NL7109534A - - Google Patents

Info

Publication number
NL7109534A
NL7109534A NL7109534A NL7109534A NL7109534A NL 7109534 A NL7109534 A NL 7109534A NL 7109534 A NL7109534 A NL 7109534A NL 7109534 A NL7109534 A NL 7109534A NL 7109534 A NL7109534 A NL 7109534A
Authority
NL
Netherlands
Application number
NL7109534A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7109534A publication Critical patent/NL7109534A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/88—Processes of manufacture
    • H01M4/8825—Methods for deposition of the catalytic active composition
    • H01M4/8867—Vapour deposition
    • H01M4/8871—Sputtering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
NL7109534A 1970-07-10 1971-07-09 NL7109534A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7026730A FR2098563A5 (enrdf_load_stackoverflow) 1970-07-10 1970-07-10

Publications (1)

Publication Number Publication Date
NL7109534A true NL7109534A (enrdf_load_stackoverflow) 1972-01-12

Family

ID=9058937

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7109534A NL7109534A (enrdf_load_stackoverflow) 1970-07-10 1971-07-09

Country Status (13)

Country Link
US (1) US3779885A (enrdf_load_stackoverflow)
JP (1) JPS5520747Y2 (enrdf_load_stackoverflow)
AT (1) AT304220B (enrdf_load_stackoverflow)
BE (1) BE769722A (enrdf_load_stackoverflow)
CA (2) CA994708A (enrdf_load_stackoverflow)
CH (1) CH538551A (enrdf_load_stackoverflow)
DE (1) DE2134377C3 (enrdf_load_stackoverflow)
ES (1) ES393087A1 (enrdf_load_stackoverflow)
FR (1) FR2098563A5 (enrdf_load_stackoverflow)
GB (1) GB1333617A (enrdf_load_stackoverflow)
NL (1) NL7109534A (enrdf_load_stackoverflow)
SE (1) SE366778B (enrdf_load_stackoverflow)
SU (1) SU405215A3 (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU5889880A (en) * 1979-07-02 1981-01-15 Olin Corporation Manufacture of low overvoltage electrodes by cathodic sputtering
DE3107914A1 (de) * 1981-03-02 1982-09-16 Leybold-Heraeus GmbH, 5000 Köln Verfahren und vorrichtung zum beschichten von formteilen durch katodenzerstaeubung
US4451344A (en) * 1982-03-26 1984-05-29 International Business Machines Corp. Method of making edge protected ferrite core
US4812217A (en) * 1987-04-27 1989-03-14 American Telephone And Telegraph Company, At&T Bell Laboratories Method and apparatus for feeding and coating articles in a controlled atmosphere
US5322606A (en) * 1991-12-26 1994-06-21 Xerox Corporation Use of rotary solenoid as a shutter actuator on a rotating arm
US5279724A (en) * 1991-12-26 1994-01-18 Xerox Corporation Dual sputtering source
CA2137471A1 (en) 1992-06-26 1994-01-06 Tugrul Yasar Transport system for wafer processing line
WO2021261484A1 (ja) * 2020-06-23 2021-12-30 三国電子有限会社 誘導結合プラズマによりスパッタリング成膜を行う成膜装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1758531A (en) * 1926-10-22 1930-05-13 Elektrodenzerstaubung M B H Ge Vacuum dispersion coating process
US3294670A (en) * 1963-10-07 1966-12-27 Western Electric Co Apparatus for processing materials in a controlled atmosphere
LU45647A1 (enrdf_load_stackoverflow) * 1964-03-12 1965-09-13
LU52106A1 (enrdf_load_stackoverflow) * 1966-10-05 1968-05-07
US3594301A (en) * 1968-11-22 1971-07-20 Gen Electric Sputter coating apparatus

Also Published As

Publication number Publication date
AT304220B (de) 1972-12-27
SE366778B (enrdf_load_stackoverflow) 1974-05-06
GB1333617A (en) 1973-10-10
US3779885A (en) 1973-12-18
ES393087A1 (es) 1973-10-01
FR2098563A5 (enrdf_load_stackoverflow) 1972-03-10
JPS5149723U (enrdf_load_stackoverflow) 1976-04-15
SU405215A3 (enrdf_load_stackoverflow) 1973-10-22
BE769722A (fr) 1971-11-16
JPS5520747Y2 (enrdf_load_stackoverflow) 1980-05-19
DE2134377C3 (de) 1974-11-28
DE2134377A1 (de) 1972-01-13
CH538551A (fr) 1973-06-30
DE2134377B2 (de) 1974-04-25
CA981622A (en) 1976-01-13
CA994708A (fr) 1976-08-10

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Legal Events

Date Code Title Description
BV The patent application has lapsed