NL7305323A - - Google Patents

Info

Publication number
NL7305323A
NL7305323A NL7305323A NL7305323A NL7305323A NL 7305323 A NL7305323 A NL 7305323A NL 7305323 A NL7305323 A NL 7305323A NL 7305323 A NL7305323 A NL 7305323A NL 7305323 A NL7305323 A NL 7305323A
Authority
NL
Netherlands
Application number
NL7305323A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7305323A publication Critical patent/NL7305323A/xx

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders
    • C23C14/505Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
NL7305323A 1972-04-17 1973-04-16 NL7305323A (pm)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US24437472A 1972-04-17 1972-04-17

Publications (1)

Publication Number Publication Date
NL7305323A true NL7305323A (pm) 1973-06-25

Family

ID=22922463

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7305323A NL7305323A (pm) 1972-04-17 1973-04-16

Country Status (4)

Country Link
JP (1) JPS5328871B2 (pm)
BE (1) BE798324A (pm)
GB (1) GB1428702A (pm)
NL (1) NL7305323A (pm)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51107287A (ja) * 1975-03-18 1976-09-22 Fujikoshi Kk Koshitsuhimakukeiseisochi
ATE7714T1 (de) * 1980-07-01 1984-06-15 The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Verfahren zur massenherstellung von legierungen und vorrichtung hierfuer.
CN107513688A (zh) * 2017-09-25 2017-12-26 江门市新合盛涂料实业有限公司 一种真空镀膜机
CN108359934B (zh) * 2018-03-26 2020-01-07 吉林大学 用于在柱型基片上均匀蒸镀材料的镀膜机的上法兰盘
CN111424252A (zh) * 2020-04-27 2020-07-17 台州市思考特机器人科技有限公司 一种管料加工真空镀膜箱体

Also Published As

Publication number Publication date
GB1428702A (en) 1976-03-17
JPS4917380A (pm) 1974-02-15
JPS5328871B2 (pm) 1978-08-17
BE798324A (fr) 1973-10-17

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Legal Events

Date Code Title Description
BC A request for examination has been filed
BV The patent application has lapsed