * 1996-07-02 1998-11-06 Pixtech Sa Procede de regeneration de micropointes d'un ecran plat de visualisation
JP2807668B2 (ja) * 1997-03-27 1998-10-08 株式会社日立製作所 電子ビーム欠陥検査方法および装置
US9159527B2 (en) * 2003-10-16 2015-10-13 Carl Zeiss Microscopy, Llc Systems and methods for a gas field ionization source
JP2006059513A (ja) * 2004-07-22 2006-03-02 Kuresutetsuku:Kk 電子ビーム照射装置および描画装置
US7888654B2 (en) * 2007-01-24 2011-02-15 Fei Company Cold field emitter
US8736170B1 (en) 2011-02-22 2014-05-27 Fei Company Stable cold field emission electron source
CN102629538B (zh) 2012-04-13 2014-03-19 吴江炀晟阴极材料有限公司 具有低逸出功和高化学稳定性的电极材料
US9697983B1 (en) * 2016-02-29 2017-07-04 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Thermal field emitter tip, electron beam device including a thermal field emitter tip and method for operating an electron beam device
US11887805B2 (en) 2021-09-30 2024-01-30 Fei Company Filament-less electron source
CN119404276A (zh) * 2022-07-20 2025-02-07 株式会社日立高新技术 带电粒子源、带电粒子枪、带电粒子束装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3374386A (en) * 1964-11-02 1968-03-19 Field Emission Corp Field emission cathode having tungsten miller indices 100 plane coated with zirconium, hafnium or magnesium on oxygen binder
US3356887A (en) * 1965-07-30 1967-12-05 Frederick C W Heil Fe cathode redesign

Also Published As

Publication number Publication date
CA1014602A (en) 1977-07-26
FR2201533B1 (enrdf_load_stackoverflow) 1977-05-13
JPS4973967A (enrdf_load_stackoverflow) 1974-07-17
FR2201533A1 (enrdf_load_stackoverflow) 1974-04-26
US3817592A (en) 1974-06-18
DE2345096A1 (de) 1974-04-04
GB1445695A (en) 1976-08-11
JPS585496B2 (ja) 1983-01-31

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Legal Events

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